12/9/2012	6:43:38 AM	Helium valve closed
12/9/2012	6:43:38 AM	H2 valve closed
12/9/2012	6:43:38 AM	BCl3 valve closed
12/9/2012	6:43:38 AM	PH3 valve closed
12/9/2012	6:43:38 AM	SiCl4 pre valve closed
12/9/2012	6:43:38 AM	SiCl4 post valve closed
12/9/2012	6:43:38 AM	Main Vac valve closed
12/9/2012	6:43:38 AM	Bypass valve closed
12/9/2012	6:43:38 AM	Bubbler valve closed
12/9/2012	6:43:38 AM	Helium MFC set to  0.000000
12/9/2012	6:43:38 AM	H2 MFC set to  0.000000
12/9/2012	6:43:38 AM	BCl3 MFC set to  0.000000
12/9/2012	6:43:38 AM	PH3 MFC set to  0.000000
12/9/2012	6:43:38 AM	SiCl4 MFC set to  0.000000
12/9/2012	6:43:38 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:43:38 AM	Tube furnace set to 0
12/9/2012	6:43:41 AM	Helium valve closed
12/9/2012	6:43:41 AM	BCl3 valve closed
12/9/2012	6:43:41 AM	PH3 valve closed
12/9/2012	6:43:41 AM	SiCl4 pre valve closed
12/9/2012	6:43:41 AM	SiCl4 post valve closed
12/9/2012	6:43:41 AM	Main Vac valve closed
12/9/2012	6:43:41 AM	Bypass valve closed
12/9/2012	6:43:41 AM	Bubbler valve closed
12/9/2012	6:43:41 AM	H2 valve opened
12/9/2012	6:43:41 AM	Helium MFC set to  0.000000
12/9/2012	6:43:41 AM	H2 MFC set to  500.000000
12/9/2012	6:43:41 AM	BCl3 MFC set to  0.000000
12/9/2012	6:43:41 AM	PH3 MFC set to  0.000000
12/9/2012	6:43:41 AM	SiCl4 MFC set to  0.000000
12/9/2012	6:43:41 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:43:41 AM	Tube furnace set to 0
12/9/2012	6:44:53 AM	Helium valve closed
12/9/2012	6:44:53 AM	BCl3 valve closed
12/9/2012	6:44:53 AM	PH3 valve closed
12/9/2012	6:44:53 AM	SiCl4 pre valve closed
12/9/2012	6:44:53 AM	SiCl4 post valve closed
12/9/2012	6:44:53 AM	Main Vac valve closed
12/9/2012	6:44:53 AM	Bypass valve closed
12/9/2012	6:44:53 AM	H2 valve opened
12/9/2012	6:44:53 AM	Bubbler valve opened
12/9/2012	6:44:53 AM	Helium MFC set to  0.000000
12/9/2012	6:44:53 AM	H2 MFC set to  500.000000
12/9/2012	6:44:53 AM	BCl3 MFC set to  0.000000
12/9/2012	6:44:54 AM	PH3 MFC set to  0.000000
12/9/2012	6:44:54 AM	SiCl4 MFC set to  0.000000
12/9/2012	6:44:54 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:44:54 AM	Tube furnace set to 0
12/9/2012	6:44:55 AM	Helium valve closed
12/9/2012	6:44:55 AM	BCl3 valve closed
12/9/2012	6:44:55 AM	PH3 valve closed
12/9/2012	6:44:55 AM	SiCl4 pre valve closed
12/9/2012	6:44:55 AM	SiCl4 post valve closed
12/9/2012	6:44:55 AM	Main Vac valve closed
12/9/2012	6:44:55 AM	Bypass valve closed
12/9/2012	6:44:55 AM	H2 valve opened
12/9/2012	6:44:55 AM	Bubbler valve opened
12/9/2012	6:44:55 AM	Helium MFC set to  0.000000
12/9/2012	6:44:55 AM	H2 MFC set to  450.000000
12/9/2012	6:44:55 AM	BCl3 MFC set to  0.000000
12/9/2012	6:44:55 AM	PH3 MFC set to  0.000000
12/9/2012	6:44:55 AM	SiCl4 MFC set to  0.000000
12/9/2012	6:44:55 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:44:55 AM	Tube furnace set to 1000
12/9/2012	7:09:55 AM	Helium valve closed
12/9/2012	7:09:55 AM	PH3 valve closed
12/9/2012	7:09:55 AM	Main Vac valve closed
12/9/2012	7:09:55 AM	Bypass valve closed
12/9/2012	7:09:55 AM	H2 valve opened
12/9/2012	7:09:55 AM	BCl3 valve opened
12/9/2012	7:09:55 AM	SiCl4 pre valve opened
12/9/2012	7:09:55 AM	SiCl4 post valve opened
12/9/2012	7:09:55 AM	Bubbler valve opened
12/9/2012	7:09:55 AM	Helium MFC set to  0.000000
12/9/2012	7:09:55 AM	H2 MFC set to  450.000000
12/9/2012	7:09:55 AM	BCl3 MFC set to  1.500000
12/9/2012	7:09:55 AM	PH3 MFC set to  0.000000
12/9/2012	7:09:55 AM	SiCl4 MFC set to  50.000000
12/9/2012	7:09:55 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:09:55 AM	Tube furnace set to 1000
12/9/2012	7:14:55 AM	Helium valve closed
12/9/2012	7:14:55 AM	BCl3 valve closed
12/9/2012	7:14:55 AM	PH3 valve closed
12/9/2012	7:14:55 AM	SiCl4 pre valve closed
12/9/2012	7:14:55 AM	SiCl4 post valve closed
12/9/2012	7:14:55 AM	Main Vac valve closed
12/9/2012	7:14:55 AM	Bypass valve closed
12/9/2012	7:14:55 AM	H2 valve opened
12/9/2012	7:14:55 AM	Bubbler valve opened
12/9/2012	7:14:55 AM	Helium MFC set to  0.000000
12/9/2012	7:14:55 AM	H2 MFC set to  500.000000
12/9/2012	7:14:55 AM	BCl3 MFC set to  0.000000
12/9/2012	7:14:55 AM	PH3 MFC set to  0.000000
12/9/2012	7:14:55 AM	SiCl4 MFC set to  0.000000
12/9/2012	7:14:55 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:14:55 AM	Tube furnace set to 750
12/9/2012	7:19:55 AM	H2 valve closed
12/9/2012	7:19:55 AM	BCl3 valve closed
12/9/2012	7:19:55 AM	PH3 valve closed
12/9/2012	7:19:55 AM	SiCl4 pre valve closed
12/9/2012	7:19:55 AM	SiCl4 post valve closed
12/9/2012	7:19:55 AM	Main Vac valve closed
12/9/2012	7:19:55 AM	Bypass valve closed
12/9/2012	7:19:55 AM	Helium valve opened
12/9/2012	7:19:55 AM	Bubbler valve opened
12/9/2012	7:19:55 AM	Helium MFC set to  500.000000
12/9/2012	7:19:55 AM	H2 MFC set to  0.000000
12/9/2012	7:19:55 AM	BCl3 MFC set to  0.000000
12/9/2012	7:19:55 AM	PH3 MFC set to  0.000000
12/9/2012	7:19:55 AM	SiCl4 MFC set to  0.000000
12/9/2012	7:19:55 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:19:56 AM	Tube furnace set to 0
12/9/2012	7:39:56 AM	Helium valve closed
12/9/2012	7:39:56 AM	H2 valve closed
12/9/2012	7:39:56 AM	BCl3 valve closed
12/9/2012	7:39:56 AM	PH3 valve closed
12/9/2012	7:39:56 AM	SiCl4 pre valve closed
12/9/2012	7:39:56 AM	SiCl4 post valve closed
12/9/2012	7:39:56 AM	Main Vac valve closed
12/9/2012	7:39:56 AM	Bypass valve closed
12/9/2012	7:39:56 AM	Bubbler valve closed
12/9/2012	7:39:56 AM	Helium MFC set to  0.000000
12/9/2012	7:39:56 AM	H2 MFC set to  0.000000
12/9/2012	7:39:56 AM	BCl3 MFC set to  0.000000
12/9/2012	7:39:56 AM	PH3 MFC set to  0.000000
12/9/2012	7:39:56 AM	SiCl4 MFC set to  0.000000
12/9/2012	7:39:56 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:39:56 AM	Tube furnace set to 0
12/9/2012	7:39:57 AM	Run finished at 7:39 AM
12/9/2012	8:33:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	8:33:52 AM	Recipe started at 8:33 AM
12/9/2012	8:33:52 AM	Helium valve closed
12/9/2012	8:33:52 AM	H2 valve closed
12/9/2012	8:33:52 AM	BCl3 valve closed
12/9/2012	8:33:52 AM	PH3 valve closed
12/9/2012	8:33:52 AM	SiCl4 pre valve closed
12/9/2012	8:33:52 AM	SiCl4 post valve closed
12/9/2012	8:33:52 AM	Main Vac valve closed
12/9/2012	8:33:52 AM	Bypass valve closed
12/9/2012	8:33:52 AM	Bubbler valve closed
12/9/2012	8:33:52 AM	Helium MFC set to  0.000000
12/9/2012	8:33:52 AM	H2 MFC set to  0.000000
12/9/2012	8:33:52 AM	BCl3 MFC set to  0.000000
12/9/2012	8:33:52 AM	PH3 MFC set to  0.000000
12/9/2012	8:33:52 AM	SiCl4 MFC set to  0.000000
12/9/2012	8:33:52 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:33:52 AM	Tube furnace set to 0
12/9/2012	8:33:55 AM	H2 valve closed
12/9/2012	8:33:55 AM	BCl3 valve closed
12/9/2012	8:33:55 AM	PH3 valve closed
12/9/2012	8:33:55 AM	SiCl4 pre valve closed
12/9/2012	8:33:55 AM	SiCl4 post valve closed
12/9/2012	8:33:55 AM	Main Vac valve closed
12/9/2012	8:33:55 AM	Bypass valve closed
12/9/2012	8:33:55 AM	Bubbler valve closed
12/9/2012	8:33:55 AM	Helium valve opened
12/9/2012	8:33:55 AM	Helium MFC set to  500.000000
12/9/2012	8:33:55 AM	H2 MFC set to  0.000000
12/9/2012	8:33:55 AM	BCl3 MFC set to  0.000000
12/9/2012	8:33:55 AM	PH3 MFC set to  0.000000
12/9/2012	8:33:55 AM	SiCl4 MFC set to  0.000000
12/9/2012	8:33:55 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:33:55 AM	Tube furnace set to 0
12/9/2012	8:33:57 AM	Helium valve closed
12/9/2012	8:33:57 AM	H2 valve closed
12/9/2012	8:33:57 AM	BCl3 valve closed
12/9/2012	8:33:57 AM	PH3 valve closed
12/9/2012	8:33:57 AM	SiCl4 pre valve closed
12/9/2012	8:33:57 AM	SiCl4 post valve closed
12/9/2012	8:33:57 AM	Main Vac valve closed
12/9/2012	8:33:57 AM	Bypass valve closed
12/9/2012	8:33:57 AM	Bubbler valve closed
12/9/2012	8:33:57 AM	Helium MFC set to  0.000000
12/9/2012	8:33:57 AM	H2 MFC set to  0.000000
12/9/2012	8:33:57 AM	BCl3 MFC set to  0.000000
12/9/2012	8:33:57 AM	PH3 MFC set to  0.000000
12/9/2012	8:33:57 AM	SiCl4 MFC set to  0.000000
12/9/2012	8:33:57 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:33:57 AM	Tube furnace set to 0
12/9/2012	8:33:58 AM	Run finished at 8:33 AM
12/9/2012	8:33:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	8:39:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	8:39:36 AM	Recipe started at 8:39 AM
12/9/2012	8:39:36 AM	Helium valve closed
12/9/2012	8:39:36 AM	H2 valve closed
12/9/2012	8:39:36 AM	BCl3 valve closed
12/9/2012	8:39:36 AM	PH3 valve closed
12/9/2012	8:39:36 AM	SiCl4 pre valve closed
12/9/2012	8:39:36 AM	SiCl4 post valve closed
12/9/2012	8:39:36 AM	Main Vac valve closed
12/9/2012	8:39:36 AM	Bubbler valve closed
12/9/2012	8:39:36 AM	Bypass valve opened
12/9/2012	8:39:36 AM	Helium MFC set to  0.000000
12/9/2012	8:39:36 AM	H2 MFC set to  0.000000
12/9/2012	8:39:36 AM	BCl3 MFC set to  0.000000
12/9/2012	8:39:36 AM	PH3 MFC set to  0.000000
12/9/2012	8:39:36 AM	SiCl4 MFC set to  0.000000
12/9/2012	8:39:36 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:39:36 AM	Tube furnace set to 0
12/9/2012	8:41:00 AM	Helium valve closed
12/9/2012	8:41:00 AM	H2 valve closed
12/9/2012	8:41:00 AM	BCl3 valve closed
12/9/2012	8:41:00 AM	PH3 valve closed
12/9/2012	8:41:00 AM	SiCl4 pre valve closed
12/9/2012	8:41:00 AM	SiCl4 post valve closed
12/9/2012	8:41:00 AM	Main Vac valve closed
12/9/2012	8:41:00 AM	Bubbler valve closed
12/9/2012	8:41:00 AM	Bypass valve opened
12/9/2012	8:41:00 AM	Helium MFC set to  0.000000
12/9/2012	8:41:00 AM	H2 MFC set to  0.000000
12/9/2012	8:41:00 AM	BCl3 MFC set to  0.000000
12/9/2012	8:41:00 AM	PH3 MFC set to  0.000000
12/9/2012	8:41:00 AM	SiCl4 MFC set to  0.000000
12/9/2012	8:41:00 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:41:00 AM	Tube furnace set to 0
12/9/2012	8:42:01 AM	Helium valve closed
12/9/2012	8:42:01 AM	H2 valve closed
12/9/2012	8:42:01 AM	BCl3 valve closed
12/9/2012	8:42:01 AM	PH3 valve closed
12/9/2012	8:42:01 AM	SiCl4 pre valve closed
12/9/2012	8:42:01 AM	SiCl4 post valve closed
12/9/2012	8:42:01 AM	Bypass valve closed
12/9/2012	8:42:01 AM	Bubbler valve closed
12/9/2012	8:42:01 AM	Main Vac valve opened
12/9/2012	8:42:01 AM	Helium MFC set to  0.000000
12/9/2012	8:42:01 AM	H2 MFC set to  0.000000
12/9/2012	8:42:01 AM	BCl3 MFC set to  0.000000
12/9/2012	8:42:01 AM	PH3 MFC set to  0.000000
12/9/2012	8:42:01 AM	SiCl4 MFC set to  0.000000
12/9/2012	8:42:01 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:42:01 AM	Tube furnace set to 0
12/9/2012	8:42:02 AM	Run finished at 8:42 AM
12/9/2012	8:42:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	8:43:19 AM	Recipe started at 8:43 AM
12/9/2012	8:43:19 AM	Helium valve closed
12/9/2012	8:43:19 AM	H2 valve closed
12/9/2012	8:43:19 AM	BCl3 valve closed
12/9/2012	8:43:19 AM	PH3 valve closed
12/9/2012	8:43:19 AM	SiCl4 pre valve closed
12/9/2012	8:43:19 AM	SiCl4 post valve closed
12/9/2012	8:43:19 AM	Bypass valve closed
12/9/2012	8:43:19 AM	Bubbler valve closed
12/9/2012	8:43:19 AM	Main Vac valve opened
12/9/2012	8:43:19 AM	Helium MFC set to  0.000000
12/9/2012	8:43:19 AM	H2 MFC set to  0.000000
12/9/2012	8:43:19 AM	BCl3 MFC set to  0.000000
12/9/2012	8:43:19 AM	PH3 MFC set to  0.000000
12/9/2012	8:43:19 AM	SiCl4 MFC set to  0.000000
12/9/2012	8:43:19 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:43:19 AM	Tube furnace set to 150
12/9/2012	10:18:56 AM	H2 valve closed
12/9/2012	10:18:56 AM	BCl3 valve closed
12/9/2012	10:18:56 AM	PH3 valve closed
12/9/2012	10:18:56 AM	SiCl4 pre valve closed
12/9/2012	10:18:56 AM	SiCl4 post valve closed
12/9/2012	10:18:56 AM	Bypass valve closed
12/9/2012	10:18:56 AM	Bubbler valve closed
12/9/2012	10:18:56 AM	Helium valve opened
12/9/2012	10:18:56 AM	Main Vac valve opened
12/9/2012	10:18:56 AM	Helium MFC set to  20.000000
12/9/2012	10:18:56 AM	H2 MFC set to  0.000000
12/9/2012	10:18:56 AM	BCl3 MFC set to  0.000000
12/9/2012	10:18:56 AM	PH3 MFC set to  0.000000
12/9/2012	10:18:56 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:18:56 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:18:57 AM	Tube furnace set to 150
12/9/2012	10:19:27 AM	Helium valve closed
12/9/2012	10:19:27 AM	H2 valve closed
12/9/2012	10:19:27 AM	BCl3 valve closed
12/9/2012	10:19:27 AM	PH3 valve closed
12/9/2012	10:19:27 AM	SiCl4 pre valve closed
12/9/2012	10:19:27 AM	SiCl4 post valve closed
12/9/2012	10:19:27 AM	Bypass valve closed
12/9/2012	10:19:27 AM	Bubbler valve closed
12/9/2012	10:19:27 AM	Main Vac valve opened
12/9/2012	10:19:27 AM	Helium MFC set to  0.000000
12/9/2012	10:19:27 AM	H2 MFC set to  0.000000
12/9/2012	10:19:27 AM	BCl3 MFC set to  0.000000
12/9/2012	10:19:27 AM	PH3 MFC set to  0.000000
12/9/2012	10:19:27 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:19:27 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:19:27 AM	Tube furnace set to 150
12/9/2012	10:19:57 AM	H2 valve closed
12/9/2012	10:19:57 AM	BCl3 valve closed
12/9/2012	10:19:57 AM	PH3 valve closed
12/9/2012	10:19:57 AM	SiCl4 pre valve closed
12/9/2012	10:19:57 AM	SiCl4 post valve closed
12/9/2012	10:19:57 AM	Bypass valve closed
12/9/2012	10:19:57 AM	Bubbler valve closed
12/9/2012	10:19:57 AM	Helium valve opened
12/9/2012	10:19:57 AM	Main Vac valve opened
12/9/2012	10:19:57 AM	Helium MFC set to  20.000000
12/9/2012	10:19:57 AM	H2 MFC set to  0.000000
12/9/2012	10:19:57 AM	BCl3 MFC set to  0.000000
12/9/2012	10:19:57 AM	PH3 MFC set to  0.000000
12/9/2012	10:19:57 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:19:57 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:19:57 AM	Tube furnace set to 150
12/9/2012	10:20:27 AM	Helium valve closed
12/9/2012	10:20:27 AM	H2 valve closed
12/9/2012	10:20:27 AM	BCl3 valve closed
12/9/2012	10:20:27 AM	PH3 valve closed
12/9/2012	10:20:27 AM	SiCl4 pre valve closed
12/9/2012	10:20:27 AM	SiCl4 post valve closed
12/9/2012	10:20:27 AM	Bypass valve closed
12/9/2012	10:20:27 AM	Bubbler valve closed
12/9/2012	10:20:27 AM	Main Vac valve opened
12/9/2012	10:20:27 AM	Helium MFC set to  0.000000
12/9/2012	10:20:27 AM	H2 MFC set to  0.000000
12/9/2012	10:20:27 AM	BCl3 MFC set to  0.000000
12/9/2012	10:20:27 AM	PH3 MFC set to  0.000000
12/9/2012	10:20:27 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:20:27 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:20:27 AM	Tube furnace set to 150
12/9/2012	10:20:57 AM	H2 valve closed
12/9/2012	10:20:57 AM	BCl3 valve closed
12/9/2012	10:20:57 AM	PH3 valve closed
12/9/2012	10:20:57 AM	SiCl4 pre valve closed
12/9/2012	10:20:57 AM	SiCl4 post valve closed
12/9/2012	10:20:57 AM	Bypass valve closed
12/9/2012	10:20:57 AM	Bubbler valve closed
12/9/2012	10:20:57 AM	Helium valve opened
12/9/2012	10:20:57 AM	Main Vac valve opened
12/9/2012	10:20:57 AM	Helium MFC set to  20.000000
12/9/2012	10:20:57 AM	H2 MFC set to  0.000000
12/9/2012	10:20:57 AM	BCl3 MFC set to  0.000000
12/9/2012	10:20:57 AM	PH3 MFC set to  0.000000
12/9/2012	10:20:57 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:20:57 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:20:57 AM	Tube furnace set to 150
12/9/2012	10:21:27 AM	Helium valve closed
12/9/2012	10:21:27 AM	H2 valve closed
12/9/2012	10:21:27 AM	BCl3 valve closed
12/9/2012	10:21:28 AM	PH3 valve closed
12/9/2012	10:21:28 AM	SiCl4 pre valve closed
12/9/2012	10:21:28 AM	SiCl4 post valve closed
12/9/2012	10:21:28 AM	Bypass valve closed
12/9/2012	10:21:28 AM	Bubbler valve closed
12/9/2012	10:21:28 AM	Main Vac valve opened
12/9/2012	10:21:28 AM	Helium MFC set to  0.000000
12/9/2012	10:21:28 AM	H2 MFC set to  0.000000
12/9/2012	10:21:28 AM	BCl3 MFC set to  0.000000
12/9/2012	10:21:28 AM	PH3 MFC set to  0.000000
12/9/2012	10:21:28 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:21:28 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:21:28 AM	Tube furnace set to 150
12/9/2012	10:21:58 AM	H2 valve closed
12/9/2012	10:21:58 AM	BCl3 valve closed
12/9/2012	10:21:58 AM	PH3 valve closed
12/9/2012	10:21:58 AM	SiCl4 pre valve closed
12/9/2012	10:21:58 AM	SiCl4 post valve closed
12/9/2012	10:21:58 AM	Bypass valve closed
12/9/2012	10:21:58 AM	Bubbler valve closed
12/9/2012	10:21:58 AM	Helium valve opened
12/9/2012	10:21:58 AM	Main Vac valve opened
12/9/2012	10:21:58 AM	Helium MFC set to  20.000000
12/9/2012	10:21:58 AM	H2 MFC set to  0.000000
12/9/2012	10:21:58 AM	BCl3 MFC set to  0.000000
12/9/2012	10:21:58 AM	PH3 MFC set to  0.000000
12/9/2012	10:21:58 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:21:58 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:21:58 AM	Tube furnace set to 150
12/9/2012	10:22:28 AM	Helium valve closed
12/9/2012	10:22:28 AM	H2 valve closed
12/9/2012	10:22:28 AM	BCl3 valve closed
12/9/2012	10:22:28 AM	PH3 valve closed
12/9/2012	10:22:28 AM	SiCl4 pre valve closed
12/9/2012	10:22:28 AM	SiCl4 post valve closed
12/9/2012	10:22:28 AM	Bypass valve closed
12/9/2012	10:22:28 AM	Bubbler valve closed
12/9/2012	10:22:28 AM	Main Vac valve opened
12/9/2012	10:22:28 AM	Helium MFC set to  0.000000
12/9/2012	10:22:28 AM	H2 MFC set to  0.000000
12/9/2012	10:22:28 AM	BCl3 MFC set to  0.000000
12/9/2012	10:22:28 AM	PH3 MFC set to  0.000000
12/9/2012	10:22:28 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:22:28 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:22:28 AM	Tube furnace set to 150
12/9/2012	10:22:58 AM	H2 valve closed
12/9/2012	10:22:58 AM	BCl3 valve closed
12/9/2012	10:22:58 AM	PH3 valve closed
12/9/2012	10:22:58 AM	SiCl4 pre valve closed
12/9/2012	10:22:58 AM	SiCl4 post valve closed
12/9/2012	10:22:58 AM	Bypass valve closed
12/9/2012	10:22:58 AM	Bubbler valve closed
12/9/2012	10:22:58 AM	Helium valve opened
12/9/2012	10:22:58 AM	Main Vac valve opened
12/9/2012	10:22:58 AM	Helium MFC set to  20.000000
12/9/2012	10:22:58 AM	H2 MFC set to  0.000000
12/9/2012	10:22:58 AM	BCl3 MFC set to  0.000000
12/9/2012	10:22:58 AM	PH3 MFC set to  0.000000
12/9/2012	10:22:58 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:22:58 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:22:58 AM	Tube furnace set to 150
12/9/2012	10:23:28 AM	Helium valve closed
12/9/2012	10:23:28 AM	H2 valve closed
12/9/2012	10:23:28 AM	BCl3 valve closed
12/9/2012	10:23:28 AM	PH3 valve closed
12/9/2012	10:23:28 AM	SiCl4 pre valve closed
12/9/2012	10:23:28 AM	SiCl4 post valve closed
12/9/2012	10:23:28 AM	Bypass valve closed
12/9/2012	10:23:28 AM	Bubbler valve closed
12/9/2012	10:23:28 AM	Main Vac valve opened
12/9/2012	10:23:28 AM	Helium MFC set to  0.000000
12/9/2012	10:23:28 AM	H2 MFC set to  0.000000
12/9/2012	10:23:28 AM	BCl3 MFC set to  0.000000
12/9/2012	10:23:28 AM	PH3 MFC set to  0.000000
12/9/2012	10:23:28 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:23:29 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:23:29 AM	Tube furnace set to 150
12/9/2012	10:23:59 AM	H2 valve closed
12/9/2012	10:23:59 AM	BCl3 valve closed
12/9/2012	10:23:59 AM	PH3 valve closed
12/9/2012	10:23:59 AM	SiCl4 pre valve closed
12/9/2012	10:23:59 AM	SiCl4 post valve closed
12/9/2012	10:23:59 AM	Bypass valve closed
12/9/2012	10:23:59 AM	Bubbler valve closed
12/9/2012	10:23:59 AM	Helium valve opened
12/9/2012	10:23:59 AM	Main Vac valve opened
12/9/2012	10:23:59 AM	Helium MFC set to  20.000000
12/9/2012	10:23:59 AM	H2 MFC set to  0.000000
12/9/2012	10:23:59 AM	BCl3 MFC set to  0.000000
12/9/2012	10:23:59 AM	PH3 MFC set to  0.000000
12/9/2012	10:23:59 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:23:59 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:23:59 AM	Tube furnace set to 150
12/9/2012	10:24:29 AM	Helium valve closed
12/9/2012	10:24:29 AM	H2 valve closed
12/9/2012	10:24:29 AM	BCl3 valve closed
12/9/2012	10:24:29 AM	PH3 valve closed
12/9/2012	10:24:29 AM	SiCl4 pre valve closed
12/9/2012	10:24:29 AM	SiCl4 post valve closed
12/9/2012	10:24:29 AM	Bypass valve closed
12/9/2012	10:24:29 AM	Bubbler valve closed
12/9/2012	10:24:29 AM	Main Vac valve opened
12/9/2012	10:24:29 AM	Helium MFC set to  0.000000
12/9/2012	10:24:29 AM	H2 MFC set to  0.000000
12/9/2012	10:24:29 AM	BCl3 MFC set to  0.000000
12/9/2012	10:24:29 AM	PH3 MFC set to  0.000000
12/9/2012	10:24:29 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:24:29 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:24:29 AM	Tube furnace set to 150
12/9/2012	10:24:59 AM	H2 valve closed
12/9/2012	10:24:59 AM	BCl3 valve closed
12/9/2012	10:24:59 AM	PH3 valve closed
12/9/2012	10:24:59 AM	SiCl4 pre valve closed
12/9/2012	10:24:59 AM	SiCl4 post valve closed
12/9/2012	10:24:59 AM	Bypass valve closed
12/9/2012	10:24:59 AM	Bubbler valve closed
12/9/2012	10:24:59 AM	Helium valve opened
12/9/2012	10:24:59 AM	Main Vac valve opened
12/9/2012	10:24:59 AM	Helium MFC set to  20.000000
12/9/2012	10:24:59 AM	H2 MFC set to  0.000000
12/9/2012	10:24:59 AM	BCl3 MFC set to  0.000000
12/9/2012	10:24:59 AM	PH3 MFC set to  0.000000
12/9/2012	10:24:59 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:24:59 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:24:59 AM	Tube furnace set to 150
12/9/2012	10:25:29 AM	Helium valve closed
12/9/2012	10:25:29 AM	H2 valve closed
12/9/2012	10:25:29 AM	BCl3 valve closed
12/9/2012	10:25:29 AM	PH3 valve closed
12/9/2012	10:25:29 AM	SiCl4 pre valve closed
12/9/2012	10:25:29 AM	SiCl4 post valve closed
12/9/2012	10:25:29 AM	Bypass valve closed
12/9/2012	10:25:29 AM	Bubbler valve closed
12/9/2012	10:25:29 AM	Main Vac valve opened
12/9/2012	10:25:29 AM	Helium MFC set to  0.000000
12/9/2012	10:25:29 AM	H2 MFC set to  0.000000
12/9/2012	10:25:29 AM	BCl3 MFC set to  0.000000
12/9/2012	10:25:29 AM	PH3 MFC set to  0.000000
12/9/2012	10:25:29 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:25:29 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:25:30 AM	Tube furnace set to 150
12/9/2012	10:26:00 AM	H2 valve closed
12/9/2012	10:26:00 AM	BCl3 valve closed
12/9/2012	10:26:00 AM	PH3 valve closed
12/9/2012	10:26:00 AM	SiCl4 pre valve closed
12/9/2012	10:26:00 AM	SiCl4 post valve closed
12/9/2012	10:26:00 AM	Bypass valve closed
12/9/2012	10:26:00 AM	Bubbler valve closed
12/9/2012	10:26:00 AM	Helium valve opened
12/9/2012	10:26:00 AM	Main Vac valve opened
12/9/2012	10:26:00 AM	Helium MFC set to  20.000000
12/9/2012	10:26:00 AM	H2 MFC set to  0.000000
12/9/2012	10:26:00 AM	BCl3 MFC set to  0.000000
12/9/2012	10:26:00 AM	PH3 MFC set to  0.000000
12/9/2012	10:26:00 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:26:00 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:26:00 AM	Tube furnace set to 150
12/9/2012	10:26:30 AM	Helium valve closed
12/9/2012	10:26:30 AM	H2 valve closed
12/9/2012	10:26:30 AM	BCl3 valve closed
12/9/2012	10:26:30 AM	PH3 valve closed
12/9/2012	10:26:30 AM	SiCl4 pre valve closed
12/9/2012	10:26:30 AM	SiCl4 post valve closed
12/9/2012	10:26:30 AM	Bypass valve closed
12/9/2012	10:26:30 AM	Bubbler valve closed
12/9/2012	10:26:30 AM	Main Vac valve opened
12/9/2012	10:26:30 AM	Helium MFC set to  0.000000
12/9/2012	10:26:30 AM	H2 MFC set to  0.000000
12/9/2012	10:26:30 AM	BCl3 MFC set to  0.000000
12/9/2012	10:26:30 AM	PH3 MFC set to  0.000000
12/9/2012	10:26:30 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:26:30 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:26:30 AM	Tube furnace set to 150
12/9/2012	10:27:00 AM	H2 valve closed
12/9/2012	10:27:00 AM	BCl3 valve closed
12/9/2012	10:27:00 AM	PH3 valve closed
12/9/2012	10:27:00 AM	SiCl4 pre valve closed
12/9/2012	10:27:00 AM	SiCl4 post valve closed
12/9/2012	10:27:00 AM	Bypass valve closed
12/9/2012	10:27:00 AM	Bubbler valve closed
12/9/2012	10:27:00 AM	Helium valve opened
12/9/2012	10:27:00 AM	Main Vac valve opened
12/9/2012	10:27:00 AM	Helium MFC set to  20.000000
12/9/2012	10:27:00 AM	H2 MFC set to  0.000000
12/9/2012	10:27:00 AM	BCl3 MFC set to  0.000000
12/9/2012	10:27:00 AM	PH3 MFC set to  0.000000
12/9/2012	10:27:00 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:27:00 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:27:00 AM	Tube furnace set to 150
12/9/2012	10:27:30 AM	Helium valve closed
12/9/2012	10:27:30 AM	H2 valve closed
12/9/2012	10:27:30 AM	BCl3 valve closed
12/9/2012	10:27:30 AM	PH3 valve closed
12/9/2012	10:27:30 AM	SiCl4 pre valve closed
12/9/2012	10:27:30 AM	SiCl4 post valve closed
12/9/2012	10:27:30 AM	Bypass valve closed
12/9/2012	10:27:30 AM	Bubbler valve closed
12/9/2012	10:27:30 AM	Main Vac valve opened
12/9/2012	10:27:30 AM	Helium MFC set to  0.000000
12/9/2012	10:27:30 AM	H2 MFC set to  0.000000
12/9/2012	10:27:30 AM	BCl3 MFC set to  0.000000
12/9/2012	10:27:30 AM	PH3 MFC set to  0.000000
12/9/2012	10:27:30 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:27:30 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:27:31 AM	Tube furnace set to 150
12/9/2012	10:28:01 AM	H2 valve closed
12/9/2012	10:28:01 AM	BCl3 valve closed
12/9/2012	10:28:01 AM	PH3 valve closed
12/9/2012	10:28:01 AM	SiCl4 pre valve closed
12/9/2012	10:28:01 AM	SiCl4 post valve closed
12/9/2012	10:28:01 AM	Bypass valve closed
12/9/2012	10:28:01 AM	Bubbler valve closed
12/9/2012	10:28:01 AM	Helium valve opened
12/9/2012	10:28:01 AM	Main Vac valve opened
12/9/2012	10:28:01 AM	Helium MFC set to  20.000000
12/9/2012	10:28:01 AM	H2 MFC set to  0.000000
12/9/2012	10:28:01 AM	BCl3 MFC set to  0.000000
12/9/2012	10:28:01 AM	PH3 MFC set to  0.000000
12/9/2012	10:28:01 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:28:01 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:28:01 AM	Tube furnace set to 150
12/9/2012	10:28:31 AM	Helium valve closed
12/9/2012	10:28:31 AM	H2 valve closed
12/9/2012	10:28:31 AM	BCl3 valve closed
12/9/2012	10:28:31 AM	PH3 valve closed
12/9/2012	10:28:31 AM	SiCl4 pre valve closed
12/9/2012	10:28:31 AM	SiCl4 post valve closed
12/9/2012	10:28:31 AM	Bypass valve closed
12/9/2012	10:28:31 AM	Bubbler valve closed
12/9/2012	10:28:31 AM	Main Vac valve opened
12/9/2012	10:28:31 AM	Helium MFC set to  0.000000
12/9/2012	10:28:31 AM	H2 MFC set to  0.000000
12/9/2012	10:28:31 AM	BCl3 MFC set to  0.000000
12/9/2012	10:28:31 AM	PH3 MFC set to  0.000000
12/9/2012	10:28:31 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:28:31 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:28:31 AM	Tube furnace set to 150
12/9/2012	10:28:32 AM	Run finished at 10:28 AM
12/9/2012	10:32:24 AM	Recipe started at 10:32 AM
12/9/2012	10:32:25 AM	Helium valve closed
12/9/2012	10:32:25 AM	H2 valve closed
12/9/2012	10:32:25 AM	BCl3 valve closed
12/9/2012	10:32:25 AM	PH3 valve closed
12/9/2012	10:32:25 AM	SiCl4 pre valve closed
12/9/2012	10:32:25 AM	SiCl4 post valve closed
12/9/2012	10:32:25 AM	Bypass valve closed
12/9/2012	10:32:25 AM	Bubbler valve closed
12/9/2012	10:32:25 AM	Main Vac valve opened
12/9/2012	10:32:25 AM	Helium MFC set to  0.000000
12/9/2012	10:32:25 AM	H2 MFC set to  0.000000
12/9/2012	10:32:25 AM	BCl3 MFC set to  0.000000
12/9/2012	10:32:25 AM	PH3 MFC set to  0.000000
12/9/2012	10:32:25 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:32:25 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:32:25 AM	Tube furnace set to 150
12/9/2012	10:32:32 AM	H2 valve closed
12/9/2012	10:32:32 AM	BCl3 valve closed
12/9/2012	10:32:32 AM	PH3 valve closed
12/9/2012	10:32:32 AM	SiCl4 pre valve closed
12/9/2012	10:32:32 AM	SiCl4 post valve closed
12/9/2012	10:32:32 AM	Bypass valve closed
12/9/2012	10:32:32 AM	Bubbler valve closed
12/9/2012	10:32:32 AM	Helium valve opened
12/9/2012	10:32:32 AM	Main Vac valve opened
12/9/2012	10:32:32 AM	Helium MFC set to  20.000000
12/9/2012	10:32:32 AM	H2 MFC set to  0.000000
12/9/2012	10:32:32 AM	BCl3 MFC set to  0.000000
12/9/2012	10:32:32 AM	PH3 MFC set to  0.000000
12/9/2012	10:32:32 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:32:32 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:32:32 AM	Tube furnace set to 150
12/9/2012	10:33:02 AM	Helium valve closed
12/9/2012	10:33:02 AM	H2 valve closed
12/9/2012	10:33:02 AM	BCl3 valve closed
12/9/2012	10:33:02 AM	PH3 valve closed
12/9/2012	10:33:02 AM	SiCl4 pre valve closed
12/9/2012	10:33:02 AM	SiCl4 post valve closed
12/9/2012	10:33:02 AM	Bypass valve closed
12/9/2012	10:33:02 AM	Bubbler valve closed
12/9/2012	10:33:02 AM	Main Vac valve opened
12/9/2012	10:33:02 AM	Helium MFC set to  0.000000
12/9/2012	10:33:02 AM	H2 MFC set to  0.000000
12/9/2012	10:33:02 AM	BCl3 MFC set to  0.000000
12/9/2012	10:33:02 AM	PH3 MFC set to  0.000000
12/9/2012	10:33:02 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:33:02 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:33:02 AM	Tube furnace set to 150
12/9/2012	10:33:32 AM	H2 valve closed
12/9/2012	10:33:32 AM	BCl3 valve closed
12/9/2012	10:33:32 AM	PH3 valve closed
12/9/2012	10:33:32 AM	SiCl4 pre valve closed
12/9/2012	10:33:32 AM	SiCl4 post valve closed
12/9/2012	10:33:32 AM	Bypass valve closed
12/9/2012	10:33:32 AM	Bubbler valve closed
12/9/2012	10:33:32 AM	Helium valve opened
12/9/2012	10:33:32 AM	Main Vac valve opened
12/9/2012	10:33:32 AM	Helium MFC set to  20.000000
12/9/2012	10:33:32 AM	H2 MFC set to  0.000000
12/9/2012	10:33:32 AM	BCl3 MFC set to  0.000000
12/9/2012	10:33:32 AM	PH3 MFC set to  0.000000
12/9/2012	10:33:32 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:33:32 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:33:32 AM	Tube furnace set to 150
12/9/2012	10:34:02 AM	Helium valve closed
12/9/2012	10:34:02 AM	H2 valve closed
12/9/2012	10:34:02 AM	BCl3 valve closed
12/9/2012	10:34:02 AM	PH3 valve closed
12/9/2012	10:34:02 AM	SiCl4 pre valve closed
12/9/2012	10:34:02 AM	SiCl4 post valve closed
12/9/2012	10:34:02 AM	Bypass valve closed
12/9/2012	10:34:03 AM	Bubbler valve closed
12/9/2012	10:34:03 AM	Main Vac valve opened
12/9/2012	10:34:03 AM	Helium MFC set to  0.000000
12/9/2012	10:34:03 AM	H2 MFC set to  0.000000
12/9/2012	10:34:03 AM	BCl3 MFC set to  0.000000
12/9/2012	10:34:03 AM	PH3 MFC set to  0.000000
12/9/2012	10:34:03 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:34:03 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:34:03 AM	Tube furnace set to 150
12/9/2012	10:34:33 AM	H2 valve closed
12/9/2012	10:34:33 AM	BCl3 valve closed
12/9/2012	10:34:33 AM	PH3 valve closed
12/9/2012	10:34:33 AM	SiCl4 pre valve closed
12/9/2012	10:34:33 AM	SiCl4 post valve closed
12/9/2012	10:34:33 AM	Bypass valve closed
12/9/2012	10:34:33 AM	Bubbler valve closed
12/9/2012	10:34:33 AM	Helium valve opened
12/9/2012	10:34:33 AM	Main Vac valve opened
12/9/2012	10:34:33 AM	Helium MFC set to  20.000000
12/9/2012	10:34:33 AM	H2 MFC set to  0.000000
12/9/2012	10:34:33 AM	BCl3 MFC set to  0.000000
12/9/2012	10:34:33 AM	PH3 MFC set to  0.000000
12/9/2012	10:34:33 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:34:33 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:34:33 AM	Tube furnace set to 150
12/9/2012	10:35:03 AM	Helium valve closed
12/9/2012	10:35:03 AM	H2 valve closed
12/9/2012	10:35:03 AM	BCl3 valve closed
12/9/2012	10:35:03 AM	PH3 valve closed
12/9/2012	10:35:03 AM	SiCl4 pre valve closed
12/9/2012	10:35:03 AM	SiCl4 post valve closed
12/9/2012	10:35:03 AM	Bypass valve closed
12/9/2012	10:35:03 AM	Bubbler valve closed
12/9/2012	10:35:03 AM	Main Vac valve opened
12/9/2012	10:35:03 AM	Helium MFC set to  0.000000
12/9/2012	10:35:03 AM	H2 MFC set to  0.000000
12/9/2012	10:35:03 AM	BCl3 MFC set to  0.000000
12/9/2012	10:35:03 AM	PH3 MFC set to  0.000000
12/9/2012	10:35:03 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:35:03 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:35:03 AM	Tube furnace set to 150
12/9/2012	10:35:33 AM	H2 valve closed
12/9/2012	10:35:33 AM	BCl3 valve closed
12/9/2012	10:35:33 AM	PH3 valve closed
12/9/2012	10:35:33 AM	SiCl4 pre valve closed
12/9/2012	10:35:33 AM	SiCl4 post valve closed
12/9/2012	10:35:33 AM	Bypass valve closed
12/9/2012	10:35:33 AM	Bubbler valve closed
12/9/2012	10:35:33 AM	Helium valve opened
12/9/2012	10:35:33 AM	Main Vac valve opened
12/9/2012	10:35:33 AM	Helium MFC set to  20.000000
12/9/2012	10:35:33 AM	H2 MFC set to  0.000000
12/9/2012	10:35:33 AM	BCl3 MFC set to  0.000000
12/9/2012	10:35:33 AM	PH3 MFC set to  0.000000
12/9/2012	10:35:33 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:35:33 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:35:33 AM	Tube furnace set to 150
12/9/2012	10:36:03 AM	Helium valve closed
12/9/2012	10:36:03 AM	H2 valve closed
12/9/2012	10:36:03 AM	BCl3 valve closed
12/9/2012	10:36:03 AM	PH3 valve closed
12/9/2012	10:36:03 AM	SiCl4 pre valve closed
12/9/2012	10:36:03 AM	SiCl4 post valve closed
12/9/2012	10:36:03 AM	Bypass valve closed
12/9/2012	10:36:03 AM	Bubbler valve closed
12/9/2012	10:36:03 AM	Main Vac valve opened
12/9/2012	10:36:03 AM	Helium MFC set to  0.000000
12/9/2012	10:36:03 AM	H2 MFC set to  0.000000
12/9/2012	10:36:03 AM	BCl3 MFC set to  0.000000
12/9/2012	10:36:03 AM	PH3 MFC set to  0.000000
12/9/2012	10:36:04 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:36:04 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:36:04 AM	Tube furnace set to 150
12/9/2012	10:36:34 AM	H2 valve closed
12/9/2012	10:36:34 AM	BCl3 valve closed
12/9/2012	10:36:34 AM	PH3 valve closed
12/9/2012	10:36:34 AM	SiCl4 pre valve closed
12/9/2012	10:36:34 AM	SiCl4 post valve closed
12/9/2012	10:36:34 AM	Bypass valve closed
12/9/2012	10:36:34 AM	Bubbler valve closed
12/9/2012	10:36:34 AM	Helium valve opened
12/9/2012	10:36:34 AM	Main Vac valve opened
12/9/2012	10:36:34 AM	Helium MFC set to  20.000000
12/9/2012	10:36:34 AM	H2 MFC set to  0.000000
12/9/2012	10:36:34 AM	BCl3 MFC set to  0.000000
12/9/2012	10:36:34 AM	PH3 MFC set to  0.000000
12/9/2012	10:36:34 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:36:34 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:36:34 AM	Tube furnace set to 150
12/9/2012	10:37:04 AM	Helium valve closed
12/9/2012	10:37:04 AM	H2 valve closed
12/9/2012	10:37:04 AM	BCl3 valve closed
12/9/2012	10:37:04 AM	PH3 valve closed
12/9/2012	10:37:04 AM	SiCl4 pre valve closed
12/9/2012	10:37:04 AM	SiCl4 post valve closed
12/9/2012	10:37:04 AM	Bypass valve closed
12/9/2012	10:37:04 AM	Bubbler valve closed
12/9/2012	10:37:04 AM	Main Vac valve opened
12/9/2012	10:37:04 AM	Helium MFC set to  0.000000
12/9/2012	10:37:04 AM	H2 MFC set to  0.000000
12/9/2012	10:37:04 AM	BCl3 MFC set to  0.000000
12/9/2012	10:37:04 AM	PH3 MFC set to  0.000000
12/9/2012	10:37:04 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:37:04 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:37:04 AM	Tube furnace set to 150
12/9/2012	10:37:34 AM	H2 valve closed
12/9/2012	10:37:34 AM	BCl3 valve closed
12/9/2012	10:37:34 AM	PH3 valve closed
12/9/2012	10:37:34 AM	SiCl4 pre valve closed
12/9/2012	10:37:34 AM	SiCl4 post valve closed
12/9/2012	10:37:34 AM	Bypass valve closed
12/9/2012	10:37:34 AM	Bubbler valve closed
12/9/2012	10:37:34 AM	Helium valve opened
12/9/2012	10:37:34 AM	Main Vac valve opened
12/9/2012	10:37:34 AM	Helium MFC set to  20.000000
12/9/2012	10:37:34 AM	H2 MFC set to  0.000000
12/9/2012	10:37:34 AM	BCl3 MFC set to  0.000000
12/9/2012	10:37:34 AM	PH3 MFC set to  0.000000
12/9/2012	10:37:34 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:37:34 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:37:34 AM	Tube furnace set to 150
12/9/2012	10:38:04 AM	Helium valve closed
12/9/2012	10:38:04 AM	H2 valve closed
12/9/2012	10:38:04 AM	BCl3 valve closed
12/9/2012	10:38:04 AM	PH3 valve closed
12/9/2012	10:38:04 AM	SiCl4 pre valve closed
12/9/2012	10:38:04 AM	SiCl4 post valve closed
12/9/2012	10:38:04 AM	Bypass valve closed
12/9/2012	10:38:04 AM	Bubbler valve closed
12/9/2012	10:38:04 AM	Main Vac valve opened
12/9/2012	10:38:04 AM	Helium MFC set to  0.000000
12/9/2012	10:38:04 AM	H2 MFC set to  0.000000
12/9/2012	10:38:04 AM	BCl3 MFC set to  0.000000
12/9/2012	10:38:04 AM	PH3 MFC set to  0.000000
12/9/2012	10:38:04 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:38:04 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:38:05 AM	Tube furnace set to 150
12/9/2012	10:38:35 AM	H2 valve closed
12/9/2012	10:38:35 AM	BCl3 valve closed
12/9/2012	10:38:35 AM	PH3 valve closed
12/9/2012	10:38:35 AM	SiCl4 pre valve closed
12/9/2012	10:38:35 AM	SiCl4 post valve closed
12/9/2012	10:38:35 AM	Bypass valve closed
12/9/2012	10:38:35 AM	Bubbler valve closed
12/9/2012	10:38:35 AM	Helium valve opened
12/9/2012	10:38:35 AM	Main Vac valve opened
12/9/2012	10:38:35 AM	Helium MFC set to  20.000000
12/9/2012	10:38:35 AM	H2 MFC set to  0.000000
12/9/2012	10:38:35 AM	BCl3 MFC set to  0.000000
12/9/2012	10:38:35 AM	PH3 MFC set to  0.000000
12/9/2012	10:38:35 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:38:35 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:38:35 AM	Tube furnace set to 150
12/9/2012	10:39:05 AM	Helium valve closed
12/9/2012	10:39:05 AM	H2 valve closed
12/9/2012	10:39:05 AM	BCl3 valve closed
12/9/2012	10:39:05 AM	PH3 valve closed
12/9/2012	10:39:05 AM	SiCl4 pre valve closed
12/9/2012	10:39:05 AM	SiCl4 post valve closed
12/9/2012	10:39:05 AM	Bypass valve closed
12/9/2012	10:39:05 AM	Bubbler valve closed
12/9/2012	10:39:05 AM	Main Vac valve opened
12/9/2012	10:39:05 AM	Helium MFC set to  0.000000
12/9/2012	10:39:05 AM	H2 MFC set to  0.000000
12/9/2012	10:39:05 AM	BCl3 MFC set to  0.000000
12/9/2012	10:39:05 AM	PH3 MFC set to  0.000000
12/9/2012	10:39:05 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:39:05 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:39:05 AM	Tube furnace set to 150
12/9/2012	10:39:35 AM	H2 valve closed
12/9/2012	10:39:35 AM	BCl3 valve closed
12/9/2012	10:39:35 AM	PH3 valve closed
12/9/2012	10:39:35 AM	SiCl4 pre valve closed
12/9/2012	10:39:35 AM	SiCl4 post valve closed
12/9/2012	10:39:35 AM	Bypass valve closed
12/9/2012	10:39:35 AM	Bubbler valve closed
12/9/2012	10:39:35 AM	Helium valve opened
12/9/2012	10:39:35 AM	Main Vac valve opened
12/9/2012	10:39:35 AM	Helium MFC set to  20.000000
12/9/2012	10:39:35 AM	H2 MFC set to  0.000000
12/9/2012	10:39:35 AM	BCl3 MFC set to  0.000000
12/9/2012	10:39:35 AM	PH3 MFC set to  0.000000
12/9/2012	10:39:35 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:39:35 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:39:35 AM	Tube furnace set to 150
12/9/2012	10:40:05 AM	Helium valve closed
12/9/2012	10:40:05 AM	H2 valve closed
12/9/2012	10:40:05 AM	BCl3 valve closed
12/9/2012	10:40:05 AM	PH3 valve closed
12/9/2012	10:40:05 AM	SiCl4 pre valve closed
12/9/2012	10:40:05 AM	SiCl4 post valve closed
12/9/2012	10:40:05 AM	Bypass valve closed
12/9/2012	10:40:05 AM	Bubbler valve closed
12/9/2012	10:40:05 AM	Main Vac valve opened
12/9/2012	10:40:05 AM	Helium MFC set to  0.000000
12/9/2012	10:40:05 AM	H2 MFC set to  0.000000
12/9/2012	10:40:05 AM	BCl3 MFC set to  0.000000
12/9/2012	10:40:05 AM	PH3 MFC set to  0.000000
12/9/2012	10:40:05 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:40:05 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:40:06 AM	Tube furnace set to 150
12/9/2012	10:40:36 AM	H2 valve closed
12/9/2012	10:40:36 AM	BCl3 valve closed
12/9/2012	10:40:36 AM	PH3 valve closed
12/9/2012	10:40:36 AM	SiCl4 pre valve closed
12/9/2012	10:40:36 AM	SiCl4 post valve closed
12/9/2012	10:40:36 AM	Bypass valve closed
12/9/2012	10:40:36 AM	Bubbler valve closed
12/9/2012	10:40:36 AM	Helium valve opened
12/9/2012	10:40:36 AM	Main Vac valve opened
12/9/2012	10:40:36 AM	Helium MFC set to  20.000000
12/9/2012	10:40:36 AM	H2 MFC set to  0.000000
12/9/2012	10:40:36 AM	BCl3 MFC set to  0.000000
12/9/2012	10:40:36 AM	PH3 MFC set to  0.000000
12/9/2012	10:40:36 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:40:36 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:40:36 AM	Tube furnace set to 150
12/9/2012	10:41:06 AM	Helium valve closed
12/9/2012	10:41:06 AM	H2 valve closed
12/9/2012	10:41:06 AM	BCl3 valve closed
12/9/2012	10:41:06 AM	PH3 valve closed
12/9/2012	10:41:06 AM	SiCl4 pre valve closed
12/9/2012	10:41:06 AM	SiCl4 post valve closed
12/9/2012	10:41:06 AM	Bypass valve closed
12/9/2012	10:41:06 AM	Bubbler valve closed
12/9/2012	10:41:06 AM	Main Vac valve opened
12/9/2012	10:41:06 AM	Helium MFC set to  0.000000
12/9/2012	10:41:06 AM	H2 MFC set to  0.000000
12/9/2012	10:41:06 AM	BCl3 MFC set to  0.000000
12/9/2012	10:41:06 AM	PH3 MFC set to  0.000000
12/9/2012	10:41:06 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:41:06 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:41:06 AM	Tube furnace set to 150
12/9/2012	10:41:36 AM	H2 valve closed
12/9/2012	10:41:36 AM	BCl3 valve closed
12/9/2012	10:41:36 AM	PH3 valve closed
12/9/2012	10:41:36 AM	SiCl4 pre valve closed
12/9/2012	10:41:36 AM	SiCl4 post valve closed
12/9/2012	10:41:36 AM	Bypass valve closed
12/9/2012	10:41:36 AM	Bubbler valve closed
12/9/2012	10:41:36 AM	Helium valve opened
12/9/2012	10:41:36 AM	Main Vac valve opened
12/9/2012	10:41:36 AM	Helium MFC set to  20.000000
12/9/2012	10:41:36 AM	H2 MFC set to  0.000000
12/9/2012	10:41:36 AM	BCl3 MFC set to  0.000000
12/9/2012	10:41:36 AM	PH3 MFC set to  0.000000
12/9/2012	10:41:36 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:41:36 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:41:36 AM	Tube furnace set to 150
12/9/2012	10:42:06 AM	Helium valve closed
12/9/2012	10:42:06 AM	H2 valve closed
12/9/2012	10:42:06 AM	BCl3 valve closed
12/9/2012	10:42:06 AM	PH3 valve closed
12/9/2012	10:42:06 AM	SiCl4 pre valve closed
12/9/2012	10:42:06 AM	SiCl4 post valve closed
12/9/2012	10:42:06 AM	Bypass valve closed
12/9/2012	10:42:06 AM	Bubbler valve closed
12/9/2012	10:42:06 AM	Main Vac valve opened
12/9/2012	10:42:06 AM	Helium MFC set to  0.000000
12/9/2012	10:42:06 AM	H2 MFC set to  0.000000
12/9/2012	10:42:06 AM	BCl3 MFC set to  0.000000
12/9/2012	10:42:06 AM	PH3 MFC set to  0.000000
12/9/2012	10:42:06 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:42:06 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:42:07 AM	Tube furnace set to 150
12/9/2012	10:42:08 AM	Run finished at 10:42 AM
12/9/2012	10:49:31 AM	Main Vac valve closed
12/9/2012	10:49:39 AM	Main Vac valve opened
12/9/2012	10:49:47 AM	Recipe started at 10:49 AM
12/9/2012	10:49:47 AM	Helium valve closed
12/9/2012	10:49:47 AM	H2 valve closed
12/9/2012	10:49:47 AM	BCl3 valve closed
12/9/2012	10:49:47 AM	PH3 valve closed
12/9/2012	10:49:48 AM	SiCl4 pre valve closed
12/9/2012	10:49:48 AM	SiCl4 post valve closed
12/9/2012	10:49:48 AM	Bypass valve closed
12/9/2012	10:49:48 AM	Bubbler valve closed
12/9/2012	10:49:48 AM	Main Vac valve opened
12/9/2012	10:49:48 AM	Helium MFC set to  0.000000
12/9/2012	10:49:48 AM	H2 MFC set to  0.000000
12/9/2012	10:49:48 AM	BCl3 MFC set to  0.000000
12/9/2012	10:49:48 AM	PH3 MFC set to  0.000000
12/9/2012	10:49:48 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:49:48 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:49:48 AM	Tube furnace set to 150
12/9/2012	10:49:51 AM	H2 valve closed
12/9/2012	10:49:51 AM	BCl3 valve closed
12/9/2012	10:49:51 AM	PH3 valve closed
12/9/2012	10:49:51 AM	SiCl4 pre valve closed
12/9/2012	10:49:51 AM	SiCl4 post valve closed
12/9/2012	10:49:51 AM	Bypass valve closed
12/9/2012	10:49:51 AM	Bubbler valve closed
12/9/2012	10:49:51 AM	Helium valve opened
12/9/2012	10:49:51 AM	Main Vac valve opened
12/9/2012	10:49:51 AM	Helium MFC set to  20.000000
12/9/2012	10:49:51 AM	H2 MFC set to  0.000000
12/9/2012	10:49:51 AM	BCl3 MFC set to  0.000000
12/9/2012	10:49:51 AM	PH3 MFC set to  0.000000
12/9/2012	10:49:51 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:49:51 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:49:51 AM	Tube furnace set to 150
12/9/2012	10:50:21 AM	Helium valve closed
12/9/2012	10:50:21 AM	H2 valve closed
12/9/2012	10:50:21 AM	BCl3 valve closed
12/9/2012	10:50:21 AM	PH3 valve closed
12/9/2012	10:50:21 AM	SiCl4 pre valve closed
12/9/2012	10:50:21 AM	SiCl4 post valve closed
12/9/2012	10:50:21 AM	Bypass valve closed
12/9/2012	10:50:21 AM	Bubbler valve closed
12/9/2012	10:50:21 AM	Main Vac valve opened
12/9/2012	10:50:21 AM	Helium MFC set to  0.000000
12/9/2012	10:50:21 AM	H2 MFC set to  0.000000
12/9/2012	10:50:21 AM	BCl3 MFC set to  0.000000
12/9/2012	10:50:21 AM	PH3 MFC set to  0.000000
12/9/2012	10:50:21 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:50:21 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:50:21 AM	Tube furnace set to 150
12/9/2012	10:50:51 AM	H2 valve closed
12/9/2012	10:50:51 AM	BCl3 valve closed
12/9/2012	10:50:51 AM	PH3 valve closed
12/9/2012	10:50:51 AM	SiCl4 pre valve closed
12/9/2012	10:50:51 AM	SiCl4 post valve closed
12/9/2012	10:50:51 AM	Bypass valve closed
12/9/2012	10:50:51 AM	Bubbler valve closed
12/9/2012	10:50:51 AM	Helium valve opened
12/9/2012	10:50:51 AM	Main Vac valve opened
12/9/2012	10:50:51 AM	Helium MFC set to  20.000000
12/9/2012	10:50:51 AM	H2 MFC set to  0.000000
12/9/2012	10:50:51 AM	BCl3 MFC set to  0.000000
12/9/2012	10:50:51 AM	PH3 MFC set to  0.000000
12/9/2012	10:50:51 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:50:51 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:50:51 AM	Tube furnace set to 150
12/9/2012	10:51:21 AM	Helium valve closed
12/9/2012	10:51:21 AM	H2 valve closed
12/9/2012	10:51:21 AM	BCl3 valve closed
12/9/2012	10:51:21 AM	PH3 valve closed
12/9/2012	10:51:21 AM	SiCl4 pre valve closed
12/9/2012	10:51:21 AM	SiCl4 post valve closed
12/9/2012	10:51:21 AM	Bypass valve closed
12/9/2012	10:51:21 AM	Bubbler valve closed
12/9/2012	10:51:21 AM	Main Vac valve opened
12/9/2012	10:51:21 AM	Helium MFC set to  0.000000
12/9/2012	10:51:22 AM	H2 MFC set to  0.000000
12/9/2012	10:51:22 AM	BCl3 MFC set to  0.000000
12/9/2012	10:51:22 AM	PH3 MFC set to  0.000000
12/9/2012	10:51:22 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:51:22 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:51:22 AM	Tube furnace set to 150
12/9/2012	10:51:52 AM	H2 valve closed
12/9/2012	10:51:52 AM	BCl3 valve closed
12/9/2012	10:51:52 AM	PH3 valve closed
12/9/2012	10:51:52 AM	SiCl4 pre valve closed
12/9/2012	10:51:52 AM	SiCl4 post valve closed
12/9/2012	10:51:52 AM	Bypass valve closed
12/9/2012	10:51:52 AM	Bubbler valve closed
12/9/2012	10:51:52 AM	Helium valve opened
12/9/2012	10:51:52 AM	Main Vac valve opened
12/9/2012	10:51:52 AM	Helium MFC set to  20.000000
12/9/2012	10:51:52 AM	H2 MFC set to  0.000000
12/9/2012	10:51:52 AM	BCl3 MFC set to  0.000000
12/9/2012	10:51:52 AM	PH3 MFC set to  0.000000
12/9/2012	10:51:52 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:51:52 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:51:52 AM	Tube furnace set to 150
12/9/2012	10:52:22 AM	Helium valve closed
12/9/2012	10:52:22 AM	H2 valve closed
12/9/2012	10:52:22 AM	BCl3 valve closed
12/9/2012	10:52:22 AM	PH3 valve closed
12/9/2012	10:52:22 AM	SiCl4 pre valve closed
12/9/2012	10:52:22 AM	SiCl4 post valve closed
12/9/2012	10:52:22 AM	Bypass valve closed
12/9/2012	10:52:22 AM	Bubbler valve closed
12/9/2012	10:52:22 AM	Main Vac valve opened
12/9/2012	10:52:22 AM	Helium MFC set to  0.000000
12/9/2012	10:52:22 AM	H2 MFC set to  0.000000
12/9/2012	10:52:22 AM	BCl3 MFC set to  0.000000
12/9/2012	10:52:22 AM	PH3 MFC set to  0.000000
12/9/2012	10:52:22 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:52:22 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:52:22 AM	Tube furnace set to 150
12/9/2012	10:52:52 AM	H2 valve closed
12/9/2012	10:52:52 AM	BCl3 valve closed
12/9/2012	10:52:52 AM	PH3 valve closed
12/9/2012	10:52:52 AM	SiCl4 pre valve closed
12/9/2012	10:52:52 AM	SiCl4 post valve closed
12/9/2012	10:52:52 AM	Bypass valve closed
12/9/2012	10:52:52 AM	Bubbler valve closed
12/9/2012	10:52:52 AM	Helium valve opened
12/9/2012	10:52:52 AM	Main Vac valve opened
12/9/2012	10:52:52 AM	Helium MFC set to  20.000000
12/9/2012	10:52:52 AM	H2 MFC set to  0.000000
12/9/2012	10:52:52 AM	BCl3 MFC set to  0.000000
12/9/2012	10:52:52 AM	PH3 MFC set to  0.000000
12/9/2012	10:52:52 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:52:52 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:52:52 AM	Tube furnace set to 150
12/9/2012	10:53:22 AM	Helium valve closed
12/9/2012	10:53:22 AM	H2 valve closed
12/9/2012	10:53:22 AM	BCl3 valve closed
12/9/2012	10:53:22 AM	PH3 valve closed
12/9/2012	10:53:22 AM	SiCl4 pre valve closed
12/9/2012	10:53:22 AM	SiCl4 post valve closed
12/9/2012	10:53:22 AM	Bypass valve closed
12/9/2012	10:53:22 AM	Bubbler valve closed
12/9/2012	10:53:22 AM	Main Vac valve opened
12/9/2012	10:53:22 AM	Helium MFC set to  0.000000
12/9/2012	10:53:22 AM	H2 MFC set to  0.000000
12/9/2012	10:53:22 AM	BCl3 MFC set to  0.000000
12/9/2012	10:53:22 AM	PH3 MFC set to  0.000000
12/9/2012	10:53:22 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:53:23 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:53:23 AM	Tube furnace set to 150
12/9/2012	10:53:53 AM	H2 valve closed
12/9/2012	10:53:53 AM	BCl3 valve closed
12/9/2012	10:53:53 AM	PH3 valve closed
12/9/2012	10:53:53 AM	SiCl4 pre valve closed
12/9/2012	10:53:53 AM	SiCl4 post valve closed
12/9/2012	10:53:53 AM	Bypass valve closed
12/9/2012	10:53:53 AM	Bubbler valve closed
12/9/2012	10:53:53 AM	Helium valve opened
12/9/2012	10:53:53 AM	Main Vac valve opened
12/9/2012	10:53:53 AM	Helium MFC set to  20.000000
12/9/2012	10:53:53 AM	H2 MFC set to  0.000000
12/9/2012	10:53:53 AM	BCl3 MFC set to  0.000000
12/9/2012	10:53:53 AM	PH3 MFC set to  0.000000
12/9/2012	10:53:53 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:53:53 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:53:53 AM	Tube furnace set to 150
12/9/2012	10:54:23 AM	Helium valve closed
12/9/2012	10:54:23 AM	H2 valve closed
12/9/2012	10:54:23 AM	BCl3 valve closed
12/9/2012	10:54:23 AM	PH3 valve closed
12/9/2012	10:54:23 AM	SiCl4 pre valve closed
12/9/2012	10:54:23 AM	SiCl4 post valve closed
12/9/2012	10:54:23 AM	Bypass valve closed
12/9/2012	10:54:23 AM	Bubbler valve closed
12/9/2012	10:54:23 AM	Main Vac valve opened
12/9/2012	10:54:23 AM	Helium MFC set to  0.000000
12/9/2012	10:54:23 AM	H2 MFC set to  0.000000
12/9/2012	10:54:23 AM	BCl3 MFC set to  0.000000
12/9/2012	10:54:23 AM	PH3 MFC set to  0.000000
12/9/2012	10:54:23 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:54:23 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:54:23 AM	Tube furnace set to 150
12/9/2012	10:54:53 AM	H2 valve closed
12/9/2012	10:54:53 AM	BCl3 valve closed
12/9/2012	10:54:53 AM	PH3 valve closed
12/9/2012	10:54:53 AM	SiCl4 pre valve closed
12/9/2012	10:54:53 AM	SiCl4 post valve closed
12/9/2012	10:54:53 AM	Bypass valve closed
12/9/2012	10:54:53 AM	Bubbler valve closed
12/9/2012	10:54:53 AM	Helium valve opened
12/9/2012	10:54:53 AM	Main Vac valve opened
12/9/2012	10:54:53 AM	Helium MFC set to  20.000000
12/9/2012	10:54:53 AM	H2 MFC set to  0.000000
12/9/2012	10:54:53 AM	BCl3 MFC set to  0.000000
12/9/2012	10:54:53 AM	PH3 MFC set to  0.000000
12/9/2012	10:54:53 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:54:53 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:54:53 AM	Tube furnace set to 150
12/9/2012	10:55:23 AM	Helium valve closed
12/9/2012	10:55:23 AM	H2 valve closed
12/9/2012	10:55:23 AM	BCl3 valve closed
12/9/2012	10:55:23 AM	PH3 valve closed
12/9/2012	10:55:23 AM	SiCl4 pre valve closed
12/9/2012	10:55:23 AM	SiCl4 post valve closed
12/9/2012	10:55:23 AM	Bypass valve closed
12/9/2012	10:55:23 AM	Bubbler valve closed
12/9/2012	10:55:23 AM	Main Vac valve opened
12/9/2012	10:55:23 AM	Helium MFC set to  0.000000
12/9/2012	10:55:23 AM	H2 MFC set to  0.000000
12/9/2012	10:55:23 AM	BCl3 MFC set to  0.000000
12/9/2012	10:55:23 AM	PH3 MFC set to  0.000000
12/9/2012	10:55:23 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:55:23 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:55:24 AM	Tube furnace set to 150
12/9/2012	10:55:54 AM	H2 valve closed
12/9/2012	10:55:54 AM	BCl3 valve closed
12/9/2012	10:55:54 AM	PH3 valve closed
12/9/2012	10:55:54 AM	SiCl4 pre valve closed
12/9/2012	10:55:54 AM	SiCl4 post valve closed
12/9/2012	10:55:54 AM	Bypass valve closed
12/9/2012	10:55:54 AM	Bubbler valve closed
12/9/2012	10:55:54 AM	Helium valve opened
12/9/2012	10:55:54 AM	Main Vac valve opened
12/9/2012	10:55:54 AM	Helium MFC set to  20.000000
12/9/2012	10:55:54 AM	H2 MFC set to  0.000000
12/9/2012	10:55:54 AM	BCl3 MFC set to  0.000000
12/9/2012	10:55:54 AM	PH3 MFC set to  0.000000
12/9/2012	10:55:54 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:55:54 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:55:54 AM	Tube furnace set to 150
12/9/2012	10:56:24 AM	Helium valve closed
12/9/2012	10:56:24 AM	H2 valve closed
12/9/2012	10:56:24 AM	BCl3 valve closed
12/9/2012	10:56:24 AM	PH3 valve closed
12/9/2012	10:56:24 AM	SiCl4 pre valve closed
12/9/2012	10:56:24 AM	SiCl4 post valve closed
12/9/2012	10:56:24 AM	Bypass valve closed
12/9/2012	10:56:24 AM	Bubbler valve closed
12/9/2012	10:56:24 AM	Main Vac valve opened
12/9/2012	10:56:24 AM	Helium MFC set to  0.000000
12/9/2012	10:56:24 AM	H2 MFC set to  0.000000
12/9/2012	10:56:24 AM	BCl3 MFC set to  0.000000
12/9/2012	10:56:24 AM	PH3 MFC set to  0.000000
12/9/2012	10:56:24 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:56:24 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:56:24 AM	Tube furnace set to 150
12/9/2012	10:56:54 AM	H2 valve closed
12/9/2012	10:56:54 AM	BCl3 valve closed
12/9/2012	10:56:54 AM	PH3 valve closed
12/9/2012	10:56:54 AM	SiCl4 pre valve closed
12/9/2012	10:56:54 AM	SiCl4 post valve closed
12/9/2012	10:56:54 AM	Bypass valve closed
12/9/2012	10:56:54 AM	Bubbler valve closed
12/9/2012	10:56:54 AM	Helium valve opened
12/9/2012	10:56:54 AM	Main Vac valve opened
12/9/2012	10:56:54 AM	Helium MFC set to  20.000000
12/9/2012	10:56:54 AM	H2 MFC set to  0.000000
12/9/2012	10:56:54 AM	BCl3 MFC set to  0.000000
12/9/2012	10:56:54 AM	PH3 MFC set to  0.000000
12/9/2012	10:56:54 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:56:54 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:56:54 AM	Tube furnace set to 150
12/9/2012	10:57:24 AM	Helium valve closed
12/9/2012	10:57:24 AM	H2 valve closed
12/9/2012	10:57:24 AM	BCl3 valve closed
12/9/2012	10:57:24 AM	PH3 valve closed
12/9/2012	10:57:24 AM	SiCl4 pre valve closed
12/9/2012	10:57:24 AM	SiCl4 post valve closed
12/9/2012	10:57:24 AM	Bypass valve closed
12/9/2012	10:57:24 AM	Bubbler valve closed
12/9/2012	10:57:24 AM	Main Vac valve opened
12/9/2012	10:57:24 AM	Helium MFC set to  0.000000
12/9/2012	10:57:24 AM	H2 MFC set to  0.000000
12/9/2012	10:57:24 AM	BCl3 MFC set to  0.000000
12/9/2012	10:57:24 AM	PH3 MFC set to  0.000000
12/9/2012	10:57:24 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:57:24 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:57:25 AM	Tube furnace set to 150
12/9/2012	10:57:55 AM	H2 valve closed
12/9/2012	10:57:55 AM	BCl3 valve closed
12/9/2012	10:57:55 AM	PH3 valve closed
12/9/2012	10:57:55 AM	SiCl4 pre valve closed
12/9/2012	10:57:55 AM	SiCl4 post valve closed
12/9/2012	10:57:55 AM	Bypass valve closed
12/9/2012	10:57:55 AM	Bubbler valve closed
12/9/2012	10:57:55 AM	Helium valve opened
12/9/2012	10:57:55 AM	Main Vac valve opened
12/9/2012	10:57:55 AM	Helium MFC set to  20.000000
12/9/2012	10:57:55 AM	H2 MFC set to  0.000000
12/9/2012	10:57:55 AM	BCl3 MFC set to  0.000000
12/9/2012	10:57:55 AM	PH3 MFC set to  0.000000
12/9/2012	10:57:55 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:57:55 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:57:55 AM	Tube furnace set to 150
12/9/2012	10:58:25 AM	Helium valve closed
12/9/2012	10:58:25 AM	H2 valve closed
12/9/2012	10:58:25 AM	BCl3 valve closed
12/9/2012	10:58:25 AM	PH3 valve closed
12/9/2012	10:58:25 AM	SiCl4 pre valve closed
12/9/2012	10:58:25 AM	SiCl4 post valve closed
12/9/2012	10:58:25 AM	Bypass valve closed
12/9/2012	10:58:25 AM	Bubbler valve closed
12/9/2012	10:58:25 AM	Main Vac valve opened
12/9/2012	10:58:25 AM	Helium MFC set to  0.000000
12/9/2012	10:58:25 AM	H2 MFC set to  0.000000
12/9/2012	10:58:25 AM	BCl3 MFC set to  0.000000
12/9/2012	10:58:25 AM	PH3 MFC set to  0.000000
12/9/2012	10:58:25 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:58:25 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:58:25 AM	Tube furnace set to 150
12/9/2012	10:58:55 AM	H2 valve closed
12/9/2012	10:58:55 AM	BCl3 valve closed
12/9/2012	10:58:55 AM	PH3 valve closed
12/9/2012	10:58:55 AM	SiCl4 pre valve closed
12/9/2012	10:58:55 AM	SiCl4 post valve closed
12/9/2012	10:58:55 AM	Bypass valve closed
12/9/2012	10:58:55 AM	Bubbler valve closed
12/9/2012	10:58:55 AM	Helium valve opened
12/9/2012	10:58:55 AM	Main Vac valve opened
12/9/2012	10:58:55 AM	Helium MFC set to  20.000000
12/9/2012	10:58:55 AM	H2 MFC set to  0.000000
12/9/2012	10:58:55 AM	BCl3 MFC set to  0.000000
12/9/2012	10:58:55 AM	PH3 MFC set to  0.000000
12/9/2012	10:58:55 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:58:55 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:58:55 AM	Tube furnace set to 150
12/9/2012	10:59:25 AM	Helium valve closed
12/9/2012	10:59:25 AM	H2 valve closed
12/9/2012	10:59:25 AM	BCl3 valve closed
12/9/2012	10:59:25 AM	PH3 valve closed
12/9/2012	10:59:25 AM	SiCl4 pre valve closed
12/9/2012	10:59:25 AM	SiCl4 post valve closed
12/9/2012	10:59:25 AM	Bypass valve closed
12/9/2012	10:59:25 AM	Bubbler valve closed
12/9/2012	10:59:25 AM	Main Vac valve opened
12/9/2012	10:59:25 AM	Helium MFC set to  0.000000
12/9/2012	10:59:25 AM	H2 MFC set to  0.000000
12/9/2012	10:59:25 AM	BCl3 MFC set to  0.000000
12/9/2012	10:59:25 AM	PH3 MFC set to  0.000000
12/9/2012	10:59:25 AM	SiCl4 MFC set to  0.000000
12/9/2012	10:59:25 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	10:59:26 AM	Tube furnace set to 150
12/9/2012	10:59:27 AM	Run finished at 10:59 AM
12/9/2012	11:02:38 AM	Main Vac valve closed
12/9/2012	11:02:49 AM	Main Vac valve opened
12/9/2012	11:03:25 AM	Recipe started at 11:03 AM
12/9/2012	11:03:25 AM	Helium valve closed
12/9/2012	11:03:25 AM	H2 valve closed
12/9/2012	11:03:25 AM	BCl3 valve closed
12/9/2012	11:03:25 AM	PH3 valve closed
12/9/2012	11:03:25 AM	SiCl4 pre valve closed
12/9/2012	11:03:25 AM	SiCl4 post valve closed
12/9/2012	11:03:25 AM	Main Vac valve closed
12/9/2012	11:03:25 AM	Bypass valve closed
12/9/2012	11:03:25 AM	Bubbler valve closed
12/9/2012	11:03:25 AM	Helium MFC set to  0.000000
12/9/2012	11:03:25 AM	H2 MFC set to  0.000000
12/9/2012	11:03:25 AM	BCl3 MFC set to  0.000000
12/9/2012	11:03:25 AM	PH3 MFC set to  0.000000
12/9/2012	11:03:25 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:03:25 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:03:25 AM	Tube furnace set to 0
12/9/2012	11:03:28 AM	Helium valve closed
12/9/2012	11:03:28 AM	BCl3 valve closed
12/9/2012	11:03:28 AM	PH3 valve closed
12/9/2012	11:03:28 AM	SiCl4 pre valve closed
12/9/2012	11:03:28 AM	SiCl4 post valve closed
12/9/2012	11:03:28 AM	Main Vac valve closed
12/9/2012	11:03:28 AM	Bypass valve closed
12/9/2012	11:03:28 AM	Bubbler valve closed
12/9/2012	11:03:28 AM	H2 valve opened
12/9/2012	11:03:28 AM	Helium MFC set to  0.000000
12/9/2012	11:03:28 AM	H2 MFC set to  500.000000
12/9/2012	11:03:28 AM	BCl3 MFC set to  0.000000
12/9/2012	11:03:28 AM	PH3 MFC set to  0.000000
12/9/2012	11:03:28 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:03:28 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:03:28 AM	Tube furnace set to 0
12/9/2012	11:04:41 AM	Helium valve closed
12/9/2012	11:04:41 AM	BCl3 valve closed
12/9/2012	11:04:41 AM	PH3 valve closed
12/9/2012	11:04:41 AM	SiCl4 pre valve closed
12/9/2012	11:04:41 AM	SiCl4 post valve closed
12/9/2012	11:04:41 AM	Main Vac valve closed
12/9/2012	11:04:41 AM	Bypass valve closed
12/9/2012	11:04:41 AM	H2 valve opened
12/9/2012	11:04:41 AM	Bubbler valve opened
12/9/2012	11:04:41 AM	Helium MFC set to  0.000000
12/9/2012	11:04:41 AM	H2 MFC set to  500.000000
12/9/2012	11:04:41 AM	BCl3 MFC set to  0.000000
12/9/2012	11:04:41 AM	PH3 MFC set to  0.000000
12/9/2012	11:04:41 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:04:41 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:04:41 AM	Tube furnace set to 0
12/9/2012	11:04:42 AM	Helium valve closed
12/9/2012	11:04:42 AM	BCl3 valve closed
12/9/2012	11:04:42 AM	PH3 valve closed
12/9/2012	11:04:42 AM	SiCl4 pre valve closed
12/9/2012	11:04:42 AM	SiCl4 post valve closed
12/9/2012	11:04:42 AM	Main Vac valve closed
12/9/2012	11:04:42 AM	Bypass valve closed
12/9/2012	11:04:42 AM	H2 valve opened
12/9/2012	11:04:42 AM	Bubbler valve opened
12/9/2012	11:04:42 AM	Helium MFC set to  0.000000
12/9/2012	11:04:42 AM	H2 MFC set to  450.000000
12/9/2012	11:04:42 AM	BCl3 MFC set to  0.000000
12/9/2012	11:04:42 AM	PH3 MFC set to  0.000000
12/9/2012	11:04:42 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:04:42 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:04:42 AM	Tube furnace set to 1000
12/9/2012	11:29:42 AM	Helium valve closed
12/9/2012	11:29:42 AM	PH3 valve closed
12/9/2012	11:29:42 AM	Main Vac valve closed
12/9/2012	11:29:42 AM	Bypass valve closed
12/9/2012	11:29:42 AM	H2 valve opened
12/9/2012	11:29:42 AM	BCl3 valve opened
12/9/2012	11:29:42 AM	SiCl4 pre valve opened
12/9/2012	11:29:42 AM	SiCl4 post valve opened
12/9/2012	11:29:42 AM	Bubbler valve opened
12/9/2012	11:29:42 AM	Helium MFC set to  0.000000
12/9/2012	11:29:42 AM	H2 MFC set to  450.000000
12/9/2012	11:29:42 AM	BCl3 MFC set to  1.500000
12/9/2012	11:29:42 AM	PH3 MFC set to  0.000000
12/9/2012	11:29:42 AM	SiCl4 MFC set to  50.000000
12/9/2012	11:29:42 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:29:42 AM	Tube furnace set to 1000
12/9/2012	11:34:42 AM	Helium valve closed
12/9/2012	11:34:42 AM	BCl3 valve closed
12/9/2012	11:34:42 AM	PH3 valve closed
12/9/2012	11:34:42 AM	SiCl4 pre valve closed
12/9/2012	11:34:42 AM	SiCl4 post valve closed
12/9/2012	11:34:42 AM	Main Vac valve closed
12/9/2012	11:34:42 AM	Bypass valve closed
12/9/2012	11:34:42 AM	H2 valve opened
12/9/2012	11:34:42 AM	Bubbler valve opened
12/9/2012	11:34:42 AM	Helium MFC set to  0.000000
12/9/2012	11:34:42 AM	H2 MFC set to  500.000000
12/9/2012	11:34:42 AM	BCl3 MFC set to  0.000000
12/9/2012	11:34:42 AM	PH3 MFC set to  0.000000
12/9/2012	11:34:42 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:34:42 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:34:42 AM	Tube furnace set to 750
12/9/2012	11:39:42 AM	H2 valve closed
12/9/2012	11:39:42 AM	BCl3 valve closed
12/9/2012	11:39:42 AM	PH3 valve closed
12/9/2012	11:39:42 AM	SiCl4 pre valve closed
12/9/2012	11:39:42 AM	SiCl4 post valve closed
12/9/2012	11:39:42 AM	Main Vac valve closed
12/9/2012	11:39:42 AM	Bypass valve closed
12/9/2012	11:39:42 AM	Helium valve opened
12/9/2012	11:39:42 AM	Bubbler valve opened
12/9/2012	11:39:42 AM	Helium MFC set to  500.000000
12/9/2012	11:39:42 AM	H2 MFC set to  0.000000
12/9/2012	11:39:42 AM	BCl3 MFC set to  0.000000
12/9/2012	11:39:42 AM	PH3 MFC set to  0.000000
12/9/2012	11:39:43 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:39:43 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:39:43 AM	Tube furnace set to 0
12/9/2012	11:47:56 AM	Helium valve closed
12/9/2012	11:47:56 AM	H2 valve closed
12/9/2012	11:47:56 AM	BCl3 valve closed
12/9/2012	11:47:56 AM	PH3 valve closed
12/9/2012	11:47:56 AM	SiCl4 pre valve closed
12/9/2012	11:47:56 AM	SiCl4 post valve closed
12/9/2012	11:47:56 AM	Main Vac valve closed
12/9/2012	11:47:56 AM	Bypass valve closed
12/9/2012	11:47:56 AM	Bubbler valve closed
12/9/2012	11:47:56 AM	Helium MFC set to  0.000000
12/9/2012	11:47:56 AM	H2 MFC set to  0.000000
12/9/2012	11:47:56 AM	BCl3 MFC set to  0.000000
12/9/2012	11:47:56 AM	PH3 MFC set to  0.000000
12/9/2012	11:47:56 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:47:56 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:47:56 AM	Tube furnace set to 0
12/9/2012	11:47:57 AM	Run finished at 11:47 AM
12/9/2012	11:47:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	11:48:00 AM	Recipe started at 11:48 AM
12/9/2012	11:48:00 AM	Helium valve closed
12/9/2012	11:48:00 AM	H2 valve closed
12/9/2012	11:48:00 AM	BCl3 valve closed
12/9/2012	11:48:00 AM	PH3 valve closed
12/9/2012	11:48:00 AM	SiCl4 pre valve closed
12/9/2012	11:48:00 AM	SiCl4 post valve closed
12/9/2012	11:48:00 AM	Main Vac valve closed
12/9/2012	11:48:00 AM	Bypass valve closed
12/9/2012	11:48:00 AM	Bubbler valve closed
12/9/2012	11:48:00 AM	Helium MFC set to  0.000000
12/9/2012	11:48:00 AM	H2 MFC set to  0.000000
12/9/2012	11:48:00 AM	BCl3 MFC set to  0.000000
12/9/2012	11:48:00 AM	PH3 MFC set to  0.000000
12/9/2012	11:48:00 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:48:00 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:48:01 AM	Tube furnace set to 0
12/9/2012	11:48:04 AM	H2 valve closed
12/9/2012	11:48:04 AM	BCl3 valve closed
12/9/2012	11:48:04 AM	PH3 valve closed
12/9/2012	11:48:04 AM	SiCl4 pre valve closed
12/9/2012	11:48:04 AM	SiCl4 post valve closed
12/9/2012	11:48:04 AM	Main Vac valve closed
12/9/2012	11:48:04 AM	Bypass valve closed
12/9/2012	11:48:04 AM	Bubbler valve closed
12/9/2012	11:48:04 AM	Helium valve opened
12/9/2012	11:48:04 AM	Helium MFC set to  500.000000
12/9/2012	11:48:04 AM	H2 MFC set to  0.000000
12/9/2012	11:48:04 AM	BCl3 MFC set to  0.000000
12/9/2012	11:48:04 AM	PH3 MFC set to  0.000000
12/9/2012	11:48:04 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:48:04 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:48:04 AM	Tube furnace set to 0
12/9/2012	11:48:04 AM	Helium valve closed
12/9/2012	11:48:04 AM	H2 valve closed
12/9/2012	11:48:04 AM	BCl3 valve closed
12/9/2012	11:48:04 AM	PH3 valve closed
12/9/2012	11:48:04 AM	SiCl4 pre valve closed
12/9/2012	11:48:04 AM	SiCl4 post valve closed
12/9/2012	11:48:04 AM	Main Vac valve closed
12/9/2012	11:48:04 AM	Bypass valve closed
12/9/2012	11:48:04 AM	Bubbler valve closed
12/9/2012	11:48:04 AM	Helium MFC set to  0.000000
12/9/2012	11:48:04 AM	H2 MFC set to  0.000000
12/9/2012	11:48:04 AM	BCl3 MFC set to  0.000000
12/9/2012	11:48:04 AM	PH3 MFC set to  0.000000
12/9/2012	11:48:04 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:48:04 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:48:04 AM	Tube furnace set to 0
12/9/2012	11:48:05 AM	Run finished at 11:48 AM
12/9/2012	11:48:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	11:51:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	11:51:29 AM	Recipe started at 11:51 AM
12/9/2012	11:51:29 AM	Helium valve closed
12/9/2012	11:51:29 AM	H2 valve closed
12/9/2012	11:51:29 AM	BCl3 valve closed
12/9/2012	11:51:29 AM	PH3 valve closed
12/9/2012	11:51:29 AM	SiCl4 pre valve closed
12/9/2012	11:51:29 AM	SiCl4 post valve closed
12/9/2012	11:51:29 AM	Main Vac valve closed
12/9/2012	11:51:29 AM	Bubbler valve closed
12/9/2012	11:51:29 AM	Bypass valve opened
12/9/2012	11:51:29 AM	Helium MFC set to  0.000000
12/9/2012	11:51:29 AM	H2 MFC set to  0.000000
12/9/2012	11:51:29 AM	BCl3 MFC set to  0.000000
12/9/2012	11:51:29 AM	PH3 MFC set to  0.000000
12/9/2012	11:51:29 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:51:29 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:51:29 AM	Tube furnace set to 0
12/9/2012	11:52:43 AM	Helium valve closed
12/9/2012	11:52:43 AM	H2 valve closed
12/9/2012	11:52:43 AM	BCl3 valve closed
12/9/2012	11:52:43 AM	PH3 valve closed
12/9/2012	11:52:43 AM	SiCl4 pre valve closed
12/9/2012	11:52:43 AM	SiCl4 post valve closed
12/9/2012	11:52:43 AM	Main Vac valve closed
12/9/2012	11:52:43 AM	Bubbler valve closed
12/9/2012	11:52:43 AM	Bypass valve opened
12/9/2012	11:52:43 AM	Helium MFC set to  0.000000
12/9/2012	11:52:43 AM	H2 MFC set to  0.000000
12/9/2012	11:52:43 AM	BCl3 MFC set to  0.000000
12/9/2012	11:52:43 AM	PH3 MFC set to  0.000000
12/9/2012	11:52:43 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:52:43 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:52:43 AM	Tube furnace set to 0
12/9/2012	11:53:43 AM	Helium valve closed
12/9/2012	11:53:43 AM	H2 valve closed
12/9/2012	11:53:43 AM	BCl3 valve closed
12/9/2012	11:53:43 AM	PH3 valve closed
12/9/2012	11:53:43 AM	SiCl4 pre valve closed
12/9/2012	11:53:43 AM	SiCl4 post valve closed
12/9/2012	11:53:43 AM	Bypass valve closed
12/9/2012	11:53:43 AM	Bubbler valve closed
12/9/2012	11:53:43 AM	Main Vac valve opened
12/9/2012	11:53:43 AM	Helium MFC set to  0.000000
12/9/2012	11:53:43 AM	H2 MFC set to  0.000000
12/9/2012	11:53:43 AM	BCl3 MFC set to  0.000000
12/9/2012	11:53:43 AM	PH3 MFC set to  0.000000
12/9/2012	11:53:43 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:53:43 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:53:43 AM	Tube furnace set to 0
12/9/2012	11:53:44 AM	Run finished at 11:53 AM
12/9/2012	11:53:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	11:56:47 AM	Recipe started at 11:56 AM
12/9/2012	11:56:47 AM	Helium valve closed
12/9/2012	11:56:47 AM	H2 valve closed
12/9/2012	11:56:47 AM	BCl3 valve closed
12/9/2012	11:56:47 AM	PH3 valve closed
12/9/2012	11:56:47 AM	SiCl4 pre valve closed
12/9/2012	11:56:47 AM	SiCl4 post valve closed
12/9/2012	11:56:47 AM	Bypass valve closed
12/9/2012	11:56:47 AM	Bubbler valve closed
12/9/2012	11:56:47 AM	Main Vac valve opened
12/9/2012	11:56:47 AM	Helium MFC set to  0.000000
12/9/2012	11:56:47 AM	H2 MFC set to  0.000000
12/9/2012	11:56:47 AM	BCl3 MFC set to  0.000000
12/9/2012	11:56:47 AM	PH3 MFC set to  0.000000
12/9/2012	11:56:47 AM	SiCl4 MFC set to  0.000000
12/9/2012	11:56:47 AM	Bypass solenoid MFC set to  0.000000
12/9/2012	11:56:47 AM	Tube furnace set to 150
12/9/2012	1:26:47 PM	H2 valve closed
12/9/2012	1:26:47 PM	BCl3 valve closed
12/9/2012	1:26:47 PM	PH3 valve closed
12/9/2012	1:26:47 PM	SiCl4 pre valve closed
12/9/2012	1:26:47 PM	SiCl4 post valve closed
12/9/2012	1:26:47 PM	Bypass valve closed
12/9/2012	1:26:47 PM	Bubbler valve closed
12/9/2012	1:26:47 PM	Helium valve opened
12/9/2012	1:26:47 PM	Main Vac valve opened
12/9/2012	1:26:47 PM	Helium MFC set to  20.000000
12/9/2012	1:26:47 PM	H2 MFC set to  0.000000
12/9/2012	1:26:47 PM	BCl3 MFC set to  0.000000
12/9/2012	1:26:47 PM	PH3 MFC set to  0.000000
12/9/2012	1:26:47 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:26:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:26:48 PM	Tube furnace set to 150
12/9/2012	1:27:18 PM	Helium valve closed
12/9/2012	1:27:18 PM	H2 valve closed
12/9/2012	1:27:18 PM	BCl3 valve closed
12/9/2012	1:27:18 PM	PH3 valve closed
12/9/2012	1:27:18 PM	SiCl4 pre valve closed
12/9/2012	1:27:18 PM	SiCl4 post valve closed
12/9/2012	1:27:18 PM	Bypass valve closed
12/9/2012	1:27:18 PM	Bubbler valve closed
12/9/2012	1:27:18 PM	Main Vac valve opened
12/9/2012	1:27:18 PM	Helium MFC set to  0.000000
12/9/2012	1:27:18 PM	H2 MFC set to  0.000000
12/9/2012	1:27:18 PM	BCl3 MFC set to  0.000000
12/9/2012	1:27:18 PM	PH3 MFC set to  0.000000
12/9/2012	1:27:18 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:27:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:27:18 PM	Tube furnace set to 150
12/9/2012	1:27:48 PM	H2 valve closed
12/9/2012	1:27:48 PM	BCl3 valve closed
12/9/2012	1:27:48 PM	PH3 valve closed
12/9/2012	1:27:48 PM	SiCl4 pre valve closed
12/9/2012	1:27:48 PM	SiCl4 post valve closed
12/9/2012	1:27:48 PM	Bypass valve closed
12/9/2012	1:27:48 PM	Bubbler valve closed
12/9/2012	1:27:48 PM	Helium valve opened
12/9/2012	1:27:48 PM	Main Vac valve opened
12/9/2012	1:27:48 PM	Helium MFC set to  20.000000
12/9/2012	1:27:48 PM	H2 MFC set to  0.000000
12/9/2012	1:27:48 PM	BCl3 MFC set to  0.000000
12/9/2012	1:27:48 PM	PH3 MFC set to  0.000000
12/9/2012	1:27:48 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:27:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:27:48 PM	Tube furnace set to 150
12/9/2012	1:28:18 PM	Helium valve closed
12/9/2012	1:28:18 PM	H2 valve closed
12/9/2012	1:28:18 PM	BCl3 valve closed
12/9/2012	1:28:18 PM	PH3 valve closed
12/9/2012	1:28:18 PM	SiCl4 pre valve closed
12/9/2012	1:28:18 PM	SiCl4 post valve closed
12/9/2012	1:28:18 PM	Bypass valve closed
12/9/2012	1:28:18 PM	Bubbler valve closed
12/9/2012	1:28:18 PM	Main Vac valve opened
12/9/2012	1:28:18 PM	Helium MFC set to  0.000000
12/9/2012	1:28:18 PM	H2 MFC set to  0.000000
12/9/2012	1:28:18 PM	BCl3 MFC set to  0.000000
12/9/2012	1:28:18 PM	PH3 MFC set to  0.000000
12/9/2012	1:28:18 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:28:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:28:18 PM	Tube furnace set to 150
12/9/2012	1:28:48 PM	H2 valve closed
12/9/2012	1:28:48 PM	BCl3 valve closed
12/9/2012	1:28:48 PM	PH3 valve closed
12/9/2012	1:28:48 PM	SiCl4 pre valve closed
12/9/2012	1:28:48 PM	SiCl4 post valve closed
12/9/2012	1:28:48 PM	Bypass valve closed
12/9/2012	1:28:48 PM	Bubbler valve closed
12/9/2012	1:28:48 PM	Helium valve opened
12/9/2012	1:28:48 PM	Main Vac valve opened
12/9/2012	1:28:48 PM	Helium MFC set to  20.000000
12/9/2012	1:28:48 PM	H2 MFC set to  0.000000
12/9/2012	1:28:48 PM	BCl3 MFC set to  0.000000
12/9/2012	1:28:48 PM	PH3 MFC set to  0.000000
12/9/2012	1:28:48 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:28:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:28:49 PM	Tube furnace set to 150
12/9/2012	1:29:19 PM	Helium valve closed
12/9/2012	1:29:19 PM	H2 valve closed
12/9/2012	1:29:19 PM	BCl3 valve closed
12/9/2012	1:29:19 PM	PH3 valve closed
12/9/2012	1:29:19 PM	SiCl4 pre valve closed
12/9/2012	1:29:19 PM	SiCl4 post valve closed
12/9/2012	1:29:19 PM	Bypass valve closed
12/9/2012	1:29:19 PM	Bubbler valve closed
12/9/2012	1:29:19 PM	Main Vac valve opened
12/9/2012	1:29:19 PM	Helium MFC set to  0.000000
12/9/2012	1:29:19 PM	H2 MFC set to  0.000000
12/9/2012	1:29:19 PM	BCl3 MFC set to  0.000000
12/9/2012	1:29:19 PM	PH3 MFC set to  0.000000
12/9/2012	1:29:19 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:29:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:29:19 PM	Tube furnace set to 150
12/9/2012	1:29:49 PM	H2 valve closed
12/9/2012	1:29:49 PM	BCl3 valve closed
12/9/2012	1:29:49 PM	PH3 valve closed
12/9/2012	1:29:49 PM	SiCl4 pre valve closed
12/9/2012	1:29:49 PM	SiCl4 post valve closed
12/9/2012	1:29:49 PM	Bypass valve closed
12/9/2012	1:29:49 PM	Bubbler valve closed
12/9/2012	1:29:49 PM	Helium valve opened
12/9/2012	1:29:49 PM	Main Vac valve opened
12/9/2012	1:29:49 PM	Helium MFC set to  20.000000
12/9/2012	1:29:49 PM	H2 MFC set to  0.000000
12/9/2012	1:29:49 PM	BCl3 MFC set to  0.000000
12/9/2012	1:29:49 PM	PH3 MFC set to  0.000000
12/9/2012	1:29:49 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:29:49 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:29:49 PM	Tube furnace set to 150
12/9/2012	1:30:19 PM	Helium valve closed
12/9/2012	1:30:19 PM	H2 valve closed
12/9/2012	1:30:19 PM	BCl3 valve closed
12/9/2012	1:30:19 PM	PH3 valve closed
12/9/2012	1:30:19 PM	SiCl4 pre valve closed
12/9/2012	1:30:19 PM	SiCl4 post valve closed
12/9/2012	1:30:19 PM	Bypass valve closed
12/9/2012	1:30:19 PM	Bubbler valve closed
12/9/2012	1:30:19 PM	Main Vac valve opened
12/9/2012	1:30:19 PM	Helium MFC set to  0.000000
12/9/2012	1:30:19 PM	H2 MFC set to  0.000000
12/9/2012	1:30:19 PM	BCl3 MFC set to  0.000000
12/9/2012	1:30:19 PM	PH3 MFC set to  0.000000
12/9/2012	1:30:19 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:30:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:30:19 PM	Tube furnace set to 150
12/9/2012	1:30:49 PM	H2 valve closed
12/9/2012	1:30:49 PM	BCl3 valve closed
12/9/2012	1:30:49 PM	PH3 valve closed
12/9/2012	1:30:49 PM	SiCl4 pre valve closed
12/9/2012	1:30:49 PM	SiCl4 post valve closed
12/9/2012	1:30:49 PM	Bypass valve closed
12/9/2012	1:30:49 PM	Bubbler valve closed
12/9/2012	1:30:49 PM	Helium valve opened
12/9/2012	1:30:49 PM	Main Vac valve opened
12/9/2012	1:30:49 PM	Helium MFC set to  20.000000
12/9/2012	1:30:49 PM	H2 MFC set to  0.000000
12/9/2012	1:30:49 PM	BCl3 MFC set to  0.000000
12/9/2012	1:30:49 PM	PH3 MFC set to  0.000000
12/9/2012	1:30:49 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:30:49 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:30:50 PM	Tube furnace set to 150
12/9/2012	1:31:20 PM	Helium valve closed
12/9/2012	1:31:20 PM	H2 valve closed
12/9/2012	1:31:20 PM	BCl3 valve closed
12/9/2012	1:31:20 PM	PH3 valve closed
12/9/2012	1:31:20 PM	SiCl4 pre valve closed
12/9/2012	1:31:20 PM	SiCl4 post valve closed
12/9/2012	1:31:20 PM	Bypass valve closed
12/9/2012	1:31:20 PM	Bubbler valve closed
12/9/2012	1:31:20 PM	Main Vac valve opened
12/9/2012	1:31:20 PM	Helium MFC set to  0.000000
12/9/2012	1:31:20 PM	H2 MFC set to  0.000000
12/9/2012	1:31:20 PM	BCl3 MFC set to  0.000000
12/9/2012	1:31:20 PM	PH3 MFC set to  0.000000
12/9/2012	1:31:20 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:31:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:31:20 PM	Tube furnace set to 150
12/9/2012	1:31:50 PM	H2 valve closed
12/9/2012	1:31:50 PM	BCl3 valve closed
12/9/2012	1:31:50 PM	PH3 valve closed
12/9/2012	1:31:50 PM	SiCl4 pre valve closed
12/9/2012	1:31:50 PM	SiCl4 post valve closed
12/9/2012	1:31:50 PM	Bypass valve closed
12/9/2012	1:31:50 PM	Bubbler valve closed
12/9/2012	1:31:50 PM	Helium valve opened
12/9/2012	1:31:50 PM	Main Vac valve opened
12/9/2012	1:31:50 PM	Helium MFC set to  20.000000
12/9/2012	1:31:50 PM	H2 MFC set to  0.000000
12/9/2012	1:31:50 PM	BCl3 MFC set to  0.000000
12/9/2012	1:31:50 PM	PH3 MFC set to  0.000000
12/9/2012	1:31:50 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:31:50 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:31:50 PM	Tube furnace set to 150
12/9/2012	1:32:20 PM	Helium valve closed
12/9/2012	1:32:20 PM	H2 valve closed
12/9/2012	1:32:20 PM	BCl3 valve closed
12/9/2012	1:32:20 PM	PH3 valve closed
12/9/2012	1:32:20 PM	SiCl4 pre valve closed
12/9/2012	1:32:20 PM	SiCl4 post valve closed
12/9/2012	1:32:20 PM	Bypass valve closed
12/9/2012	1:32:20 PM	Bubbler valve closed
12/9/2012	1:32:20 PM	Main Vac valve opened
12/9/2012	1:32:20 PM	Helium MFC set to  0.000000
12/9/2012	1:32:20 PM	H2 MFC set to  0.000000
12/9/2012	1:32:20 PM	BCl3 MFC set to  0.000000
12/9/2012	1:32:20 PM	PH3 MFC set to  0.000000
12/9/2012	1:32:20 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:32:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:32:20 PM	Tube furnace set to 150
12/9/2012	1:32:50 PM	H2 valve closed
12/9/2012	1:32:50 PM	BCl3 valve closed
12/9/2012	1:32:50 PM	PH3 valve closed
12/9/2012	1:32:50 PM	SiCl4 pre valve closed
12/9/2012	1:32:50 PM	SiCl4 post valve closed
12/9/2012	1:32:50 PM	Bypass valve closed
12/9/2012	1:32:50 PM	Bubbler valve closed
12/9/2012	1:32:50 PM	Helium valve opened
12/9/2012	1:32:50 PM	Main Vac valve opened
12/9/2012	1:32:50 PM	Helium MFC set to  20.000000
12/9/2012	1:32:50 PM	H2 MFC set to  0.000000
12/9/2012	1:32:50 PM	BCl3 MFC set to  0.000000
12/9/2012	1:32:50 PM	PH3 MFC set to  0.000000
12/9/2012	1:32:50 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:32:50 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:32:50 PM	Tube furnace set to 150
12/9/2012	1:33:21 PM	Helium valve closed
12/9/2012	1:33:21 PM	H2 valve closed
12/9/2012	1:33:21 PM	BCl3 valve closed
12/9/2012	1:33:21 PM	PH3 valve closed
12/9/2012	1:33:21 PM	SiCl4 pre valve closed
12/9/2012	1:33:21 PM	SiCl4 post valve closed
12/9/2012	1:33:21 PM	Bypass valve closed
12/9/2012	1:33:21 PM	Bubbler valve closed
12/9/2012	1:33:21 PM	Main Vac valve opened
12/9/2012	1:33:21 PM	Helium MFC set to  0.000000
12/9/2012	1:33:21 PM	H2 MFC set to  0.000000
12/9/2012	1:33:21 PM	BCl3 MFC set to  0.000000
12/9/2012	1:33:21 PM	PH3 MFC set to  0.000000
12/9/2012	1:33:21 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:33:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:33:21 PM	Tube furnace set to 150
12/9/2012	1:33:51 PM	H2 valve closed
12/9/2012	1:33:51 PM	BCl3 valve closed
12/9/2012	1:33:51 PM	PH3 valve closed
12/9/2012	1:33:51 PM	SiCl4 pre valve closed
12/9/2012	1:33:51 PM	SiCl4 post valve closed
12/9/2012	1:33:51 PM	Bypass valve closed
12/9/2012	1:33:51 PM	Bubbler valve closed
12/9/2012	1:33:51 PM	Helium valve opened
12/9/2012	1:33:51 PM	Main Vac valve opened
12/9/2012	1:33:51 PM	Helium MFC set to  20.000000
12/9/2012	1:33:51 PM	H2 MFC set to  0.000000
12/9/2012	1:33:51 PM	BCl3 MFC set to  0.000000
12/9/2012	1:33:51 PM	PH3 MFC set to  0.000000
12/9/2012	1:33:51 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:33:51 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:33:51 PM	Tube furnace set to 150
12/9/2012	1:34:21 PM	Helium valve closed
12/9/2012	1:34:21 PM	H2 valve closed
12/9/2012	1:34:21 PM	BCl3 valve closed
12/9/2012	1:34:21 PM	PH3 valve closed
12/9/2012	1:34:21 PM	SiCl4 pre valve closed
12/9/2012	1:34:21 PM	SiCl4 post valve closed
12/9/2012	1:34:21 PM	Bypass valve closed
12/9/2012	1:34:21 PM	Bubbler valve closed
12/9/2012	1:34:21 PM	Main Vac valve opened
12/9/2012	1:34:21 PM	Helium MFC set to  0.000000
12/9/2012	1:34:21 PM	H2 MFC set to  0.000000
12/9/2012	1:34:21 PM	BCl3 MFC set to  0.000000
12/9/2012	1:34:21 PM	PH3 MFC set to  0.000000
12/9/2012	1:34:21 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:34:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:34:21 PM	Tube furnace set to 150
12/9/2012	1:34:51 PM	H2 valve closed
12/9/2012	1:34:51 PM	BCl3 valve closed
12/9/2012	1:34:51 PM	PH3 valve closed
12/9/2012	1:34:51 PM	SiCl4 pre valve closed
12/9/2012	1:34:51 PM	SiCl4 post valve closed
12/9/2012	1:34:51 PM	Bypass valve closed
12/9/2012	1:34:51 PM	Bubbler valve closed
12/9/2012	1:34:51 PM	Helium valve opened
12/9/2012	1:34:51 PM	Main Vac valve opened
12/9/2012	1:34:51 PM	Helium MFC set to  20.000000
12/9/2012	1:34:51 PM	H2 MFC set to  0.000000
12/9/2012	1:34:51 PM	BCl3 MFC set to  0.000000
12/9/2012	1:34:51 PM	PH3 MFC set to  0.000000
12/9/2012	1:34:51 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:34:51 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:34:51 PM	Tube furnace set to 150
12/9/2012	1:35:21 PM	Helium valve closed
12/9/2012	1:35:21 PM	H2 valve closed
12/9/2012	1:35:21 PM	BCl3 valve closed
12/9/2012	1:35:22 PM	PH3 valve closed
12/9/2012	1:35:22 PM	SiCl4 pre valve closed
12/9/2012	1:35:22 PM	SiCl4 post valve closed
12/9/2012	1:35:22 PM	Bypass valve closed
12/9/2012	1:35:22 PM	Bubbler valve closed
12/9/2012	1:35:22 PM	Main Vac valve opened
12/9/2012	1:35:22 PM	Helium MFC set to  0.000000
12/9/2012	1:35:22 PM	H2 MFC set to  0.000000
12/9/2012	1:35:22 PM	BCl3 MFC set to  0.000000
12/9/2012	1:35:22 PM	PH3 MFC set to  0.000000
12/9/2012	1:35:22 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:35:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:35:22 PM	Tube furnace set to 150
12/9/2012	1:35:52 PM	H2 valve closed
12/9/2012	1:35:52 PM	BCl3 valve closed
12/9/2012	1:35:52 PM	PH3 valve closed
12/9/2012	1:35:52 PM	SiCl4 pre valve closed
12/9/2012	1:35:52 PM	SiCl4 post valve closed
12/9/2012	1:35:52 PM	Bypass valve closed
12/9/2012	1:35:52 PM	Bubbler valve closed
12/9/2012	1:35:52 PM	Helium valve opened
12/9/2012	1:35:52 PM	Main Vac valve opened
12/9/2012	1:35:52 PM	Helium MFC set to  20.000000
12/9/2012	1:35:52 PM	H2 MFC set to  0.000000
12/9/2012	1:35:52 PM	BCl3 MFC set to  0.000000
12/9/2012	1:35:52 PM	PH3 MFC set to  0.000000
12/9/2012	1:35:52 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:35:52 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:35:52 PM	Tube furnace set to 150
12/9/2012	1:36:22 PM	Helium valve closed
12/9/2012	1:36:22 PM	H2 valve closed
12/9/2012	1:36:22 PM	BCl3 valve closed
12/9/2012	1:36:22 PM	PH3 valve closed
12/9/2012	1:36:22 PM	SiCl4 pre valve closed
12/9/2012	1:36:22 PM	SiCl4 post valve closed
12/9/2012	1:36:22 PM	Bypass valve closed
12/9/2012	1:36:22 PM	Bubbler valve closed
12/9/2012	1:36:22 PM	Main Vac valve opened
12/9/2012	1:36:22 PM	Helium MFC set to  0.000000
12/9/2012	1:36:22 PM	H2 MFC set to  0.000000
12/9/2012	1:36:22 PM	BCl3 MFC set to  0.000000
12/9/2012	1:36:22 PM	PH3 MFC set to  0.000000
12/9/2012	1:36:22 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:36:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:36:22 PM	Tube furnace set to 150
12/9/2012	1:36:23 PM	Run finished at 1:36 PM
12/9/2012	1:45:03 PM	Main Vac valve closed
12/9/2012	1:45:15 PM	Main Vac valve opened
12/9/2012	1:46:00 PM	Recipe started at 1:45 PM
12/9/2012	1:46:00 PM	Helium valve closed
12/9/2012	1:46:00 PM	H2 valve closed
12/9/2012	1:46:00 PM	BCl3 valve closed
12/9/2012	1:46:00 PM	PH3 valve closed
12/9/2012	1:46:00 PM	SiCl4 pre valve closed
12/9/2012	1:46:00 PM	SiCl4 post valve closed
12/9/2012	1:46:00 PM	Main Vac valve closed
12/9/2012	1:46:00 PM	Bypass valve closed
12/9/2012	1:46:00 PM	Bubbler valve closed
12/9/2012	1:46:00 PM	Helium MFC set to  0.000000
12/9/2012	1:46:00 PM	H2 MFC set to  0.000000
12/9/2012	1:46:00 PM	BCl3 MFC set to  0.000000
12/9/2012	1:46:00 PM	PH3 MFC set to  0.000000
12/9/2012	1:46:00 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:46:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:46:00 PM	Tube furnace set to 0
12/9/2012	1:46:03 PM	Helium valve closed
12/9/2012	1:46:03 PM	BCl3 valve closed
12/9/2012	1:46:03 PM	PH3 valve closed
12/9/2012	1:46:03 PM	SiCl4 pre valve closed
12/9/2012	1:46:03 PM	SiCl4 post valve closed
12/9/2012	1:46:03 PM	Main Vac valve closed
12/9/2012	1:46:03 PM	Bypass valve closed
12/9/2012	1:46:03 PM	Bubbler valve closed
12/9/2012	1:46:03 PM	H2 valve opened
12/9/2012	1:46:03 PM	Helium MFC set to  0.000000
12/9/2012	1:46:03 PM	H2 MFC set to  500.000000
12/9/2012	1:46:03 PM	BCl3 MFC set to  0.000000
12/9/2012	1:46:03 PM	PH3 MFC set to  0.000000
12/9/2012	1:46:03 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:46:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:46:03 PM	Tube furnace set to 0
12/9/2012	1:47:15 PM	Helium valve closed
12/9/2012	1:47:15 PM	BCl3 valve closed
12/9/2012	1:47:15 PM	PH3 valve closed
12/9/2012	1:47:15 PM	SiCl4 pre valve closed
12/9/2012	1:47:15 PM	SiCl4 post valve closed
12/9/2012	1:47:15 PM	Main Vac valve closed
12/9/2012	1:47:15 PM	Bypass valve closed
12/9/2012	1:47:16 PM	H2 valve opened
12/9/2012	1:47:16 PM	Bubbler valve opened
12/9/2012	1:47:16 PM	Helium MFC set to  0.000000
12/9/2012	1:47:16 PM	H2 MFC set to  500.000000
12/9/2012	1:47:16 PM	BCl3 MFC set to  0.000000
12/9/2012	1:47:16 PM	PH3 MFC set to  0.000000
12/9/2012	1:47:16 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:47:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:47:16 PM	Tube furnace set to 0
12/9/2012	1:47:17 PM	Helium valve closed
12/9/2012	1:47:17 PM	BCl3 valve closed
12/9/2012	1:47:17 PM	PH3 valve closed
12/9/2012	1:47:17 PM	SiCl4 pre valve closed
12/9/2012	1:47:17 PM	SiCl4 post valve closed
12/9/2012	1:47:17 PM	Main Vac valve closed
12/9/2012	1:47:17 PM	Bypass valve closed
12/9/2012	1:47:17 PM	H2 valve opened
12/9/2012	1:47:17 PM	Bubbler valve opened
12/9/2012	1:47:17 PM	Helium MFC set to  0.000000
12/9/2012	1:47:17 PM	H2 MFC set to  450.000000
12/9/2012	1:47:17 PM	BCl3 MFC set to  0.000000
12/9/2012	1:47:17 PM	PH3 MFC set to  0.000000
12/9/2012	1:47:17 PM	SiCl4 MFC set to  0.000000
12/9/2012	1:47:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	1:47:17 PM	Tube furnace set to 1000
12/9/2012	2:12:17 PM	Helium valve closed
12/9/2012	2:12:17 PM	PH3 valve closed
12/9/2012	2:12:17 PM	Main Vac valve closed
12/9/2012	2:12:17 PM	Bypass valve closed
12/9/2012	2:12:17 PM	H2 valve opened
12/9/2012	2:12:17 PM	BCl3 valve opened
12/9/2012	2:12:17 PM	SiCl4 pre valve opened
12/9/2012	2:12:17 PM	SiCl4 post valve opened
12/9/2012	2:12:17 PM	Bubbler valve opened
12/9/2012	2:12:17 PM	Helium MFC set to  0.000000
12/9/2012	2:12:17 PM	H2 MFC set to  450.000000
12/9/2012	2:12:17 PM	BCl3 MFC set to  1.500000
12/9/2012	2:12:17 PM	PH3 MFC set to  0.000000
12/9/2012	2:12:17 PM	SiCl4 MFC set to  50.000000
12/9/2012	2:12:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:12:17 PM	Tube furnace set to 1000
12/9/2012	2:17:17 PM	Helium valve closed
12/9/2012	2:17:17 PM	BCl3 valve closed
12/9/2012	2:17:17 PM	PH3 valve closed
12/9/2012	2:17:17 PM	SiCl4 pre valve closed
12/9/2012	2:17:17 PM	SiCl4 post valve closed
12/9/2012	2:17:17 PM	Main Vac valve closed
12/9/2012	2:17:17 PM	Bypass valve closed
12/9/2012	2:17:17 PM	H2 valve opened
12/9/2012	2:17:17 PM	Bubbler valve opened
12/9/2012	2:17:17 PM	Helium MFC set to  0.000000
12/9/2012	2:17:17 PM	H2 MFC set to  500.000000
12/9/2012	2:17:17 PM	BCl3 MFC set to  0.000000
12/9/2012	2:17:17 PM	PH3 MFC set to  0.000000
12/9/2012	2:17:17 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:17:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:17:17 PM	Tube furnace set to 750
12/9/2012	2:22:17 PM	H2 valve closed
12/9/2012	2:22:17 PM	BCl3 valve closed
12/9/2012	2:22:17 PM	PH3 valve closed
12/9/2012	2:22:17 PM	SiCl4 pre valve closed
12/9/2012	2:22:17 PM	SiCl4 post valve closed
12/9/2012	2:22:17 PM	Main Vac valve closed
12/9/2012	2:22:17 PM	Bypass valve closed
12/9/2012	2:22:17 PM	Helium valve opened
12/9/2012	2:22:17 PM	Bubbler valve opened
12/9/2012	2:22:17 PM	Helium MFC set to  500.000000
12/9/2012	2:22:17 PM	H2 MFC set to  0.000000
12/9/2012	2:22:17 PM	BCl3 MFC set to  0.000000
12/9/2012	2:22:17 PM	PH3 MFC set to  0.000000
12/9/2012	2:22:17 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:22:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:22:18 PM	Tube furnace set to 0
12/9/2012	2:37:18 PM	Helium valve closed
12/9/2012	2:37:18 PM	H2 valve closed
12/9/2012	2:37:18 PM	BCl3 valve closed
12/9/2012	2:37:18 PM	PH3 valve closed
12/9/2012	2:37:18 PM	SiCl4 pre valve closed
12/9/2012	2:37:18 PM	SiCl4 post valve closed
12/9/2012	2:37:18 PM	Main Vac valve closed
12/9/2012	2:37:18 PM	Bypass valve closed
12/9/2012	2:37:18 PM	Bubbler valve closed
12/9/2012	2:37:18 PM	Helium MFC set to  0.000000
12/9/2012	2:37:18 PM	H2 MFC set to  0.000000
12/9/2012	2:37:18 PM	BCl3 MFC set to  0.000000
12/9/2012	2:37:18 PM	PH3 MFC set to  0.000000
12/9/2012	2:37:18 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:37:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:37:18 PM	Tube furnace set to 0
12/9/2012	2:37:19 PM	Run finished at 2:37 PM
12/9/2012	2:37:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	2:37:24 PM	Recipe started at 2:37 PM
12/9/2012	2:37:24 PM	Helium valve closed
12/9/2012	2:37:24 PM	H2 valve closed
12/9/2012	2:37:24 PM	BCl3 valve closed
12/9/2012	2:37:24 PM	PH3 valve closed
12/9/2012	2:37:24 PM	SiCl4 pre valve closed
12/9/2012	2:37:24 PM	SiCl4 post valve closed
12/9/2012	2:37:24 PM	Main Vac valve closed
12/9/2012	2:37:24 PM	Bypass valve closed
12/9/2012	2:37:24 PM	Bubbler valve closed
12/9/2012	2:37:24 PM	Helium MFC set to  0.000000
12/9/2012	2:37:24 PM	H2 MFC set to  0.000000
12/9/2012	2:37:24 PM	BCl3 MFC set to  0.000000
12/9/2012	2:37:24 PM	PH3 MFC set to  0.000000
12/9/2012	2:37:24 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:37:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:37:24 PM	Tube furnace set to 0
12/9/2012	2:37:27 PM	H2 valve closed
12/9/2012	2:37:27 PM	BCl3 valve closed
12/9/2012	2:37:27 PM	PH3 valve closed
12/9/2012	2:37:27 PM	SiCl4 pre valve closed
12/9/2012	2:37:27 PM	SiCl4 post valve closed
12/9/2012	2:37:27 PM	Main Vac valve closed
12/9/2012	2:37:27 PM	Bypass valve closed
12/9/2012	2:37:27 PM	Bubbler valve closed
12/9/2012	2:37:27 PM	Helium valve opened
12/9/2012	2:37:27 PM	Helium MFC set to  500.000000
12/9/2012	2:37:27 PM	H2 MFC set to  0.000000
12/9/2012	2:37:27 PM	BCl3 MFC set to  0.000000
12/9/2012	2:37:27 PM	PH3 MFC set to  0.000000
12/9/2012	2:37:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:37:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:37:27 PM	Tube furnace set to 0
12/9/2012	2:37:27 PM	Helium valve closed
12/9/2012	2:37:27 PM	H2 valve closed
12/9/2012	2:37:27 PM	BCl3 valve closed
12/9/2012	2:37:27 PM	PH3 valve closed
12/9/2012	2:37:27 PM	SiCl4 pre valve closed
12/9/2012	2:37:27 PM	SiCl4 post valve closed
12/9/2012	2:37:27 PM	Main Vac valve closed
12/9/2012	2:37:27 PM	Bypass valve closed
12/9/2012	2:37:27 PM	Bubbler valve closed
12/9/2012	2:37:27 PM	Helium MFC set to  0.000000
12/9/2012	2:37:27 PM	H2 MFC set to  0.000000
12/9/2012	2:37:27 PM	BCl3 MFC set to  0.000000
12/9/2012	2:37:27 PM	PH3 MFC set to  0.000000
12/9/2012	2:37:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:37:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:37:28 PM	Tube furnace set to 0
12/9/2012	2:37:29 PM	Run finished at 2:37 PM
12/9/2012	2:37:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	2:42:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	2:42:10 PM	Recipe started at 2:42 PM
12/9/2012	2:42:10 PM	Helium valve closed
12/9/2012	2:42:10 PM	H2 valve closed
12/9/2012	2:42:10 PM	BCl3 valve closed
12/9/2012	2:42:10 PM	PH3 valve closed
12/9/2012	2:42:10 PM	SiCl4 pre valve closed
12/9/2012	2:42:10 PM	SiCl4 post valve closed
12/9/2012	2:42:10 PM	Main Vac valve closed
12/9/2012	2:42:10 PM	Bubbler valve closed
12/9/2012	2:42:10 PM	Bypass valve opened
12/9/2012	2:42:10 PM	Helium MFC set to  0.000000
12/9/2012	2:42:10 PM	H2 MFC set to  0.000000
12/9/2012	2:42:10 PM	BCl3 MFC set to  0.000000
12/9/2012	2:42:10 PM	PH3 MFC set to  0.000000
12/9/2012	2:42:10 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:42:10 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:42:10 PM	Tube furnace set to 0
12/9/2012	2:43:27 PM	Helium valve closed
12/9/2012	2:43:27 PM	H2 valve closed
12/9/2012	2:43:27 PM	BCl3 valve closed
12/9/2012	2:43:27 PM	PH3 valve closed
12/9/2012	2:43:27 PM	SiCl4 pre valve closed
12/9/2012	2:43:27 PM	SiCl4 post valve closed
12/9/2012	2:43:27 PM	Main Vac valve closed
12/9/2012	2:43:27 PM	Bubbler valve closed
12/9/2012	2:43:27 PM	Bypass valve opened
12/9/2012	2:43:27 PM	Helium MFC set to  0.000000
12/9/2012	2:43:27 PM	H2 MFC set to  0.000000
12/9/2012	2:43:27 PM	BCl3 MFC set to  0.000000
12/9/2012	2:43:27 PM	PH3 MFC set to  0.000000
12/9/2012	2:43:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:43:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:43:27 PM	Tube furnace set to 0
12/9/2012	2:44:27 PM	Helium valve closed
12/9/2012	2:44:27 PM	H2 valve closed
12/9/2012	2:44:27 PM	BCl3 valve closed
12/9/2012	2:44:27 PM	PH3 valve closed
12/9/2012	2:44:27 PM	SiCl4 pre valve closed
12/9/2012	2:44:27 PM	SiCl4 post valve closed
12/9/2012	2:44:27 PM	Bypass valve closed
12/9/2012	2:44:27 PM	Bubbler valve closed
12/9/2012	2:44:27 PM	Main Vac valve opened
12/9/2012	2:44:27 PM	Helium MFC set to  0.000000
12/9/2012	2:44:27 PM	H2 MFC set to  0.000000
12/9/2012	2:44:27 PM	BCl3 MFC set to  0.000000
12/9/2012	2:44:27 PM	PH3 MFC set to  0.000000
12/9/2012	2:44:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:44:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:44:27 PM	Tube furnace set to 0
12/9/2012	2:44:28 PM	Run finished at 2:44 PM
12/9/2012	2:44:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	2:45:55 PM	Recipe started at 2:45 PM
12/9/2012	2:45:55 PM	Helium valve closed
12/9/2012	2:45:55 PM	H2 valve closed
12/9/2012	2:45:55 PM	BCl3 valve closed
12/9/2012	2:45:55 PM	PH3 valve closed
12/9/2012	2:45:55 PM	SiCl4 pre valve closed
12/9/2012	2:45:55 PM	SiCl4 post valve closed
12/9/2012	2:45:55 PM	Bypass valve closed
12/9/2012	2:45:55 PM	Bubbler valve closed
12/9/2012	2:45:55 PM	Main Vac valve opened
12/9/2012	2:45:55 PM	Helium MFC set to  0.000000
12/9/2012	2:45:55 PM	H2 MFC set to  0.000000
12/9/2012	2:45:55 PM	BCl3 MFC set to  0.000000
12/9/2012	2:45:55 PM	PH3 MFC set to  0.000000
12/9/2012	2:45:55 PM	SiCl4 MFC set to  0.000000
12/9/2012	2:45:55 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	2:45:56 PM	Tube furnace set to 150
12/9/2012	4:45:56 PM	H2 valve closed
12/9/2012	4:45:56 PM	BCl3 valve closed
12/9/2012	4:45:56 PM	PH3 valve closed
12/9/2012	4:45:56 PM	SiCl4 pre valve closed
12/9/2012	4:45:56 PM	SiCl4 post valve closed
12/9/2012	4:45:56 PM	Bypass valve closed
12/9/2012	4:45:56 PM	Bubbler valve closed
12/9/2012	4:45:56 PM	Helium valve opened
12/9/2012	4:45:56 PM	Main Vac valve opened
12/9/2012	4:45:56 PM	Helium MFC set to  20.000000
12/9/2012	4:45:56 PM	H2 MFC set to  0.000000
12/9/2012	4:45:56 PM	BCl3 MFC set to  0.000000
12/9/2012	4:45:56 PM	PH3 MFC set to  0.000000
12/9/2012	4:45:56 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:45:56 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:45:56 PM	Tube furnace set to 150
12/9/2012	4:46:26 PM	Helium valve closed
12/9/2012	4:46:26 PM	H2 valve closed
12/9/2012	4:46:26 PM	BCl3 valve closed
12/9/2012	4:46:26 PM	PH3 valve closed
12/9/2012	4:46:26 PM	SiCl4 pre valve closed
12/9/2012	4:46:26 PM	SiCl4 post valve closed
12/9/2012	4:46:26 PM	Bypass valve closed
12/9/2012	4:46:26 PM	Bubbler valve closed
12/9/2012	4:46:26 PM	Main Vac valve opened
12/9/2012	4:46:26 PM	Helium MFC set to  0.000000
12/9/2012	4:46:26 PM	H2 MFC set to  0.000000
12/9/2012	4:46:26 PM	BCl3 MFC set to  0.000000
12/9/2012	4:46:26 PM	PH3 MFC set to  0.000000
12/9/2012	4:46:26 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:46:26 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:46:26 PM	Tube furnace set to 150
12/9/2012	4:46:56 PM	H2 valve closed
12/9/2012	4:46:56 PM	BCl3 valve closed
12/9/2012	4:46:56 PM	PH3 valve closed
12/9/2012	4:46:56 PM	SiCl4 pre valve closed
12/9/2012	4:46:56 PM	SiCl4 post valve closed
12/9/2012	4:46:56 PM	Bypass valve closed
12/9/2012	4:46:56 PM	Bubbler valve closed
12/9/2012	4:46:56 PM	Helium valve opened
12/9/2012	4:46:56 PM	Main Vac valve opened
12/9/2012	4:46:56 PM	Helium MFC set to  20.000000
12/9/2012	4:46:56 PM	H2 MFC set to  0.000000
12/9/2012	4:46:56 PM	BCl3 MFC set to  0.000000
12/9/2012	4:46:56 PM	PH3 MFC set to  0.000000
12/9/2012	4:46:56 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:46:56 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:46:56 PM	Tube furnace set to 150
12/9/2012	4:47:26 PM	Helium valve closed
12/9/2012	4:47:26 PM	H2 valve closed
12/9/2012	4:47:26 PM	BCl3 valve closed
12/9/2012	4:47:26 PM	PH3 valve closed
12/9/2012	4:47:26 PM	SiCl4 pre valve closed
12/9/2012	4:47:26 PM	SiCl4 post valve closed
12/9/2012	4:47:26 PM	Bypass valve closed
12/9/2012	4:47:26 PM	Bubbler valve closed
12/9/2012	4:47:26 PM	Main Vac valve opened
12/9/2012	4:47:26 PM	Helium MFC set to  0.000000
12/9/2012	4:47:26 PM	H2 MFC set to  0.000000
12/9/2012	4:47:26 PM	BCl3 MFC set to  0.000000
12/9/2012	4:47:26 PM	PH3 MFC set to  0.000000
12/9/2012	4:47:26 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:47:26 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:47:27 PM	Tube furnace set to 150
12/9/2012	4:47:57 PM	H2 valve closed
12/9/2012	4:47:57 PM	BCl3 valve closed
12/9/2012	4:47:57 PM	PH3 valve closed
12/9/2012	4:47:57 PM	SiCl4 pre valve closed
12/9/2012	4:47:57 PM	SiCl4 post valve closed
12/9/2012	4:47:57 PM	Bypass valve closed
12/9/2012	4:47:57 PM	Bubbler valve closed
12/9/2012	4:47:57 PM	Helium valve opened
12/9/2012	4:47:57 PM	Main Vac valve opened
12/9/2012	4:47:57 PM	Helium MFC set to  20.000000
12/9/2012	4:47:57 PM	H2 MFC set to  0.000000
12/9/2012	4:47:57 PM	BCl3 MFC set to  0.000000
12/9/2012	4:47:57 PM	PH3 MFC set to  0.000000
12/9/2012	4:47:57 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:47:57 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:47:57 PM	Tube furnace set to 150
12/9/2012	4:48:27 PM	Helium valve closed
12/9/2012	4:48:27 PM	H2 valve closed
12/9/2012	4:48:27 PM	BCl3 valve closed
12/9/2012	4:48:27 PM	PH3 valve closed
12/9/2012	4:48:27 PM	SiCl4 pre valve closed
12/9/2012	4:48:27 PM	SiCl4 post valve closed
12/9/2012	4:48:27 PM	Bypass valve closed
12/9/2012	4:48:27 PM	Bubbler valve closed
12/9/2012	4:48:27 PM	Main Vac valve opened
12/9/2012	4:48:27 PM	Helium MFC set to  0.000000
12/9/2012	4:48:27 PM	H2 MFC set to  0.000000
12/9/2012	4:48:27 PM	BCl3 MFC set to  0.000000
12/9/2012	4:48:27 PM	PH3 MFC set to  0.000000
12/9/2012	4:48:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:48:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:48:27 PM	Tube furnace set to 150
12/9/2012	4:48:57 PM	H2 valve closed
12/9/2012	4:48:57 PM	BCl3 valve closed
12/9/2012	4:48:57 PM	PH3 valve closed
12/9/2012	4:48:57 PM	SiCl4 pre valve closed
12/9/2012	4:48:57 PM	SiCl4 post valve closed
12/9/2012	4:48:57 PM	Bypass valve closed
12/9/2012	4:48:57 PM	Bubbler valve closed
12/9/2012	4:48:57 PM	Helium valve opened
12/9/2012	4:48:57 PM	Main Vac valve opened
12/9/2012	4:48:57 PM	Helium MFC set to  20.000000
12/9/2012	4:48:57 PM	H2 MFC set to  0.000000
12/9/2012	4:48:57 PM	BCl3 MFC set to  0.000000
12/9/2012	4:48:57 PM	PH3 MFC set to  0.000000
12/9/2012	4:48:57 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:48:57 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:48:57 PM	Tube furnace set to 150
12/9/2012	4:49:27 PM	Helium valve closed
12/9/2012	4:49:27 PM	H2 valve closed
12/9/2012	4:49:27 PM	BCl3 valve closed
12/9/2012	4:49:27 PM	PH3 valve closed
12/9/2012	4:49:27 PM	SiCl4 pre valve closed
12/9/2012	4:49:27 PM	SiCl4 post valve closed
12/9/2012	4:49:27 PM	Bypass valve closed
12/9/2012	4:49:27 PM	Bubbler valve closed
12/9/2012	4:49:27 PM	Main Vac valve opened
12/9/2012	4:49:27 PM	Helium MFC set to  0.000000
12/9/2012	4:49:27 PM	H2 MFC set to  0.000000
12/9/2012	4:49:27 PM	BCl3 MFC set to  0.000000
12/9/2012	4:49:27 PM	PH3 MFC set to  0.000000
12/9/2012	4:49:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:49:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:49:27 PM	Tube furnace set to 150
12/9/2012	4:49:57 PM	H2 valve closed
12/9/2012	4:49:57 PM	BCl3 valve closed
12/9/2012	4:49:57 PM	PH3 valve closed
12/9/2012	4:49:57 PM	SiCl4 pre valve closed
12/9/2012	4:49:57 PM	SiCl4 post valve closed
12/9/2012	4:49:57 PM	Bypass valve closed
12/9/2012	4:49:58 PM	Bubbler valve closed
12/9/2012	4:49:58 PM	Helium valve opened
12/9/2012	4:49:58 PM	Main Vac valve opened
12/9/2012	4:49:58 PM	Helium MFC set to  20.000000
12/9/2012	4:49:58 PM	H2 MFC set to  0.000000
12/9/2012	4:49:58 PM	BCl3 MFC set to  0.000000
12/9/2012	4:49:58 PM	PH3 MFC set to  0.000000
12/9/2012	4:49:58 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:49:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:49:58 PM	Tube furnace set to 150
12/9/2012	4:50:28 PM	Helium valve closed
12/9/2012	4:50:28 PM	H2 valve closed
12/9/2012	4:50:28 PM	BCl3 valve closed
12/9/2012	4:50:28 PM	PH3 valve closed
12/9/2012	4:50:28 PM	SiCl4 pre valve closed
12/9/2012	4:50:28 PM	SiCl4 post valve closed
12/9/2012	4:50:28 PM	Bypass valve closed
12/9/2012	4:50:28 PM	Bubbler valve closed
12/9/2012	4:50:28 PM	Main Vac valve opened
12/9/2012	4:50:28 PM	Helium MFC set to  0.000000
12/9/2012	4:50:28 PM	H2 MFC set to  0.000000
12/9/2012	4:50:28 PM	BCl3 MFC set to  0.000000
12/9/2012	4:50:28 PM	PH3 MFC set to  0.000000
12/9/2012	4:50:28 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:50:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:50:28 PM	Tube furnace set to 150
12/9/2012	4:50:58 PM	H2 valve closed
12/9/2012	4:50:58 PM	BCl3 valve closed
12/9/2012	4:50:58 PM	PH3 valve closed
12/9/2012	4:50:58 PM	SiCl4 pre valve closed
12/9/2012	4:50:58 PM	SiCl4 post valve closed
12/9/2012	4:50:58 PM	Bypass valve closed
12/9/2012	4:50:58 PM	Bubbler valve closed
12/9/2012	4:50:58 PM	Helium valve opened
12/9/2012	4:50:58 PM	Main Vac valve opened
12/9/2012	4:50:58 PM	Helium MFC set to  20.000000
12/9/2012	4:50:58 PM	H2 MFC set to  0.000000
12/9/2012	4:50:58 PM	BCl3 MFC set to  0.000000
12/9/2012	4:50:58 PM	PH3 MFC set to  0.000000
12/9/2012	4:50:58 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:50:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:50:58 PM	Tube furnace set to 150
12/9/2012	4:51:28 PM	Helium valve closed
12/9/2012	4:51:28 PM	H2 valve closed
12/9/2012	4:51:28 PM	BCl3 valve closed
12/9/2012	4:51:28 PM	PH3 valve closed
12/9/2012	4:51:28 PM	SiCl4 pre valve closed
12/9/2012	4:51:28 PM	SiCl4 post valve closed
12/9/2012	4:51:28 PM	Bypass valve closed
12/9/2012	4:51:28 PM	Bubbler valve closed
12/9/2012	4:51:28 PM	Main Vac valve opened
12/9/2012	4:51:28 PM	Helium MFC set to  0.000000
12/9/2012	4:51:28 PM	H2 MFC set to  0.000000
12/9/2012	4:51:28 PM	BCl3 MFC set to  0.000000
12/9/2012	4:51:28 PM	PH3 MFC set to  0.000000
12/9/2012	4:51:28 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:51:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:51:28 PM	Tube furnace set to 150
12/9/2012	4:51:58 PM	H2 valve closed
12/9/2012	4:51:58 PM	BCl3 valve closed
12/9/2012	4:51:58 PM	PH3 valve closed
12/9/2012	4:51:58 PM	SiCl4 pre valve closed
12/9/2012	4:51:58 PM	SiCl4 post valve closed
12/9/2012	4:51:58 PM	Bypass valve closed
12/9/2012	4:51:58 PM	Bubbler valve closed
12/9/2012	4:51:58 PM	Helium valve opened
12/9/2012	4:51:58 PM	Main Vac valve opened
12/9/2012	4:51:58 PM	Helium MFC set to  20.000000
12/9/2012	4:51:58 PM	H2 MFC set to  0.000000
12/9/2012	4:51:58 PM	BCl3 MFC set to  0.000000
12/9/2012	4:51:58 PM	PH3 MFC set to  0.000000
12/9/2012	4:51:58 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:51:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:51:59 PM	Tube furnace set to 150
12/9/2012	4:52:29 PM	Helium valve closed
12/9/2012	4:52:29 PM	H2 valve closed
12/9/2012	4:52:29 PM	BCl3 valve closed
12/9/2012	4:52:29 PM	PH3 valve closed
12/9/2012	4:52:29 PM	SiCl4 pre valve closed
12/9/2012	4:52:29 PM	SiCl4 post valve closed
12/9/2012	4:52:29 PM	Bypass valve closed
12/9/2012	4:52:29 PM	Bubbler valve closed
12/9/2012	4:52:29 PM	Main Vac valve opened
12/9/2012	4:52:29 PM	Helium MFC set to  0.000000
12/9/2012	4:52:29 PM	H2 MFC set to  0.000000
12/9/2012	4:52:29 PM	BCl3 MFC set to  0.000000
12/9/2012	4:52:29 PM	PH3 MFC set to  0.000000
12/9/2012	4:52:29 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:52:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:52:29 PM	Tube furnace set to 150
12/9/2012	4:52:59 PM	H2 valve closed
12/9/2012	4:52:59 PM	BCl3 valve closed
12/9/2012	4:52:59 PM	PH3 valve closed
12/9/2012	4:52:59 PM	SiCl4 pre valve closed
12/9/2012	4:52:59 PM	SiCl4 post valve closed
12/9/2012	4:52:59 PM	Bypass valve closed
12/9/2012	4:52:59 PM	Bubbler valve closed
12/9/2012	4:52:59 PM	Helium valve opened
12/9/2012	4:52:59 PM	Main Vac valve opened
12/9/2012	4:52:59 PM	Helium MFC set to  20.000000
12/9/2012	4:52:59 PM	H2 MFC set to  0.000000
12/9/2012	4:52:59 PM	BCl3 MFC set to  0.000000
12/9/2012	4:52:59 PM	PH3 MFC set to  0.000000
12/9/2012	4:52:59 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:52:59 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:52:59 PM	Tube furnace set to 150
12/9/2012	4:53:29 PM	Helium valve closed
12/9/2012	4:53:29 PM	H2 valve closed
12/9/2012	4:53:29 PM	BCl3 valve closed
12/9/2012	4:53:29 PM	PH3 valve closed
12/9/2012	4:53:29 PM	SiCl4 pre valve closed
12/9/2012	4:53:29 PM	SiCl4 post valve closed
12/9/2012	4:53:29 PM	Bypass valve closed
12/9/2012	4:53:29 PM	Bubbler valve closed
12/9/2012	4:53:29 PM	Main Vac valve opened
12/9/2012	4:53:29 PM	Helium MFC set to  0.000000
12/9/2012	4:53:29 PM	H2 MFC set to  0.000000
12/9/2012	4:53:29 PM	BCl3 MFC set to  0.000000
12/9/2012	4:53:29 PM	PH3 MFC set to  0.000000
12/9/2012	4:53:29 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:53:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:53:29 PM	Tube furnace set to 150
12/9/2012	4:53:59 PM	H2 valve closed
12/9/2012	4:53:59 PM	BCl3 valve closed
12/9/2012	4:53:59 PM	PH3 valve closed
12/9/2012	4:53:59 PM	SiCl4 pre valve closed
12/9/2012	4:53:59 PM	SiCl4 post valve closed
12/9/2012	4:53:59 PM	Bypass valve closed
12/9/2012	4:53:59 PM	Bubbler valve closed
12/9/2012	4:53:59 PM	Helium valve opened
12/9/2012	4:53:59 PM	Main Vac valve opened
12/9/2012	4:53:59 PM	Helium MFC set to  20.000000
12/9/2012	4:53:59 PM	H2 MFC set to  0.000000
12/9/2012	4:53:59 PM	BCl3 MFC set to  0.000000
12/9/2012	4:53:59 PM	PH3 MFC set to  0.000000
12/9/2012	4:53:59 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:53:59 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:54:00 PM	Tube furnace set to 150
12/9/2012	4:54:30 PM	Helium valve closed
12/9/2012	4:54:30 PM	H2 valve closed
12/9/2012	4:54:30 PM	BCl3 valve closed
12/9/2012	4:54:30 PM	PH3 valve closed
12/9/2012	4:54:30 PM	SiCl4 pre valve closed
12/9/2012	4:54:30 PM	SiCl4 post valve closed
12/9/2012	4:54:30 PM	Bypass valve closed
12/9/2012	4:54:30 PM	Bubbler valve closed
12/9/2012	4:54:30 PM	Main Vac valve opened
12/9/2012	4:54:30 PM	Helium MFC set to  0.000000
12/9/2012	4:54:30 PM	H2 MFC set to  0.000000
12/9/2012	4:54:30 PM	BCl3 MFC set to  0.000000
12/9/2012	4:54:30 PM	PH3 MFC set to  0.000000
12/9/2012	4:54:30 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:54:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:54:30 PM	Tube furnace set to 150
12/9/2012	4:55:00 PM	H2 valve closed
12/9/2012	4:55:00 PM	BCl3 valve closed
12/9/2012	4:55:00 PM	PH3 valve closed
12/9/2012	4:55:00 PM	SiCl4 pre valve closed
12/9/2012	4:55:00 PM	SiCl4 post valve closed
12/9/2012	4:55:00 PM	Bypass valve closed
12/9/2012	4:55:00 PM	Bubbler valve closed
12/9/2012	4:55:00 PM	Helium valve opened
12/9/2012	4:55:00 PM	Main Vac valve opened
12/9/2012	4:55:00 PM	Helium MFC set to  20.000000
12/9/2012	4:55:00 PM	H2 MFC set to  0.000000
12/9/2012	4:55:00 PM	BCl3 MFC set to  0.000000
12/9/2012	4:55:00 PM	PH3 MFC set to  0.000000
12/9/2012	4:55:00 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:55:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:55:00 PM	Tube furnace set to 150
12/9/2012	4:55:30 PM	Helium valve closed
12/9/2012	4:55:30 PM	H2 valve closed
12/9/2012	4:55:30 PM	BCl3 valve closed
12/9/2012	4:55:30 PM	PH3 valve closed
12/9/2012	4:55:30 PM	SiCl4 pre valve closed
12/9/2012	4:55:30 PM	SiCl4 post valve closed
12/9/2012	4:55:30 PM	Bypass valve closed
12/9/2012	4:55:30 PM	Bubbler valve closed
12/9/2012	4:55:30 PM	Main Vac valve opened
12/9/2012	4:55:30 PM	Helium MFC set to  0.000000
12/9/2012	4:55:30 PM	H2 MFC set to  0.000000
12/9/2012	4:55:30 PM	BCl3 MFC set to  0.000000
12/9/2012	4:55:30 PM	PH3 MFC set to  0.000000
12/9/2012	4:55:30 PM	SiCl4 MFC set to  0.000000
12/9/2012	4:55:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	4:55:30 PM	Tube furnace set to 150
12/9/2012	4:55:31 PM	Run finished at 4:55 PM
12/9/2012	5:02:17 PM	Main Vac valve closed
12/9/2012	5:02:28 PM	Main Vac valve opened
12/9/2012	5:03:25 PM	Recipe started at 5:03 PM
12/9/2012	5:03:25 PM	Helium valve closed
12/9/2012	5:03:25 PM	H2 valve closed
12/9/2012	5:03:25 PM	BCl3 valve closed
12/9/2012	5:03:25 PM	PH3 valve closed
12/9/2012	5:03:25 PM	SiCl4 pre valve closed
12/9/2012	5:03:25 PM	SiCl4 post valve closed
12/9/2012	5:03:25 PM	Main Vac valve closed
12/9/2012	5:03:25 PM	Bypass valve closed
12/9/2012	5:03:25 PM	Bubbler valve closed
12/9/2012	5:03:25 PM	Helium MFC set to  0.000000
12/9/2012	5:03:25 PM	H2 MFC set to  0.000000
12/9/2012	5:03:25 PM	BCl3 MFC set to  0.000000
12/9/2012	5:03:25 PM	PH3 MFC set to  0.000000
12/9/2012	5:03:25 PM	SiCl4 MFC set to  0.000000
12/9/2012	5:03:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	5:03:25 PM	Tube furnace set to 0
12/9/2012	5:03:28 PM	Helium valve closed
12/9/2012	5:03:28 PM	BCl3 valve closed
12/9/2012	5:03:28 PM	PH3 valve closed
12/9/2012	5:03:28 PM	SiCl4 pre valve closed
12/9/2012	5:03:28 PM	SiCl4 post valve closed
12/9/2012	5:03:28 PM	Main Vac valve closed
12/9/2012	5:03:28 PM	Bypass valve closed
12/9/2012	5:03:28 PM	Bubbler valve closed
12/9/2012	5:03:28 PM	H2 valve opened
12/9/2012	5:03:28 PM	Helium MFC set to  0.000000
12/9/2012	5:03:28 PM	H2 MFC set to  500.000000
12/9/2012	5:03:28 PM	BCl3 MFC set to  0.000000
12/9/2012	5:03:28 PM	PH3 MFC set to  0.000000
12/9/2012	5:03:28 PM	SiCl4 MFC set to  0.000000
12/9/2012	5:03:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	5:03:28 PM	Tube furnace set to 0
12/9/2012	5:04:41 PM	Helium valve closed
12/9/2012	5:04:41 PM	BCl3 valve closed
12/9/2012	5:04:41 PM	PH3 valve closed
12/9/2012	5:04:41 PM	SiCl4 pre valve closed
12/9/2012	5:04:41 PM	SiCl4 post valve closed
12/9/2012	5:04:41 PM	Main Vac valve closed
12/9/2012	5:04:41 PM	Bypass valve closed
12/9/2012	5:04:41 PM	H2 valve opened
12/9/2012	5:04:41 PM	Bubbler valve opened
12/9/2012	5:04:41 PM	Helium MFC set to  0.000000
12/9/2012	5:04:41 PM	H2 MFC set to  500.000000
12/9/2012	5:04:41 PM	BCl3 MFC set to  0.000000
12/9/2012	5:04:41 PM	PH3 MFC set to  0.000000
12/9/2012	5:04:41 PM	SiCl4 MFC set to  0.000000
12/9/2012	5:04:41 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	5:04:41 PM	Tube furnace set to 0
12/9/2012	5:04:42 PM	Helium valve closed
12/9/2012	5:04:42 PM	BCl3 valve closed
12/9/2012	5:04:42 PM	PH3 valve closed
12/9/2012	5:04:42 PM	SiCl4 pre valve closed
12/9/2012	5:04:42 PM	SiCl4 post valve closed
12/9/2012	5:04:42 PM	Main Vac valve closed
12/9/2012	5:04:42 PM	Bypass valve closed
12/9/2012	5:04:42 PM	H2 valve opened
12/9/2012	5:04:42 PM	Bubbler valve opened
12/9/2012	5:04:42 PM	Helium MFC set to  0.000000
12/9/2012	5:04:42 PM	H2 MFC set to  450.000000
12/9/2012	5:04:42 PM	BCl3 MFC set to  0.000000
12/9/2012	5:04:42 PM	PH3 MFC set to  0.000000
12/9/2012	5:04:42 PM	SiCl4 MFC set to  0.000000
12/9/2012	5:04:42 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	5:04:42 PM	Tube furnace set to 1000
12/9/2012	5:29:42 PM	Helium valve closed
12/9/2012	5:29:42 PM	PH3 valve closed
12/9/2012	5:29:42 PM	Main Vac valve closed
12/9/2012	5:29:42 PM	Bypass valve closed
12/9/2012	5:29:42 PM	H2 valve opened
12/9/2012	5:29:42 PM	BCl3 valve opened
12/9/2012	5:29:42 PM	SiCl4 pre valve opened
12/9/2012	5:29:42 PM	SiCl4 post valve opened
12/9/2012	5:29:42 PM	Bubbler valve opened
12/9/2012	5:29:42 PM	Helium MFC set to  0.000000
12/9/2012	5:29:42 PM	H2 MFC set to  450.000000
12/9/2012	5:29:42 PM	BCl3 MFC set to  1.500000
12/9/2012	5:29:42 PM	PH3 MFC set to  0.000000
12/9/2012	5:29:42 PM	SiCl4 MFC set to  50.000000
12/9/2012	5:29:42 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	5:29:42 PM	Tube furnace set to 1000
12/9/2012	5:34:42 PM	Helium valve closed
12/9/2012	5:34:42 PM	BCl3 valve closed
12/9/2012	5:34:42 PM	PH3 valve closed
12/9/2012	5:34:42 PM	SiCl4 pre valve closed
12/9/2012	5:34:42 PM	SiCl4 post valve closed
12/9/2012	5:34:42 PM	Main Vac valve closed
12/9/2012	5:34:42 PM	Bypass valve closed
12/9/2012	5:34:42 PM	H2 valve opened
12/9/2012	5:34:42 PM	Bubbler valve opened
12/9/2012	5:34:42 PM	Helium MFC set to  0.000000
12/9/2012	5:34:42 PM	H2 MFC set to  500.000000
12/9/2012	5:34:42 PM	BCl3 MFC set to  0.000000
12/9/2012	5:34:42 PM	PH3 MFC set to  0.000000
12/9/2012	5:34:42 PM	SiCl4 MFC set to  0.000000
12/9/2012	5:34:42 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	5:34:43 PM	Tube furnace set to 750
12/9/2012	5:39:43 PM	H2 valve closed
12/9/2012	5:39:43 PM	BCl3 valve closed
12/9/2012	5:39:43 PM	PH3 valve closed
12/9/2012	5:39:43 PM	SiCl4 pre valve closed
12/9/2012	5:39:43 PM	SiCl4 post valve closed
12/9/2012	5:39:43 PM	Main Vac valve closed
12/9/2012	5:39:43 PM	Bypass valve closed
12/9/2012	5:39:43 PM	Helium valve opened
12/9/2012	5:39:43 PM	Bubbler valve opened
12/9/2012	5:39:43 PM	Helium MFC set to  500.000000
12/9/2012	5:39:43 PM	H2 MFC set to  0.000000
12/9/2012	5:39:43 PM	BCl3 MFC set to  0.000000
12/9/2012	5:39:43 PM	PH3 MFC set to  0.000000
12/9/2012	5:39:43 PM	SiCl4 MFC set to  0.000000
12/9/2012	5:39:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	5:39:43 PM	Tube furnace set to 0
12/9/2012	5:59:43 PM	Helium valve closed
12/9/2012	5:59:43 PM	H2 valve closed
12/9/2012	5:59:43 PM	BCl3 valve closed
12/9/2012	5:59:43 PM	PH3 valve closed
12/9/2012	5:59:43 PM	SiCl4 pre valve closed
12/9/2012	5:59:43 PM	SiCl4 post valve closed
12/9/2012	5:59:43 PM	Main Vac valve closed
12/9/2012	5:59:43 PM	Bypass valve closed
12/9/2012	5:59:43 PM	Bubbler valve closed
12/9/2012	5:59:43 PM	Helium MFC set to  0.000000
12/9/2012	5:59:43 PM	H2 MFC set to  0.000000
12/9/2012	5:59:43 PM	BCl3 MFC set to  0.000000
12/9/2012	5:59:43 PM	PH3 MFC set to  0.000000
12/9/2012	5:59:43 PM	SiCl4 MFC set to  0.000000
12/9/2012	5:59:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	5:59:43 PM	Tube furnace set to 0
12/9/2012	5:59:44 PM	Run finished at 5:59 PM
12/9/2012	6:51:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	6:51:37 PM	Recipe started at 6:51 PM
12/9/2012	6:51:37 PM	Helium valve closed
12/9/2012	6:51:37 PM	H2 valve closed
12/9/2012	6:51:37 PM	BCl3 valve closed
12/9/2012	6:51:37 PM	PH3 valve closed
12/9/2012	6:51:37 PM	SiCl4 pre valve closed
12/9/2012	6:51:37 PM	SiCl4 post valve closed
12/9/2012	6:51:37 PM	Main Vac valve closed
12/9/2012	6:51:37 PM	Bypass valve closed
12/9/2012	6:51:37 PM	Bubbler valve closed
12/9/2012	6:51:37 PM	Helium MFC set to  0.000000
12/9/2012	6:51:37 PM	H2 MFC set to  0.000000
12/9/2012	6:51:37 PM	BCl3 MFC set to  0.000000
12/9/2012	6:51:37 PM	PH3 MFC set to  0.000000
12/9/2012	6:51:37 PM	SiCl4 MFC set to  0.000000
12/9/2012	6:51:37 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:51:37 PM	Tube furnace set to 0
12/9/2012	6:51:40 PM	H2 valve closed
12/9/2012	6:51:40 PM	BCl3 valve closed
12/9/2012	6:51:40 PM	PH3 valve closed
12/9/2012	6:51:40 PM	SiCl4 pre valve closed
12/9/2012	6:51:40 PM	SiCl4 post valve closed
12/9/2012	6:51:40 PM	Main Vac valve closed
12/9/2012	6:51:40 PM	Bypass valve closed
12/9/2012	6:51:40 PM	Bubbler valve closed
12/9/2012	6:51:40 PM	Helium valve opened
12/9/2012	6:51:40 PM	Helium MFC set to  500.000000
12/9/2012	6:51:40 PM	H2 MFC set to  0.000000
12/9/2012	6:51:40 PM	BCl3 MFC set to  0.000000
12/9/2012	6:51:40 PM	PH3 MFC set to  0.000000
12/9/2012	6:51:40 PM	SiCl4 MFC set to  0.000000
12/9/2012	6:51:40 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:51:40 PM	Tube furnace set to 0
12/9/2012	6:51:42 PM	Helium valve closed
12/9/2012	6:51:42 PM	H2 valve closed
12/9/2012	6:51:42 PM	BCl3 valve closed
12/9/2012	6:51:42 PM	PH3 valve closed
12/9/2012	6:51:42 PM	SiCl4 pre valve closed
12/9/2012	6:51:42 PM	SiCl4 post valve closed
12/9/2012	6:51:42 PM	Main Vac valve closed
12/9/2012	6:51:42 PM	Bypass valve closed
12/9/2012	6:51:42 PM	Bubbler valve closed
12/9/2012	6:51:43 PM	Helium MFC set to  0.000000
12/9/2012	6:51:43 PM	H2 MFC set to  0.000000
12/9/2012	6:51:43 PM	BCl3 MFC set to  0.000000
12/9/2012	6:51:43 PM	PH3 MFC set to  0.000000
12/9/2012	6:51:43 PM	SiCl4 MFC set to  0.000000
12/9/2012	6:51:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:51:43 PM	Tube furnace set to 0
12/9/2012	6:51:44 PM	Run finished at 6:51 PM
12/9/2012	6:51:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	6:57:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	6:57:45 PM	Recipe started at 6:57 PM
12/9/2012	6:57:45 PM	Helium valve closed
12/9/2012	6:57:45 PM	H2 valve closed
12/9/2012	6:57:45 PM	BCl3 valve closed
12/9/2012	6:57:45 PM	PH3 valve closed
12/9/2012	6:57:45 PM	SiCl4 pre valve closed
12/9/2012	6:57:45 PM	SiCl4 post valve closed
12/9/2012	6:57:45 PM	Main Vac valve closed
12/9/2012	6:57:45 PM	Bubbler valve closed
12/9/2012	6:57:45 PM	Bypass valve opened
12/9/2012	6:57:45 PM	Helium MFC set to  0.000000
12/9/2012	6:57:45 PM	H2 MFC set to  0.000000
12/9/2012	6:57:45 PM	BCl3 MFC set to  0.000000
12/9/2012	6:57:45 PM	PH3 MFC set to  0.000000
12/9/2012	6:57:45 PM	SiCl4 MFC set to  0.000000
12/9/2012	6:57:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:57:46 PM	Tube furnace set to 0
12/9/2012	6:59:09 PM	Helium valve closed
12/9/2012	6:59:09 PM	H2 valve closed
12/9/2012	6:59:09 PM	BCl3 valve closed
12/9/2012	6:59:09 PM	PH3 valve closed
12/9/2012	6:59:09 PM	SiCl4 pre valve closed
12/9/2012	6:59:09 PM	SiCl4 post valve closed
12/9/2012	6:59:09 PM	Main Vac valve closed
12/9/2012	6:59:09 PM	Bubbler valve closed
12/9/2012	6:59:09 PM	Bypass valve opened
12/9/2012	6:59:09 PM	Helium MFC set to  0.000000
12/9/2012	6:59:09 PM	H2 MFC set to  0.000000
12/9/2012	6:59:09 PM	BCl3 MFC set to  0.000000
12/9/2012	6:59:09 PM	PH3 MFC set to  0.000000
12/9/2012	6:59:09 PM	SiCl4 MFC set to  0.000000
12/9/2012	6:59:09 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	6:59:09 PM	Tube furnace set to 0
12/9/2012	7:00:09 PM	Helium valve closed
12/9/2012	7:00:09 PM	H2 valve closed
12/9/2012	7:00:09 PM	BCl3 valve closed
12/9/2012	7:00:09 PM	PH3 valve closed
12/9/2012	7:00:09 PM	SiCl4 pre valve closed
12/9/2012	7:00:09 PM	SiCl4 post valve closed
12/9/2012	7:00:09 PM	Bypass valve closed
12/9/2012	7:00:09 PM	Bubbler valve closed
12/9/2012	7:00:09 PM	Main Vac valve opened
12/9/2012	7:00:09 PM	Helium MFC set to  0.000000
12/9/2012	7:00:09 PM	H2 MFC set to  0.000000
12/9/2012	7:00:09 PM	BCl3 MFC set to  0.000000
12/9/2012	7:00:09 PM	PH3 MFC set to  0.000000
12/9/2012	7:00:09 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:00:09 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:00:09 PM	Tube furnace set to 0
12/9/2012	7:00:10 PM	Run finished at 7:00 PM
12/9/2012	7:00:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	7:04:02 PM	Tube furnace set to 150
12/9/2012	7:06:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/9/2012	7:06:58 PM	Recipe started at 7:06 PM
12/9/2012	7:06:58 PM	Helium valve closed
12/9/2012	7:06:58 PM	H2 valve closed
12/9/2012	7:06:58 PM	BCl3 valve closed
12/9/2012	7:06:58 PM	PH3 valve closed
12/9/2012	7:06:58 PM	SiCl4 pre valve closed
12/9/2012	7:06:58 PM	SiCl4 post valve closed
12/9/2012	7:06:58 PM	Main Vac valve closed
12/9/2012	7:06:58 PM	Bubbler valve closed
12/9/2012	7:06:58 PM	Bypass valve opened
12/9/2012	7:06:58 PM	Helium MFC set to  0.000000
12/9/2012	7:06:58 PM	H2 MFC set to  0.000000
12/9/2012	7:06:58 PM	BCl3 MFC set to  0.000000
12/9/2012	7:06:58 PM	PH3 MFC set to  0.000000
12/9/2012	7:06:58 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:06:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:06:58 PM	Tube furnace set to 0
12/9/2012	7:06:59 PM	Helium valve closed
12/9/2012	7:06:59 PM	H2 valve closed
12/9/2012	7:06:59 PM	BCl3 valve closed
12/9/2012	7:06:59 PM	PH3 valve closed
12/9/2012	7:06:59 PM	SiCl4 pre valve closed
12/9/2012	7:06:59 PM	SiCl4 post valve closed
12/9/2012	7:06:59 PM	Main Vac valve closed
12/9/2012	7:06:59 PM	Bubbler valve closed
12/9/2012	7:06:59 PM	Bypass valve opened
12/9/2012	7:06:59 PM	Helium MFC set to  0.000000
12/9/2012	7:06:59 PM	H2 MFC set to  0.000000
12/9/2012	7:06:59 PM	BCl3 MFC set to  0.000000
12/9/2012	7:06:59 PM	PH3 MFC set to  0.000000
12/9/2012	7:06:59 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:06:59 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:06:59 PM	Tube furnace set to 0
12/9/2012	7:07:29 PM	Helium valve closed
12/9/2012	7:07:29 PM	H2 valve closed
12/9/2012	7:07:29 PM	BCl3 valve closed
12/9/2012	7:07:29 PM	PH3 valve closed
12/9/2012	7:07:29 PM	SiCl4 pre valve closed
12/9/2012	7:07:29 PM	SiCl4 post valve closed
12/9/2012	7:07:29 PM	Bypass valve closed
12/9/2012	7:07:29 PM	Bubbler valve closed
12/9/2012	7:07:29 PM	Main Vac valve opened
12/9/2012	7:07:29 PM	Helium MFC set to  0.000000
12/9/2012	7:07:29 PM	H2 MFC set to  0.000000
12/9/2012	7:07:29 PM	BCl3 MFC set to  0.000000
12/9/2012	7:07:29 PM	PH3 MFC set to  0.000000
12/9/2012	7:07:29 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:07:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:07:29 PM	Tube furnace set to 0
12/9/2012	7:07:59 PM	H2 valve closed
12/9/2012	7:07:59 PM	BCl3 valve closed
12/9/2012	7:07:59 PM	PH3 valve closed
12/9/2012	7:07:59 PM	SiCl4 pre valve closed
12/9/2012	7:07:59 PM	SiCl4 post valve closed
12/9/2012	7:07:59 PM	Bypass valve closed
12/9/2012	7:07:59 PM	Bubbler valve closed
12/9/2012	7:07:59 PM	Helium valve opened
12/9/2012	7:07:59 PM	Main Vac valve opened
12/9/2012	7:07:59 PM	Helium MFC set to  20.000000
12/9/2012	7:07:59 PM	H2 MFC set to  0.000000
12/9/2012	7:07:59 PM	BCl3 MFC set to  0.000000
12/9/2012	7:07:59 PM	PH3 MFC set to  0.000000
12/9/2012	7:07:59 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:07:59 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:07:59 PM	Tube furnace set to 0
12/9/2012	7:08:29 PM	Helium valve closed
12/9/2012	7:08:29 PM	H2 valve closed
12/9/2012	7:08:29 PM	BCl3 valve closed
12/9/2012	7:08:29 PM	PH3 valve closed
12/9/2012	7:08:29 PM	SiCl4 pre valve closed
12/9/2012	7:08:29 PM	SiCl4 post valve closed
12/9/2012	7:08:29 PM	Bypass valve closed
12/9/2012	7:08:29 PM	Bubbler valve closed
12/9/2012	7:08:29 PM	Main Vac valve opened
12/9/2012	7:08:29 PM	Helium MFC set to  0.000000
12/9/2012	7:08:29 PM	H2 MFC set to  0.000000
12/9/2012	7:08:29 PM	BCl3 MFC set to  0.000000
12/9/2012	7:08:29 PM	PH3 MFC set to  0.000000
12/9/2012	7:08:29 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:08:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:08:30 PM	Tube furnace set to 0
12/9/2012	7:09:00 PM	H2 valve closed
12/9/2012	7:09:00 PM	BCl3 valve closed
12/9/2012	7:09:00 PM	PH3 valve closed
12/9/2012	7:09:00 PM	SiCl4 pre valve closed
12/9/2012	7:09:00 PM	SiCl4 post valve closed
12/9/2012	7:09:00 PM	Bypass valve closed
12/9/2012	7:09:00 PM	Bubbler valve closed
12/9/2012	7:09:00 PM	Helium valve opened
12/9/2012	7:09:00 PM	Main Vac valve opened
12/9/2012	7:09:00 PM	Helium MFC set to  20.000000
12/9/2012	7:09:00 PM	H2 MFC set to  0.000000
12/9/2012	7:09:00 PM	BCl3 MFC set to  0.000000
12/9/2012	7:09:00 PM	PH3 MFC set to  0.000000
12/9/2012	7:09:00 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:09:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:09:00 PM	Tube furnace set to 0
12/9/2012	7:09:30 PM	Helium valve closed
12/9/2012	7:09:30 PM	H2 valve closed
12/9/2012	7:09:30 PM	BCl3 valve closed
12/9/2012	7:09:30 PM	PH3 valve closed
12/9/2012	7:09:30 PM	SiCl4 pre valve closed
12/9/2012	7:09:30 PM	SiCl4 post valve closed
12/9/2012	7:09:30 PM	Bypass valve closed
12/9/2012	7:09:30 PM	Bubbler valve closed
12/9/2012	7:09:30 PM	Main Vac valve opened
12/9/2012	7:09:30 PM	Helium MFC set to  0.000000
12/9/2012	7:09:30 PM	H2 MFC set to  0.000000
12/9/2012	7:09:30 PM	BCl3 MFC set to  0.000000
12/9/2012	7:09:30 PM	PH3 MFC set to  0.000000
12/9/2012	7:09:30 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:09:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:09:30 PM	Tube furnace set to 0
12/9/2012	7:10:00 PM	H2 valve closed
12/9/2012	7:10:00 PM	BCl3 valve closed
12/9/2012	7:10:00 PM	PH3 valve closed
12/9/2012	7:10:00 PM	SiCl4 pre valve closed
12/9/2012	7:10:00 PM	SiCl4 post valve closed
12/9/2012	7:10:00 PM	Bypass valve closed
12/9/2012	7:10:00 PM	Bubbler valve closed
12/9/2012	7:10:00 PM	Helium valve opened
12/9/2012	7:10:00 PM	Main Vac valve opened
12/9/2012	7:10:00 PM	Helium MFC set to  20.000000
12/9/2012	7:10:00 PM	H2 MFC set to  0.000000
12/9/2012	7:10:00 PM	BCl3 MFC set to  0.000000
12/9/2012	7:10:00 PM	PH3 MFC set to  0.000000
12/9/2012	7:10:00 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:10:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:10:00 PM	Tube furnace set to 0
12/9/2012	7:10:30 PM	Helium valve closed
12/9/2012	7:10:30 PM	H2 valve closed
12/9/2012	7:10:30 PM	BCl3 valve closed
12/9/2012	7:10:30 PM	PH3 valve closed
12/9/2012	7:10:30 PM	SiCl4 pre valve closed
12/9/2012	7:10:30 PM	SiCl4 post valve closed
12/9/2012	7:10:30 PM	Bypass valve closed
12/9/2012	7:10:30 PM	Bubbler valve closed
12/9/2012	7:10:30 PM	Main Vac valve opened
12/9/2012	7:10:30 PM	Helium MFC set to  0.000000
12/9/2012	7:10:30 PM	H2 MFC set to  0.000000
12/9/2012	7:10:30 PM	BCl3 MFC set to  0.000000
12/9/2012	7:10:30 PM	PH3 MFC set to  0.000000
12/9/2012	7:10:30 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:10:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:10:30 PM	Tube furnace set to 0
12/9/2012	7:11:00 PM	H2 valve closed
12/9/2012	7:11:00 PM	BCl3 valve closed
12/9/2012	7:11:00 PM	PH3 valve closed
12/9/2012	7:11:01 PM	SiCl4 pre valve closed
12/9/2012	7:11:01 PM	SiCl4 post valve closed
12/9/2012	7:11:01 PM	Bypass valve closed
12/9/2012	7:11:01 PM	Bubbler valve closed
12/9/2012	7:11:01 PM	Helium valve opened
12/9/2012	7:11:01 PM	Main Vac valve opened
12/9/2012	7:11:01 PM	Helium MFC set to  20.000000
12/9/2012	7:11:01 PM	H2 MFC set to  0.000000
12/9/2012	7:11:01 PM	BCl3 MFC set to  0.000000
12/9/2012	7:11:01 PM	PH3 MFC set to  0.000000
12/9/2012	7:11:01 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:11:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:11:01 PM	Tube furnace set to 0
12/9/2012	7:11:31 PM	Helium valve closed
12/9/2012	7:11:31 PM	H2 valve closed
12/9/2012	7:11:31 PM	BCl3 valve closed
12/9/2012	7:11:31 PM	PH3 valve closed
12/9/2012	7:11:31 PM	SiCl4 pre valve closed
12/9/2012	7:11:31 PM	SiCl4 post valve closed
12/9/2012	7:11:31 PM	Bypass valve closed
12/9/2012	7:11:31 PM	Bubbler valve closed
12/9/2012	7:11:31 PM	Main Vac valve opened
12/9/2012	7:11:31 PM	Helium MFC set to  0.000000
12/9/2012	7:11:31 PM	H2 MFC set to  0.000000
12/9/2012	7:11:31 PM	BCl3 MFC set to  0.000000
12/9/2012	7:11:31 PM	PH3 MFC set to  0.000000
12/9/2012	7:11:31 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:11:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:11:31 PM	Tube furnace set to 0
12/9/2012	7:12:01 PM	H2 valve closed
12/9/2012	7:12:01 PM	BCl3 valve closed
12/9/2012	7:12:01 PM	PH3 valve closed
12/9/2012	7:12:01 PM	SiCl4 pre valve closed
12/9/2012	7:12:01 PM	SiCl4 post valve closed
12/9/2012	7:12:01 PM	Bypass valve closed
12/9/2012	7:12:01 PM	Bubbler valve closed
12/9/2012	7:12:01 PM	Helium valve opened
12/9/2012	7:12:01 PM	Main Vac valve opened
12/9/2012	7:12:01 PM	Helium MFC set to  20.000000
12/9/2012	7:12:01 PM	H2 MFC set to  0.000000
12/9/2012	7:12:01 PM	BCl3 MFC set to  0.000000
12/9/2012	7:12:01 PM	PH3 MFC set to  0.000000
12/9/2012	7:12:01 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:12:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:12:01 PM	Tube furnace set to 0
12/9/2012	7:12:31 PM	Helium valve closed
12/9/2012	7:12:31 PM	H2 valve closed
12/9/2012	7:12:31 PM	BCl3 valve closed
12/9/2012	7:12:31 PM	PH3 valve closed
12/9/2012	7:12:31 PM	SiCl4 pre valve closed
12/9/2012	7:12:31 PM	SiCl4 post valve closed
12/9/2012	7:12:31 PM	Bypass valve closed
12/9/2012	7:12:31 PM	Bubbler valve closed
12/9/2012	7:12:31 PM	Main Vac valve opened
12/9/2012	7:12:31 PM	Helium MFC set to  0.000000
12/9/2012	7:12:31 PM	H2 MFC set to  0.000000
12/9/2012	7:12:31 PM	BCl3 MFC set to  0.000000
12/9/2012	7:12:31 PM	PH3 MFC set to  0.000000
12/9/2012	7:12:31 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:12:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:12:31 PM	Tube furnace set to 0
12/9/2012	7:13:01 PM	H2 valve closed
12/9/2012	7:13:01 PM	BCl3 valve closed
12/9/2012	7:13:01 PM	PH3 valve closed
12/9/2012	7:13:01 PM	SiCl4 pre valve closed
12/9/2012	7:13:01 PM	SiCl4 post valve closed
12/9/2012	7:13:01 PM	Bypass valve closed
12/9/2012	7:13:01 PM	Bubbler valve closed
12/9/2012	7:13:01 PM	Helium valve opened
12/9/2012	7:13:01 PM	Main Vac valve opened
12/9/2012	7:13:01 PM	Helium MFC set to  20.000000
12/9/2012	7:13:01 PM	H2 MFC set to  0.000000
12/9/2012	7:13:01 PM	BCl3 MFC set to  0.000000
12/9/2012	7:13:02 PM	PH3 MFC set to  0.000000
12/9/2012	7:13:02 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:13:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:13:02 PM	Tube furnace set to 0
12/9/2012	7:13:32 PM	Helium valve closed
12/9/2012	7:13:32 PM	H2 valve closed
12/9/2012	7:13:32 PM	BCl3 valve closed
12/9/2012	7:13:32 PM	PH3 valve closed
12/9/2012	7:13:32 PM	SiCl4 pre valve closed
12/9/2012	7:13:32 PM	SiCl4 post valve closed
12/9/2012	7:13:32 PM	Bypass valve closed
12/9/2012	7:13:32 PM	Bubbler valve closed
12/9/2012	7:13:32 PM	Main Vac valve opened
12/9/2012	7:13:32 PM	Helium MFC set to  0.000000
12/9/2012	7:13:32 PM	H2 MFC set to  0.000000
12/9/2012	7:13:32 PM	BCl3 MFC set to  0.000000
12/9/2012	7:13:32 PM	PH3 MFC set to  0.000000
12/9/2012	7:13:32 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:13:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:13:32 PM	Tube furnace set to 0
12/9/2012	7:14:02 PM	H2 valve closed
12/9/2012	7:14:02 PM	BCl3 valve closed
12/9/2012	7:14:02 PM	PH3 valve closed
12/9/2012	7:14:02 PM	SiCl4 pre valve closed
12/9/2012	7:14:02 PM	SiCl4 post valve closed
12/9/2012	7:14:02 PM	Bypass valve closed
12/9/2012	7:14:02 PM	Bubbler valve closed
12/9/2012	7:14:02 PM	Helium valve opened
12/9/2012	7:14:02 PM	Main Vac valve opened
12/9/2012	7:14:02 PM	Helium MFC set to  20.000000
12/9/2012	7:14:02 PM	H2 MFC set to  0.000000
12/9/2012	7:14:02 PM	BCl3 MFC set to  0.000000
12/9/2012	7:14:02 PM	PH3 MFC set to  0.000000
12/9/2012	7:14:02 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:14:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:14:02 PM	Tube furnace set to 0
12/9/2012	7:14:32 PM	Helium valve closed
12/9/2012	7:14:32 PM	H2 valve closed
12/9/2012	7:14:32 PM	BCl3 valve closed
12/9/2012	7:14:32 PM	PH3 valve closed
12/9/2012	7:14:32 PM	SiCl4 pre valve closed
12/9/2012	7:14:32 PM	SiCl4 post valve closed
12/9/2012	7:14:32 PM	Bypass valve closed
12/9/2012	7:14:32 PM	Bubbler valve closed
12/9/2012	7:14:32 PM	Main Vac valve opened
12/9/2012	7:14:32 PM	Helium MFC set to  0.000000
12/9/2012	7:14:32 PM	H2 MFC set to  0.000000
12/9/2012	7:14:32 PM	BCl3 MFC set to  0.000000
12/9/2012	7:14:32 PM	PH3 MFC set to  0.000000
12/9/2012	7:14:32 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:14:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:14:32 PM	Tube furnace set to 0
12/9/2012	7:15:02 PM	H2 valve closed
12/9/2012	7:15:02 PM	BCl3 valve closed
12/9/2012	7:15:02 PM	PH3 valve closed
12/9/2012	7:15:02 PM	SiCl4 pre valve closed
12/9/2012	7:15:02 PM	SiCl4 post valve closed
12/9/2012	7:15:02 PM	Bypass valve closed
12/9/2012	7:15:02 PM	Bubbler valve closed
12/9/2012	7:15:02 PM	Helium valve opened
12/9/2012	7:15:02 PM	Main Vac valve opened
12/9/2012	7:15:02 PM	Helium MFC set to  20.000000
12/9/2012	7:15:02 PM	H2 MFC set to  0.000000
12/9/2012	7:15:02 PM	BCl3 MFC set to  0.000000
12/9/2012	7:15:02 PM	PH3 MFC set to  0.000000
12/9/2012	7:15:02 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:15:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:15:03 PM	Tube furnace set to 0
12/9/2012	7:15:33 PM	Helium valve closed
12/9/2012	7:15:33 PM	H2 valve closed
12/9/2012	7:15:33 PM	BCl3 valve closed
12/9/2012	7:15:33 PM	PH3 valve closed
12/9/2012	7:15:33 PM	SiCl4 pre valve closed
12/9/2012	7:15:33 PM	SiCl4 post valve closed
12/9/2012	7:15:33 PM	Bypass valve closed
12/9/2012	7:15:33 PM	Bubbler valve closed
12/9/2012	7:15:33 PM	Main Vac valve opened
12/9/2012	7:15:33 PM	Helium MFC set to  0.000000
12/9/2012	7:15:33 PM	H2 MFC set to  0.000000
12/9/2012	7:15:33 PM	BCl3 MFC set to  0.000000
12/9/2012	7:15:33 PM	PH3 MFC set to  0.000000
12/9/2012	7:15:33 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:15:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:15:33 PM	Tube furnace set to 0
12/9/2012	7:16:03 PM	H2 valve closed
12/9/2012	7:16:03 PM	BCl3 valve closed
12/9/2012	7:16:03 PM	PH3 valve closed
12/9/2012	7:16:03 PM	SiCl4 pre valve closed
12/9/2012	7:16:03 PM	SiCl4 post valve closed
12/9/2012	7:16:03 PM	Bypass valve closed
12/9/2012	7:16:03 PM	Bubbler valve closed
12/9/2012	7:16:03 PM	Helium valve opened
12/9/2012	7:16:03 PM	Main Vac valve opened
12/9/2012	7:16:03 PM	Helium MFC set to  20.000000
12/9/2012	7:16:03 PM	H2 MFC set to  0.000000
12/9/2012	7:16:03 PM	BCl3 MFC set to  0.000000
12/9/2012	7:16:03 PM	PH3 MFC set to  0.000000
12/9/2012	7:16:03 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:16:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:16:03 PM	Tube furnace set to 0
12/9/2012	7:16:33 PM	Helium valve closed
12/9/2012	7:16:33 PM	H2 valve closed
12/9/2012	7:16:33 PM	BCl3 valve closed
12/9/2012	7:16:33 PM	PH3 valve closed
12/9/2012	7:16:33 PM	SiCl4 pre valve closed
12/9/2012	7:16:33 PM	SiCl4 post valve closed
12/9/2012	7:16:33 PM	Bypass valve closed
12/9/2012	7:16:33 PM	Bubbler valve closed
12/9/2012	7:16:33 PM	Main Vac valve opened
12/9/2012	7:16:33 PM	Helium MFC set to  0.000000
12/9/2012	7:16:33 PM	H2 MFC set to  0.000000
12/9/2012	7:16:33 PM	BCl3 MFC set to  0.000000
12/9/2012	7:16:33 PM	PH3 MFC set to  0.000000
12/9/2012	7:16:33 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:16:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:16:33 PM	Tube furnace set to 0
12/9/2012	7:17:03 PM	H2 valve closed
12/9/2012	7:17:03 PM	BCl3 valve closed
12/9/2012	7:17:03 PM	PH3 valve closed
12/9/2012	7:17:03 PM	SiCl4 pre valve closed
12/9/2012	7:17:03 PM	SiCl4 post valve closed
12/9/2012	7:17:03 PM	Bypass valve closed
12/9/2012	7:17:03 PM	Bubbler valve closed
12/9/2012	7:17:03 PM	Helium valve opened
12/9/2012	7:17:03 PM	Main Vac valve opened
12/9/2012	7:17:03 PM	Helium MFC set to  20.000000
12/9/2012	7:17:03 PM	H2 MFC set to  0.000000
12/9/2012	7:17:03 PM	BCl3 MFC set to  0.000000
12/9/2012	7:17:03 PM	PH3 MFC set to  0.000000
12/9/2012	7:17:03 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:17:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:17:04 PM	Tube furnace set to 0
12/9/2012	7:17:34 PM	Helium valve closed
12/9/2012	7:17:34 PM	H2 valve closed
12/9/2012	7:17:34 PM	BCl3 valve closed
12/9/2012	7:17:34 PM	PH3 valve closed
12/9/2012	7:17:34 PM	SiCl4 pre valve closed
12/9/2012	7:17:34 PM	SiCl4 post valve closed
12/9/2012	7:17:34 PM	Bypass valve closed
12/9/2012	7:17:34 PM	Bubbler valve closed
12/9/2012	7:17:34 PM	Main Vac valve opened
12/9/2012	7:17:34 PM	Helium MFC set to  0.000000
12/9/2012	7:17:34 PM	H2 MFC set to  0.000000
12/9/2012	7:17:34 PM	BCl3 MFC set to  0.000000
12/9/2012	7:17:34 PM	PH3 MFC set to  0.000000
12/9/2012	7:17:34 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:17:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:17:34 PM	Tube furnace set to 0
12/9/2012	7:17:35 PM	Run finished at 7:17 PM
12/9/2012	7:17:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/9/2012	7:22:27 PM	Tube furnace set to 150
12/9/2012	7:22:51 PM	Recipe started at 7:22 PM
12/9/2012	7:22:51 PM	Helium valve closed
12/9/2012	7:22:51 PM	H2 valve closed
12/9/2012	7:22:51 PM	BCl3 valve closed
12/9/2012	7:22:51 PM	PH3 valve closed
12/9/2012	7:22:51 PM	SiCl4 pre valve closed
12/9/2012	7:22:51 PM	SiCl4 post valve closed
12/9/2012	7:22:51 PM	Bypass valve closed
12/9/2012	7:22:51 PM	Bubbler valve closed
12/9/2012	7:22:51 PM	Main Vac valve opened
12/9/2012	7:22:51 PM	Helium MFC set to  0.000000
12/9/2012	7:22:51 PM	H2 MFC set to  0.000000
12/9/2012	7:22:51 PM	BCl3 MFC set to  0.000000
12/9/2012	7:22:51 PM	PH3 MFC set to  0.000000
12/9/2012	7:22:51 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:22:51 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:22:51 PM	Tube furnace set to 150
12/9/2012	7:22:54 PM	H2 valve closed
12/9/2012	7:22:54 PM	BCl3 valve closed
12/9/2012	7:22:54 PM	PH3 valve closed
12/9/2012	7:22:54 PM	SiCl4 pre valve closed
12/9/2012	7:22:54 PM	SiCl4 post valve closed
12/9/2012	7:22:54 PM	Bypass valve closed
12/9/2012	7:22:54 PM	Bubbler valve closed
12/9/2012	7:22:54 PM	Helium valve opened
12/9/2012	7:22:54 PM	Main Vac valve opened
12/9/2012	7:22:54 PM	Helium MFC set to  20.000000
12/9/2012	7:22:54 PM	H2 MFC set to  0.000000
12/9/2012	7:22:54 PM	BCl3 MFC set to  0.000000
12/9/2012	7:22:54 PM	PH3 MFC set to  0.000000
12/9/2012	7:22:54 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:22:54 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:22:54 PM	Tube furnace set to 150
12/9/2012	7:23:24 PM	Helium valve closed
12/9/2012	7:23:25 PM	H2 valve closed
12/9/2012	7:23:25 PM	BCl3 valve closed
12/9/2012	7:23:25 PM	PH3 valve closed
12/9/2012	7:23:25 PM	SiCl4 pre valve closed
12/9/2012	7:23:25 PM	SiCl4 post valve closed
12/9/2012	7:23:25 PM	Bypass valve closed
12/9/2012	7:23:25 PM	Bubbler valve closed
12/9/2012	7:23:25 PM	Main Vac valve opened
12/9/2012	7:23:25 PM	Helium MFC set to  0.000000
12/9/2012	7:23:25 PM	H2 MFC set to  0.000000
12/9/2012	7:23:25 PM	BCl3 MFC set to  0.000000
12/9/2012	7:23:25 PM	PH3 MFC set to  0.000000
12/9/2012	7:23:25 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:23:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:23:25 PM	Tube furnace set to 150
12/9/2012	7:23:55 PM	H2 valve closed
12/9/2012	7:23:55 PM	BCl3 valve closed
12/9/2012	7:23:55 PM	PH3 valve closed
12/9/2012	7:23:55 PM	SiCl4 pre valve closed
12/9/2012	7:23:55 PM	SiCl4 post valve closed
12/9/2012	7:23:55 PM	Bypass valve closed
12/9/2012	7:23:55 PM	Bubbler valve closed
12/9/2012	7:23:55 PM	Helium valve opened
12/9/2012	7:23:55 PM	Main Vac valve opened
12/9/2012	7:23:55 PM	Helium MFC set to  20.000000
12/9/2012	7:23:55 PM	H2 MFC set to  0.000000
12/9/2012	7:23:55 PM	BCl3 MFC set to  0.000000
12/9/2012	7:23:55 PM	PH3 MFC set to  0.000000
12/9/2012	7:23:55 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:23:55 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:23:55 PM	Tube furnace set to 150
12/9/2012	7:24:25 PM	Helium valve closed
12/9/2012	7:24:25 PM	H2 valve closed
12/9/2012	7:24:25 PM	BCl3 valve closed
12/9/2012	7:24:25 PM	PH3 valve closed
12/9/2012	7:24:25 PM	SiCl4 pre valve closed
12/9/2012	7:24:25 PM	SiCl4 post valve closed
12/9/2012	7:24:25 PM	Bypass valve closed
12/9/2012	7:24:25 PM	Bubbler valve closed
12/9/2012	7:24:25 PM	Main Vac valve opened
12/9/2012	7:24:25 PM	Helium MFC set to  0.000000
12/9/2012	7:24:25 PM	H2 MFC set to  0.000000
12/9/2012	7:24:25 PM	BCl3 MFC set to  0.000000
12/9/2012	7:24:25 PM	PH3 MFC set to  0.000000
12/9/2012	7:24:25 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:24:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:24:25 PM	Tube furnace set to 150
12/9/2012	7:24:55 PM	H2 valve closed
12/9/2012	7:24:55 PM	BCl3 valve closed
12/9/2012	7:24:55 PM	PH3 valve closed
12/9/2012	7:24:55 PM	SiCl4 pre valve closed
12/9/2012	7:24:55 PM	SiCl4 post valve closed
12/9/2012	7:24:55 PM	Bypass valve closed
12/9/2012	7:24:55 PM	Bubbler valve closed
12/9/2012	7:24:55 PM	Helium valve opened
12/9/2012	7:24:55 PM	Main Vac valve opened
12/9/2012	7:24:55 PM	Helium MFC set to  20.000000
12/9/2012	7:24:55 PM	H2 MFC set to  0.000000
12/9/2012	7:24:55 PM	BCl3 MFC set to  0.000000
12/9/2012	7:24:55 PM	PH3 MFC set to  0.000000
12/9/2012	7:24:55 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:24:55 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:24:55 PM	Tube furnace set to 150
12/9/2012	7:25:25 PM	Helium valve closed
12/9/2012	7:25:25 PM	H2 valve closed
12/9/2012	7:25:25 PM	BCl3 valve closed
12/9/2012	7:25:25 PM	PH3 valve closed
12/9/2012	7:25:26 PM	SiCl4 pre valve closed
12/9/2012	7:25:26 PM	SiCl4 post valve closed
12/9/2012	7:25:26 PM	Bypass valve closed
12/9/2012	7:25:26 PM	Bubbler valve closed
12/9/2012	7:25:26 PM	Main Vac valve opened
12/9/2012	7:25:26 PM	Helium MFC set to  0.000000
12/9/2012	7:25:26 PM	H2 MFC set to  0.000000
12/9/2012	7:25:26 PM	BCl3 MFC set to  0.000000
12/9/2012	7:25:26 PM	PH3 MFC set to  0.000000
12/9/2012	7:25:26 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:25:26 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:25:26 PM	Tube furnace set to 150
12/9/2012	7:25:56 PM	H2 valve closed
12/9/2012	7:25:56 PM	BCl3 valve closed
12/9/2012	7:25:56 PM	PH3 valve closed
12/9/2012	7:25:56 PM	SiCl4 pre valve closed
12/9/2012	7:25:56 PM	SiCl4 post valve closed
12/9/2012	7:25:56 PM	Bypass valve closed
12/9/2012	7:25:56 PM	Bubbler valve closed
12/9/2012	7:25:56 PM	Helium valve opened
12/9/2012	7:25:56 PM	Main Vac valve opened
12/9/2012	7:25:56 PM	Helium MFC set to  20.000000
12/9/2012	7:25:56 PM	H2 MFC set to  0.000000
12/9/2012	7:25:56 PM	BCl3 MFC set to  0.000000
12/9/2012	7:25:56 PM	PH3 MFC set to  0.000000
12/9/2012	7:25:56 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:25:56 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:25:56 PM	Tube furnace set to 150
12/9/2012	7:26:26 PM	Helium valve closed
12/9/2012	7:26:26 PM	H2 valve closed
12/9/2012	7:26:26 PM	BCl3 valve closed
12/9/2012	7:26:26 PM	PH3 valve closed
12/9/2012	7:26:26 PM	SiCl4 pre valve closed
12/9/2012	7:26:26 PM	SiCl4 post valve closed
12/9/2012	7:26:26 PM	Bypass valve closed
12/9/2012	7:26:26 PM	Bubbler valve closed
12/9/2012	7:26:26 PM	Main Vac valve opened
12/9/2012	7:26:26 PM	Helium MFC set to  0.000000
12/9/2012	7:26:26 PM	H2 MFC set to  0.000000
12/9/2012	7:26:26 PM	BCl3 MFC set to  0.000000
12/9/2012	7:26:26 PM	PH3 MFC set to  0.000000
12/9/2012	7:26:26 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:26:26 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:26:26 PM	Tube furnace set to 150
12/9/2012	7:26:56 PM	H2 valve closed
12/9/2012	7:26:56 PM	BCl3 valve closed
12/9/2012	7:26:56 PM	PH3 valve closed
12/9/2012	7:26:56 PM	SiCl4 pre valve closed
12/9/2012	7:26:56 PM	SiCl4 post valve closed
12/9/2012	7:26:56 PM	Bypass valve closed
12/9/2012	7:26:56 PM	Bubbler valve closed
12/9/2012	7:26:56 PM	Helium valve opened
12/9/2012	7:26:56 PM	Main Vac valve opened
12/9/2012	7:26:56 PM	Helium MFC set to  20.000000
12/9/2012	7:26:56 PM	H2 MFC set to  0.000000
12/9/2012	7:26:56 PM	BCl3 MFC set to  0.000000
12/9/2012	7:26:56 PM	PH3 MFC set to  0.000000
12/9/2012	7:26:56 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:26:56 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:26:56 PM	Tube furnace set to 150
12/9/2012	7:27:26 PM	Helium valve closed
12/9/2012	7:27:26 PM	H2 valve closed
12/9/2012	7:27:26 PM	BCl3 valve closed
12/9/2012	7:27:26 PM	PH3 valve closed
12/9/2012	7:27:26 PM	SiCl4 pre valve closed
12/9/2012	7:27:26 PM	SiCl4 post valve closed
12/9/2012	7:27:26 PM	Bypass valve closed
12/9/2012	7:27:26 PM	Bubbler valve closed
12/9/2012	7:27:27 PM	Main Vac valve opened
12/9/2012	7:27:27 PM	Helium MFC set to  0.000000
12/9/2012	7:27:27 PM	H2 MFC set to  0.000000
12/9/2012	7:27:27 PM	BCl3 MFC set to  0.000000
12/9/2012	7:27:27 PM	PH3 MFC set to  0.000000
12/9/2012	7:27:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:27:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:27:27 PM	Tube furnace set to 150
12/9/2012	7:27:57 PM	H2 valve closed
12/9/2012	7:27:57 PM	BCl3 valve closed
12/9/2012	7:27:57 PM	PH3 valve closed
12/9/2012	7:27:57 PM	SiCl4 pre valve closed
12/9/2012	7:27:57 PM	SiCl4 post valve closed
12/9/2012	7:27:57 PM	Bypass valve closed
12/9/2012	7:27:57 PM	Bubbler valve closed
12/9/2012	7:27:57 PM	Helium valve opened
12/9/2012	7:27:57 PM	Main Vac valve opened
12/9/2012	7:27:57 PM	Helium MFC set to  20.000000
12/9/2012	7:27:57 PM	H2 MFC set to  0.000000
12/9/2012	7:27:57 PM	BCl3 MFC set to  0.000000
12/9/2012	7:27:57 PM	PH3 MFC set to  0.000000
12/9/2012	7:27:57 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:27:57 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:27:57 PM	Tube furnace set to 150
12/9/2012	7:28:27 PM	Helium valve closed
12/9/2012	7:28:27 PM	H2 valve closed
12/9/2012	7:28:27 PM	BCl3 valve closed
12/9/2012	7:28:27 PM	PH3 valve closed
12/9/2012	7:28:27 PM	SiCl4 pre valve closed
12/9/2012	7:28:27 PM	SiCl4 post valve closed
12/9/2012	7:28:27 PM	Bypass valve closed
12/9/2012	7:28:27 PM	Bubbler valve closed
12/9/2012	7:28:27 PM	Main Vac valve opened
12/9/2012	7:28:27 PM	Helium MFC set to  0.000000
12/9/2012	7:28:27 PM	H2 MFC set to  0.000000
12/9/2012	7:28:27 PM	BCl3 MFC set to  0.000000
12/9/2012	7:28:27 PM	PH3 MFC set to  0.000000
12/9/2012	7:28:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:28:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:28:27 PM	Tube furnace set to 150
12/9/2012	7:28:57 PM	H2 valve closed
12/9/2012	7:28:57 PM	BCl3 valve closed
12/9/2012	7:28:57 PM	PH3 valve closed
12/9/2012	7:28:57 PM	SiCl4 pre valve closed
12/9/2012	7:28:57 PM	SiCl4 post valve closed
12/9/2012	7:28:57 PM	Bypass valve closed
12/9/2012	7:28:57 PM	Bubbler valve closed
12/9/2012	7:28:57 PM	Helium valve opened
12/9/2012	7:28:57 PM	Main Vac valve opened
12/9/2012	7:28:57 PM	Helium MFC set to  20.000000
12/9/2012	7:28:57 PM	H2 MFC set to  0.000000
12/9/2012	7:28:57 PM	BCl3 MFC set to  0.000000
12/9/2012	7:28:57 PM	PH3 MFC set to  0.000000
12/9/2012	7:28:57 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:28:57 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:28:57 PM	Tube furnace set to 150
12/9/2012	7:29:27 PM	Helium valve closed
12/9/2012	7:29:27 PM	H2 valve closed
12/9/2012	7:29:27 PM	BCl3 valve closed
12/9/2012	7:29:27 PM	PH3 valve closed
12/9/2012	7:29:27 PM	SiCl4 pre valve closed
12/9/2012	7:29:27 PM	SiCl4 post valve closed
12/9/2012	7:29:27 PM	Bypass valve closed
12/9/2012	7:29:27 PM	Bubbler valve closed
12/9/2012	7:29:27 PM	Main Vac valve opened
12/9/2012	7:29:27 PM	Helium MFC set to  0.000000
12/9/2012	7:29:27 PM	H2 MFC set to  0.000000
12/9/2012	7:29:27 PM	BCl3 MFC set to  0.000000
12/9/2012	7:29:27 PM	PH3 MFC set to  0.000000
12/9/2012	7:29:28 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:29:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:29:28 PM	Tube furnace set to 150
12/9/2012	7:29:58 PM	H2 valve closed
12/9/2012	7:29:58 PM	BCl3 valve closed
12/9/2012	7:29:58 PM	PH3 valve closed
12/9/2012	7:29:58 PM	SiCl4 pre valve closed
12/9/2012	7:29:58 PM	SiCl4 post valve closed
12/9/2012	7:29:58 PM	Bypass valve closed
12/9/2012	7:29:58 PM	Bubbler valve closed
12/9/2012	7:29:58 PM	Helium valve opened
12/9/2012	7:29:58 PM	Main Vac valve opened
12/9/2012	7:29:58 PM	Helium MFC set to  20.000000
12/9/2012	7:29:58 PM	H2 MFC set to  0.000000
12/9/2012	7:29:58 PM	BCl3 MFC set to  0.000000
12/9/2012	7:29:58 PM	PH3 MFC set to  0.000000
12/9/2012	7:29:58 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:29:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:29:58 PM	Tube furnace set to 150
12/9/2012	7:30:28 PM	Helium valve closed
12/9/2012	7:30:28 PM	H2 valve closed
12/9/2012	7:30:28 PM	BCl3 valve closed
12/9/2012	7:30:28 PM	PH3 valve closed
12/9/2012	7:30:28 PM	SiCl4 pre valve closed
12/9/2012	7:30:28 PM	SiCl4 post valve closed
12/9/2012	7:30:28 PM	Bypass valve closed
12/9/2012	7:30:28 PM	Bubbler valve closed
12/9/2012	7:30:28 PM	Main Vac valve opened
12/9/2012	7:30:28 PM	Helium MFC set to  0.000000
12/9/2012	7:30:28 PM	H2 MFC set to  0.000000
12/9/2012	7:30:28 PM	BCl3 MFC set to  0.000000
12/9/2012	7:30:28 PM	PH3 MFC set to  0.000000
12/9/2012	7:30:28 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:30:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:30:28 PM	Tube furnace set to 150
12/9/2012	7:30:58 PM	H2 valve closed
12/9/2012	7:30:58 PM	BCl3 valve closed
12/9/2012	7:30:58 PM	PH3 valve closed
12/9/2012	7:30:58 PM	SiCl4 pre valve closed
12/9/2012	7:30:58 PM	SiCl4 post valve closed
12/9/2012	7:30:58 PM	Bypass valve closed
12/9/2012	7:30:58 PM	Bubbler valve closed
12/9/2012	7:30:58 PM	Helium valve opened
12/9/2012	7:30:58 PM	Main Vac valve opened
12/9/2012	7:30:58 PM	Helium MFC set to  20.000000
12/9/2012	7:30:58 PM	H2 MFC set to  0.000000
12/9/2012	7:30:58 PM	BCl3 MFC set to  0.000000
12/9/2012	7:30:58 PM	PH3 MFC set to  0.000000
12/9/2012	7:30:58 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:30:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:30:58 PM	Tube furnace set to 150
12/9/2012	7:31:28 PM	Helium valve closed
12/9/2012	7:31:28 PM	H2 valve closed
12/9/2012	7:31:28 PM	BCl3 valve closed
12/9/2012	7:31:28 PM	PH3 valve closed
12/9/2012	7:31:28 PM	SiCl4 pre valve closed
12/9/2012	7:31:28 PM	SiCl4 post valve closed
12/9/2012	7:31:28 PM	Bypass valve closed
12/9/2012	7:31:28 PM	Bubbler valve closed
12/9/2012	7:31:28 PM	Main Vac valve opened
12/9/2012	7:31:28 PM	Helium MFC set to  0.000000
12/9/2012	7:31:28 PM	H2 MFC set to  0.000000
12/9/2012	7:31:28 PM	BCl3 MFC set to  0.000000
12/9/2012	7:31:28 PM	PH3 MFC set to  0.000000
12/9/2012	7:31:28 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:31:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:31:29 PM	Tube furnace set to 150
12/9/2012	7:31:59 PM	H2 valve closed
12/9/2012	7:31:59 PM	BCl3 valve closed
12/9/2012	7:31:59 PM	PH3 valve closed
12/9/2012	7:31:59 PM	SiCl4 pre valve closed
12/9/2012	7:31:59 PM	SiCl4 post valve closed
12/9/2012	7:31:59 PM	Bypass valve closed
12/9/2012	7:31:59 PM	Bubbler valve closed
12/9/2012	7:31:59 PM	Helium valve opened
12/9/2012	7:31:59 PM	Main Vac valve opened
12/9/2012	7:31:59 PM	Helium MFC set to  20.000000
12/9/2012	7:31:59 PM	H2 MFC set to  0.000000
12/9/2012	7:31:59 PM	BCl3 MFC set to  0.000000
12/9/2012	7:31:59 PM	PH3 MFC set to  0.000000
12/9/2012	7:31:59 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:31:59 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:31:59 PM	Tube furnace set to 150
12/9/2012	7:32:29 PM	Helium valve closed
12/9/2012	7:32:29 PM	H2 valve closed
12/9/2012	7:32:29 PM	BCl3 valve closed
12/9/2012	7:32:29 PM	PH3 valve closed
12/9/2012	7:32:29 PM	SiCl4 pre valve closed
12/9/2012	7:32:29 PM	SiCl4 post valve closed
12/9/2012	7:32:29 PM	Bypass valve closed
12/9/2012	7:32:29 PM	Bubbler valve closed
12/9/2012	7:32:29 PM	Main Vac valve opened
12/9/2012	7:32:29 PM	Helium MFC set to  0.000000
12/9/2012	7:32:29 PM	H2 MFC set to  0.000000
12/9/2012	7:32:29 PM	BCl3 MFC set to  0.000000
12/9/2012	7:32:29 PM	PH3 MFC set to  0.000000
12/9/2012	7:32:29 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:32:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:32:29 PM	Tube furnace set to 150
12/9/2012	7:32:30 PM	Run finished at 7:32 PM
12/9/2012	7:33:55 PM	Recipe started at 7:33 PM
12/9/2012	7:33:55 PM	Helium valve closed
12/9/2012	7:33:55 PM	H2 valve closed
12/9/2012	7:33:55 PM	BCl3 valve closed
12/9/2012	7:33:55 PM	PH3 valve closed
12/9/2012	7:33:55 PM	SiCl4 pre valve closed
12/9/2012	7:33:55 PM	SiCl4 post valve closed
12/9/2012	7:33:55 PM	Bypass valve closed
12/9/2012	7:33:55 PM	Bubbler valve closed
12/9/2012	7:33:55 PM	Main Vac valve opened
12/9/2012	7:33:55 PM	Helium MFC set to  0.000000
12/9/2012	7:33:55 PM	H2 MFC set to  0.000000
12/9/2012	7:33:55 PM	BCl3 MFC set to  0.000000
12/9/2012	7:33:55 PM	PH3 MFC set to  0.000000
12/9/2012	7:33:55 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:33:55 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:33:55 PM	Tube furnace set to 150
12/9/2012	7:34:25 PM	H2 valve closed
12/9/2012	7:34:25 PM	BCl3 valve closed
12/9/2012	7:34:25 PM	PH3 valve closed
12/9/2012	7:34:25 PM	SiCl4 pre valve closed
12/9/2012	7:34:25 PM	SiCl4 post valve closed
12/9/2012	7:34:25 PM	Bypass valve closed
12/9/2012	7:34:25 PM	Bubbler valve closed
12/9/2012	7:34:25 PM	Helium valve opened
12/9/2012	7:34:25 PM	Main Vac valve opened
12/9/2012	7:34:25 PM	Helium MFC set to  20.000000
12/9/2012	7:34:25 PM	H2 MFC set to  0.000000
12/9/2012	7:34:25 PM	BCl3 MFC set to  0.000000
12/9/2012	7:34:25 PM	PH3 MFC set to  0.000000
12/9/2012	7:34:25 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:34:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:34:25 PM	Tube furnace set to 150
12/9/2012	7:34:55 PM	Helium valve closed
12/9/2012	7:34:55 PM	H2 valve closed
12/9/2012	7:34:55 PM	BCl3 valve closed
12/9/2012	7:34:55 PM	PH3 valve closed
12/9/2012	7:34:55 PM	SiCl4 pre valve closed
12/9/2012	7:34:55 PM	SiCl4 post valve closed
12/9/2012	7:34:55 PM	Bypass valve closed
12/9/2012	7:34:55 PM	Bubbler valve closed
12/9/2012	7:34:55 PM	Main Vac valve opened
12/9/2012	7:34:55 PM	Helium MFC set to  0.000000
12/9/2012	7:34:55 PM	H2 MFC set to  0.000000
12/9/2012	7:34:55 PM	BCl3 MFC set to  0.000000
12/9/2012	7:34:55 PM	PH3 MFC set to  0.000000
12/9/2012	7:34:55 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:34:55 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:34:56 PM	Tube furnace set to 150
12/9/2012	7:35:26 PM	H2 valve closed
12/9/2012	7:35:26 PM	BCl3 valve closed
12/9/2012	7:35:26 PM	PH3 valve closed
12/9/2012	7:35:26 PM	SiCl4 pre valve closed
12/9/2012	7:35:26 PM	SiCl4 post valve closed
12/9/2012	7:35:26 PM	Bypass valve closed
12/9/2012	7:35:26 PM	Bubbler valve closed
12/9/2012	7:35:26 PM	Helium valve opened
12/9/2012	7:35:26 PM	Main Vac valve opened
12/9/2012	7:35:26 PM	Helium MFC set to  20.000000
12/9/2012	7:35:26 PM	H2 MFC set to  0.000000
12/9/2012	7:35:26 PM	BCl3 MFC set to  0.000000
12/9/2012	7:35:26 PM	PH3 MFC set to  0.000000
12/9/2012	7:35:26 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:35:26 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:35:26 PM	Tube furnace set to 150
12/9/2012	7:35:56 PM	Helium valve closed
12/9/2012	7:35:56 PM	H2 valve closed
12/9/2012	7:35:56 PM	BCl3 valve closed
12/9/2012	7:35:56 PM	PH3 valve closed
12/9/2012	7:35:56 PM	SiCl4 pre valve closed
12/9/2012	7:35:56 PM	SiCl4 post valve closed
12/9/2012	7:35:56 PM	Bypass valve closed
12/9/2012	7:35:56 PM	Bubbler valve closed
12/9/2012	7:35:56 PM	Main Vac valve opened
12/9/2012	7:35:56 PM	Helium MFC set to  0.000000
12/9/2012	7:35:56 PM	H2 MFC set to  0.000000
12/9/2012	7:35:56 PM	BCl3 MFC set to  0.000000
12/9/2012	7:35:56 PM	PH3 MFC set to  0.000000
12/9/2012	7:35:56 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:35:56 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:35:56 PM	Tube furnace set to 150
12/9/2012	7:36:26 PM	H2 valve closed
12/9/2012	7:36:26 PM	BCl3 valve closed
12/9/2012	7:36:26 PM	PH3 valve closed
12/9/2012	7:36:26 PM	SiCl4 pre valve closed
12/9/2012	7:36:26 PM	SiCl4 post valve closed
12/9/2012	7:36:26 PM	Bypass valve closed
12/9/2012	7:36:26 PM	Bubbler valve closed
12/9/2012	7:36:26 PM	Helium valve opened
12/9/2012	7:36:26 PM	Main Vac valve opened
12/9/2012	7:36:26 PM	Helium MFC set to  20.000000
12/9/2012	7:36:26 PM	H2 MFC set to  0.000000
12/9/2012	7:36:26 PM	BCl3 MFC set to  0.000000
12/9/2012	7:36:26 PM	PH3 MFC set to  0.000000
12/9/2012	7:36:26 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:36:26 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:36:26 PM	Tube furnace set to 150
12/9/2012	7:36:56 PM	Helium valve closed
12/9/2012	7:36:56 PM	H2 valve closed
12/9/2012	7:36:56 PM	BCl3 valve closed
12/9/2012	7:36:56 PM	PH3 valve closed
12/9/2012	7:36:56 PM	SiCl4 pre valve closed
12/9/2012	7:36:56 PM	SiCl4 post valve closed
12/9/2012	7:36:56 PM	Bypass valve closed
12/9/2012	7:36:56 PM	Bubbler valve closed
12/9/2012	7:36:56 PM	Main Vac valve opened
12/9/2012	7:36:56 PM	Helium MFC set to  0.000000
12/9/2012	7:36:56 PM	H2 MFC set to  0.000000
12/9/2012	7:36:56 PM	BCl3 MFC set to  0.000000
12/9/2012	7:36:56 PM	PH3 MFC set to  0.000000
12/9/2012	7:36:56 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:36:56 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:36:57 PM	Tube furnace set to 150
12/9/2012	7:37:27 PM	H2 valve closed
12/9/2012	7:37:27 PM	BCl3 valve closed
12/9/2012	7:37:27 PM	PH3 valve closed
12/9/2012	7:37:27 PM	SiCl4 pre valve closed
12/9/2012	7:37:27 PM	SiCl4 post valve closed
12/9/2012	7:37:27 PM	Bypass valve closed
12/9/2012	7:37:27 PM	Bubbler valve closed
12/9/2012	7:37:27 PM	Helium valve opened
12/9/2012	7:37:27 PM	Main Vac valve opened
12/9/2012	7:37:27 PM	Helium MFC set to  20.000000
12/9/2012	7:37:27 PM	H2 MFC set to  0.000000
12/9/2012	7:37:27 PM	BCl3 MFC set to  0.000000
12/9/2012	7:37:27 PM	PH3 MFC set to  0.000000
12/9/2012	7:37:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:37:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:37:27 PM	Tube furnace set to 150
12/9/2012	7:37:57 PM	Helium valve closed
12/9/2012	7:37:57 PM	H2 valve closed
12/9/2012	7:37:57 PM	BCl3 valve closed
12/9/2012	7:37:57 PM	PH3 valve closed
12/9/2012	7:37:57 PM	SiCl4 pre valve closed
12/9/2012	7:37:57 PM	SiCl4 post valve closed
12/9/2012	7:37:57 PM	Bypass valve closed
12/9/2012	7:37:57 PM	Bubbler valve closed
12/9/2012	7:37:57 PM	Main Vac valve opened
12/9/2012	7:37:57 PM	Helium MFC set to  0.000000
12/9/2012	7:37:57 PM	H2 MFC set to  0.000000
12/9/2012	7:37:57 PM	BCl3 MFC set to  0.000000
12/9/2012	7:37:57 PM	PH3 MFC set to  0.000000
12/9/2012	7:37:57 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:37:57 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:37:57 PM	Tube furnace set to 150
12/9/2012	7:38:27 PM	H2 valve closed
12/9/2012	7:38:27 PM	BCl3 valve closed
12/9/2012	7:38:27 PM	PH3 valve closed
12/9/2012	7:38:27 PM	SiCl4 pre valve closed
12/9/2012	7:38:27 PM	SiCl4 post valve closed
12/9/2012	7:38:27 PM	Bypass valve closed
12/9/2012	7:38:27 PM	Bubbler valve closed
12/9/2012	7:38:27 PM	Helium valve opened
12/9/2012	7:38:27 PM	Main Vac valve opened
12/9/2012	7:38:27 PM	Helium MFC set to  20.000000
12/9/2012	7:38:27 PM	H2 MFC set to  0.000000
12/9/2012	7:38:27 PM	BCl3 MFC set to  0.000000
12/9/2012	7:38:27 PM	PH3 MFC set to  0.000000
12/9/2012	7:38:27 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:38:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:38:27 PM	Tube furnace set to 150
12/9/2012	7:38:57 PM	Helium valve closed
12/9/2012	7:38:57 PM	H2 valve closed
12/9/2012	7:38:57 PM	BCl3 valve closed
12/9/2012	7:38:57 PM	PH3 valve closed
12/9/2012	7:38:57 PM	SiCl4 pre valve closed
12/9/2012	7:38:57 PM	SiCl4 post valve closed
12/9/2012	7:38:57 PM	Bypass valve closed
12/9/2012	7:38:57 PM	Bubbler valve closed
12/9/2012	7:38:57 PM	Main Vac valve opened
12/9/2012	7:38:57 PM	Helium MFC set to  0.000000
12/9/2012	7:38:57 PM	H2 MFC set to  0.000000
12/9/2012	7:38:57 PM	BCl3 MFC set to  0.000000
12/9/2012	7:38:57 PM	PH3 MFC set to  0.000000
12/9/2012	7:38:57 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:38:57 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:38:57 PM	Tube furnace set to 150
12/9/2012	7:39:28 PM	H2 valve closed
12/9/2012	7:39:28 PM	BCl3 valve closed
12/9/2012	7:39:28 PM	PH3 valve closed
12/9/2012	7:39:28 PM	SiCl4 pre valve closed
12/9/2012	7:39:28 PM	SiCl4 post valve closed
12/9/2012	7:39:28 PM	Bypass valve closed
12/9/2012	7:39:28 PM	Bubbler valve closed
12/9/2012	7:39:28 PM	Helium valve opened
12/9/2012	7:39:28 PM	Main Vac valve opened
12/9/2012	7:39:28 PM	Helium MFC set to  20.000000
12/9/2012	7:39:28 PM	H2 MFC set to  0.000000
12/9/2012	7:39:28 PM	BCl3 MFC set to  0.000000
12/9/2012	7:39:28 PM	PH3 MFC set to  0.000000
12/9/2012	7:39:28 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:39:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:39:28 PM	Tube furnace set to 150
12/9/2012	7:39:58 PM	Helium valve closed
12/9/2012	7:39:58 PM	H2 valve closed
12/9/2012	7:39:58 PM	BCl3 valve closed
12/9/2012	7:39:58 PM	PH3 valve closed
12/9/2012	7:39:58 PM	SiCl4 pre valve closed
12/9/2012	7:39:58 PM	SiCl4 post valve closed
12/9/2012	7:39:58 PM	Bypass valve closed
12/9/2012	7:39:58 PM	Bubbler valve closed
12/9/2012	7:39:58 PM	Main Vac valve opened
12/9/2012	7:39:58 PM	Helium MFC set to  0.000000
12/9/2012	7:39:58 PM	H2 MFC set to  0.000000
12/9/2012	7:39:58 PM	BCl3 MFC set to  0.000000
12/9/2012	7:39:58 PM	PH3 MFC set to  0.000000
12/9/2012	7:39:58 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:39:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:39:58 PM	Tube furnace set to 150
12/9/2012	7:40:28 PM	H2 valve closed
12/9/2012	7:40:28 PM	BCl3 valve closed
12/9/2012	7:40:28 PM	PH3 valve closed
12/9/2012	7:40:28 PM	SiCl4 pre valve closed
12/9/2012	7:40:28 PM	SiCl4 post valve closed
12/9/2012	7:40:28 PM	Bypass valve closed
12/9/2012	7:40:28 PM	Bubbler valve closed
12/9/2012	7:40:28 PM	Helium valve opened
12/9/2012	7:40:28 PM	Main Vac valve opened
12/9/2012	7:40:28 PM	Helium MFC set to  20.000000
12/9/2012	7:40:28 PM	H2 MFC set to  0.000000
12/9/2012	7:40:28 PM	BCl3 MFC set to  0.000000
12/9/2012	7:40:28 PM	PH3 MFC set to  0.000000
12/9/2012	7:40:28 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:40:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:40:28 PM	Tube furnace set to 150
12/9/2012	7:40:58 PM	Helium valve closed
12/9/2012	7:40:58 PM	H2 valve closed
12/9/2012	7:40:58 PM	BCl3 valve closed
12/9/2012	7:40:58 PM	PH3 valve closed
12/9/2012	7:40:58 PM	SiCl4 pre valve closed
12/9/2012	7:40:58 PM	SiCl4 post valve closed
12/9/2012	7:40:58 PM	Bypass valve closed
12/9/2012	7:40:58 PM	Bubbler valve closed
12/9/2012	7:40:58 PM	Main Vac valve opened
12/9/2012	7:40:58 PM	Helium MFC set to  0.000000
12/9/2012	7:40:58 PM	H2 MFC set to  0.000000
12/9/2012	7:40:58 PM	BCl3 MFC set to  0.000000
12/9/2012	7:40:58 PM	PH3 MFC set to  0.000000
12/9/2012	7:40:58 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:40:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:40:58 PM	Tube furnace set to 150
12/9/2012	7:41:28 PM	H2 valve closed
12/9/2012	7:41:28 PM	BCl3 valve closed
12/9/2012	7:41:29 PM	PH3 valve closed
12/9/2012	7:41:29 PM	SiCl4 pre valve closed
12/9/2012	7:41:29 PM	SiCl4 post valve closed
12/9/2012	7:41:29 PM	Bypass valve closed
12/9/2012	7:41:29 PM	Bubbler valve closed
12/9/2012	7:41:29 PM	Helium valve opened
12/9/2012	7:41:29 PM	Main Vac valve opened
12/9/2012	7:41:29 PM	Helium MFC set to  20.000000
12/9/2012	7:41:29 PM	H2 MFC set to  0.000000
12/9/2012	7:41:29 PM	BCl3 MFC set to  0.000000
12/9/2012	7:41:29 PM	PH3 MFC set to  0.000000
12/9/2012	7:41:29 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:41:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:41:29 PM	Tube furnace set to 150
12/9/2012	7:41:59 PM	Helium valve closed
12/9/2012	7:41:59 PM	H2 valve closed
12/9/2012	7:41:59 PM	BCl3 valve closed
12/9/2012	7:41:59 PM	PH3 valve closed
12/9/2012	7:41:59 PM	SiCl4 pre valve closed
12/9/2012	7:41:59 PM	SiCl4 post valve closed
12/9/2012	7:41:59 PM	Bypass valve closed
12/9/2012	7:41:59 PM	Bubbler valve closed
12/9/2012	7:41:59 PM	Main Vac valve opened
12/9/2012	7:41:59 PM	Helium MFC set to  0.000000
12/9/2012	7:41:59 PM	H2 MFC set to  0.000000
12/9/2012	7:41:59 PM	BCl3 MFC set to  0.000000
12/9/2012	7:41:59 PM	PH3 MFC set to  0.000000
12/9/2012	7:41:59 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:41:59 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:41:59 PM	Tube furnace set to 150
12/9/2012	7:42:29 PM	H2 valve closed
12/9/2012	7:42:29 PM	BCl3 valve closed
12/9/2012	7:42:29 PM	PH3 valve closed
12/9/2012	7:42:29 PM	SiCl4 pre valve closed
12/9/2012	7:42:29 PM	SiCl4 post valve closed
12/9/2012	7:42:29 PM	Bypass valve closed
12/9/2012	7:42:29 PM	Bubbler valve closed
12/9/2012	7:42:29 PM	Helium valve opened
12/9/2012	7:42:29 PM	Main Vac valve opened
12/9/2012	7:42:29 PM	Helium MFC set to  20.000000
12/9/2012	7:42:29 PM	H2 MFC set to  0.000000
12/9/2012	7:42:29 PM	BCl3 MFC set to  0.000000
12/9/2012	7:42:29 PM	PH3 MFC set to  0.000000
12/9/2012	7:42:29 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:42:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:42:29 PM	Tube furnace set to 150
12/9/2012	7:42:59 PM	Helium valve closed
12/9/2012	7:42:59 PM	H2 valve closed
12/9/2012	7:42:59 PM	BCl3 valve closed
12/9/2012	7:42:59 PM	PH3 valve closed
12/9/2012	7:42:59 PM	SiCl4 pre valve closed
12/9/2012	7:42:59 PM	SiCl4 post valve closed
12/9/2012	7:42:59 PM	Bypass valve closed
12/9/2012	7:42:59 PM	Bubbler valve closed
12/9/2012	7:42:59 PM	Main Vac valve opened
12/9/2012	7:42:59 PM	Helium MFC set to  0.000000
12/9/2012	7:42:59 PM	H2 MFC set to  0.000000
12/9/2012	7:42:59 PM	BCl3 MFC set to  0.000000
12/9/2012	7:42:59 PM	PH3 MFC set to  0.000000
12/9/2012	7:42:59 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:42:59 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:42:59 PM	Tube furnace set to 150
12/9/2012	7:43:29 PM	H2 valve closed
12/9/2012	7:43:29 PM	BCl3 valve closed
12/9/2012	7:43:29 PM	PH3 valve closed
12/9/2012	7:43:29 PM	SiCl4 pre valve closed
12/9/2012	7:43:29 PM	SiCl4 post valve closed
12/9/2012	7:43:29 PM	Bypass valve closed
12/9/2012	7:43:30 PM	Bubbler valve closed
12/9/2012	7:43:30 PM	Helium valve opened
12/9/2012	7:43:30 PM	Main Vac valve opened
12/9/2012	7:43:30 PM	Helium MFC set to  20.000000
12/9/2012	7:43:30 PM	H2 MFC set to  0.000000
12/9/2012	7:43:30 PM	BCl3 MFC set to  0.000000
12/9/2012	7:43:30 PM	PH3 MFC set to  0.000000
12/9/2012	7:43:30 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:43:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:43:30 PM	Tube furnace set to 150
12/9/2012	7:44:00 PM	Helium valve closed
12/9/2012	7:44:00 PM	H2 valve closed
12/9/2012	7:44:00 PM	BCl3 valve closed
12/9/2012	7:44:00 PM	PH3 valve closed
12/9/2012	7:44:00 PM	SiCl4 pre valve closed
12/9/2012	7:44:00 PM	SiCl4 post valve closed
12/9/2012	7:44:00 PM	Bypass valve closed
12/9/2012	7:44:00 PM	Bubbler valve closed
12/9/2012	7:44:00 PM	Main Vac valve opened
12/9/2012	7:44:00 PM	Helium MFC set to  0.000000
12/9/2012	7:44:00 PM	H2 MFC set to  0.000000
12/9/2012	7:44:00 PM	BCl3 MFC set to  0.000000
12/9/2012	7:44:00 PM	PH3 MFC set to  0.000000
12/9/2012	7:44:00 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:44:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:44:00 PM	Tube furnace set to 150
12/9/2012	7:44:01 PM	Run finished at 7:44 PM
12/9/2012	7:45:43 PM	Recipe started at 7:45 PM
12/9/2012	7:45:43 PM	Helium valve closed
12/9/2012	7:45:43 PM	H2 valve closed
12/9/2012	7:45:43 PM	BCl3 valve closed
12/9/2012	7:45:43 PM	PH3 valve closed
12/9/2012	7:45:44 PM	SiCl4 pre valve closed
12/9/2012	7:45:44 PM	SiCl4 post valve closed
12/9/2012	7:45:44 PM	Bypass valve closed
12/9/2012	7:45:44 PM	Bubbler valve closed
12/9/2012	7:45:44 PM	Main Vac valve opened
12/9/2012	7:45:44 PM	Helium MFC set to  0.000000
12/9/2012	7:45:44 PM	H2 MFC set to  0.000000
12/9/2012	7:45:44 PM	BCl3 MFC set to  0.000000
12/9/2012	7:45:44 PM	PH3 MFC set to  0.000000
12/9/2012	7:45:44 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:45:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:45:44 PM	Tube furnace set to 150
12/9/2012	7:46:14 PM	H2 valve closed
12/9/2012	7:46:14 PM	BCl3 valve closed
12/9/2012	7:46:14 PM	PH3 valve closed
12/9/2012	7:46:14 PM	SiCl4 pre valve closed
12/9/2012	7:46:14 PM	SiCl4 post valve closed
12/9/2012	7:46:14 PM	Bypass valve closed
12/9/2012	7:46:14 PM	Bubbler valve closed
12/9/2012	7:46:14 PM	Helium valve opened
12/9/2012	7:46:14 PM	Main Vac valve opened
12/9/2012	7:46:14 PM	Helium MFC set to  20.000000
12/9/2012	7:46:14 PM	H2 MFC set to  0.000000
12/9/2012	7:46:14 PM	BCl3 MFC set to  0.000000
12/9/2012	7:46:14 PM	PH3 MFC set to  0.000000
12/9/2012	7:46:14 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:46:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:46:14 PM	Tube furnace set to 150
12/9/2012	7:46:44 PM	Helium valve closed
12/9/2012	7:46:44 PM	H2 valve closed
12/9/2012	7:46:44 PM	BCl3 valve closed
12/9/2012	7:46:44 PM	PH3 valve closed
12/9/2012	7:46:44 PM	SiCl4 pre valve closed
12/9/2012	7:46:44 PM	SiCl4 post valve closed
12/9/2012	7:46:44 PM	Bypass valve closed
12/9/2012	7:46:44 PM	Bubbler valve closed
12/9/2012	7:46:44 PM	Main Vac valve opened
12/9/2012	7:46:44 PM	Helium MFC set to  0.000000
12/9/2012	7:46:44 PM	H2 MFC set to  0.000000
12/9/2012	7:46:44 PM	BCl3 MFC set to  0.000000
12/9/2012	7:46:44 PM	PH3 MFC set to  0.000000
12/9/2012	7:46:44 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:46:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:46:44 PM	Tube furnace set to 150
12/9/2012	7:47:14 PM	H2 valve closed
12/9/2012	7:47:14 PM	BCl3 valve closed
12/9/2012	7:47:14 PM	PH3 valve closed
12/9/2012	7:47:14 PM	SiCl4 pre valve closed
12/9/2012	7:47:14 PM	SiCl4 post valve closed
12/9/2012	7:47:14 PM	Bypass valve closed
12/9/2012	7:47:14 PM	Bubbler valve closed
12/9/2012	7:47:14 PM	Helium valve opened
12/9/2012	7:47:14 PM	Main Vac valve opened
12/9/2012	7:47:14 PM	Helium MFC set to  20.000000
12/9/2012	7:47:14 PM	H2 MFC set to  0.000000
12/9/2012	7:47:14 PM	BCl3 MFC set to  0.000000
12/9/2012	7:47:14 PM	PH3 MFC set to  0.000000
12/9/2012	7:47:14 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:47:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:47:14 PM	Tube furnace set to 150
12/9/2012	7:47:44 PM	Helium valve closed
12/9/2012	7:47:44 PM	H2 valve closed
12/9/2012	7:47:44 PM	BCl3 valve closed
12/9/2012	7:47:44 PM	PH3 valve closed
12/9/2012	7:47:44 PM	SiCl4 pre valve closed
12/9/2012	7:47:44 PM	SiCl4 post valve closed
12/9/2012	7:47:44 PM	Bypass valve closed
12/9/2012	7:47:44 PM	Bubbler valve closed
12/9/2012	7:47:44 PM	Main Vac valve opened
12/9/2012	7:47:44 PM	Helium MFC set to  0.000000
12/9/2012	7:47:45 PM	H2 MFC set to  0.000000
12/9/2012	7:47:45 PM	BCl3 MFC set to  0.000000
12/9/2012	7:47:45 PM	PH3 MFC set to  0.000000
12/9/2012	7:47:45 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:47:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:47:45 PM	Tube furnace set to 150
12/9/2012	7:48:15 PM	H2 valve closed
12/9/2012	7:48:15 PM	BCl3 valve closed
12/9/2012	7:48:15 PM	PH3 valve closed
12/9/2012	7:48:15 PM	SiCl4 pre valve closed
12/9/2012	7:48:15 PM	SiCl4 post valve closed
12/9/2012	7:48:15 PM	Bypass valve closed
12/9/2012	7:48:15 PM	Bubbler valve closed
12/9/2012	7:48:15 PM	Helium valve opened
12/9/2012	7:48:15 PM	Main Vac valve opened
12/9/2012	7:48:15 PM	Helium MFC set to  20.000000
12/9/2012	7:48:15 PM	H2 MFC set to  0.000000
12/9/2012	7:48:15 PM	BCl3 MFC set to  0.000000
12/9/2012	7:48:15 PM	PH3 MFC set to  0.000000
12/9/2012	7:48:15 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:48:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:48:15 PM	Tube furnace set to 150
12/9/2012	7:48:45 PM	Helium valve closed
12/9/2012	7:48:45 PM	H2 valve closed
12/9/2012	7:48:45 PM	BCl3 valve closed
12/9/2012	7:48:45 PM	PH3 valve closed
12/9/2012	7:48:45 PM	SiCl4 pre valve closed
12/9/2012	7:48:45 PM	SiCl4 post valve closed
12/9/2012	7:48:45 PM	Bypass valve closed
12/9/2012	7:48:45 PM	Bubbler valve closed
12/9/2012	7:48:45 PM	Main Vac valve opened
12/9/2012	7:48:45 PM	Helium MFC set to  0.000000
12/9/2012	7:48:45 PM	H2 MFC set to  0.000000
12/9/2012	7:48:45 PM	BCl3 MFC set to  0.000000
12/9/2012	7:48:45 PM	PH3 MFC set to  0.000000
12/9/2012	7:48:45 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:48:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:48:45 PM	Tube furnace set to 150
12/9/2012	7:49:15 PM	H2 valve closed
12/9/2012	7:49:15 PM	BCl3 valve closed
12/9/2012	7:49:15 PM	PH3 valve closed
12/9/2012	7:49:15 PM	SiCl4 pre valve closed
12/9/2012	7:49:15 PM	SiCl4 post valve closed
12/9/2012	7:49:15 PM	Bypass valve closed
12/9/2012	7:49:15 PM	Bubbler valve closed
12/9/2012	7:49:15 PM	Helium valve opened
12/9/2012	7:49:15 PM	Main Vac valve opened
12/9/2012	7:49:15 PM	Helium MFC set to  20.000000
12/9/2012	7:49:15 PM	H2 MFC set to  0.000000
12/9/2012	7:49:15 PM	BCl3 MFC set to  0.000000
12/9/2012	7:49:15 PM	PH3 MFC set to  0.000000
12/9/2012	7:49:15 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:49:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:49:15 PM	Tube furnace set to 150
12/9/2012	7:49:45 PM	Helium valve closed
12/9/2012	7:49:45 PM	H2 valve closed
12/9/2012	7:49:45 PM	BCl3 valve closed
12/9/2012	7:49:45 PM	PH3 valve closed
12/9/2012	7:49:45 PM	SiCl4 pre valve closed
12/9/2012	7:49:45 PM	SiCl4 post valve closed
12/9/2012	7:49:45 PM	Bypass valve closed
12/9/2012	7:49:45 PM	Bubbler valve closed
12/9/2012	7:49:45 PM	Main Vac valve opened
12/9/2012	7:49:45 PM	Helium MFC set to  0.000000
12/9/2012	7:49:45 PM	H2 MFC set to  0.000000
12/9/2012	7:49:45 PM	BCl3 MFC set to  0.000000
12/9/2012	7:49:45 PM	PH3 MFC set to  0.000000
12/9/2012	7:49:45 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:49:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:49:46 PM	Tube furnace set to 150
12/9/2012	7:50:16 PM	H2 valve closed
12/9/2012	7:50:16 PM	BCl3 valve closed
12/9/2012	7:50:16 PM	PH3 valve closed
12/9/2012	7:50:16 PM	SiCl4 pre valve closed
12/9/2012	7:50:16 PM	SiCl4 post valve closed
12/9/2012	7:50:16 PM	Bypass valve closed
12/9/2012	7:50:16 PM	Bubbler valve closed
12/9/2012	7:50:16 PM	Helium valve opened
12/9/2012	7:50:16 PM	Main Vac valve opened
12/9/2012	7:50:16 PM	Helium MFC set to  20.000000
12/9/2012	7:50:16 PM	H2 MFC set to  0.000000
12/9/2012	7:50:16 PM	BCl3 MFC set to  0.000000
12/9/2012	7:50:16 PM	PH3 MFC set to  0.000000
12/9/2012	7:50:16 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:50:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:50:16 PM	Tube furnace set to 150
12/9/2012	7:50:46 PM	Helium valve closed
12/9/2012	7:50:46 PM	H2 valve closed
12/9/2012	7:50:46 PM	BCl3 valve closed
12/9/2012	7:50:46 PM	PH3 valve closed
12/9/2012	7:50:46 PM	SiCl4 pre valve closed
12/9/2012	7:50:46 PM	SiCl4 post valve closed
12/9/2012	7:50:46 PM	Bypass valve closed
12/9/2012	7:50:46 PM	Bubbler valve closed
12/9/2012	7:50:46 PM	Main Vac valve opened
12/9/2012	7:50:46 PM	Helium MFC set to  0.000000
12/9/2012	7:50:46 PM	H2 MFC set to  0.000000
12/9/2012	7:50:46 PM	BCl3 MFC set to  0.000000
12/9/2012	7:50:46 PM	PH3 MFC set to  0.000000
12/9/2012	7:50:46 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:50:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:50:46 PM	Tube furnace set to 150
12/9/2012	7:51:16 PM	H2 valve closed
12/9/2012	7:51:16 PM	BCl3 valve closed
12/9/2012	7:51:16 PM	PH3 valve closed
12/9/2012	7:51:16 PM	SiCl4 pre valve closed
12/9/2012	7:51:16 PM	SiCl4 post valve closed
12/9/2012	7:51:16 PM	Bypass valve closed
12/9/2012	7:51:16 PM	Bubbler valve closed
12/9/2012	7:51:16 PM	Helium valve opened
12/9/2012	7:51:16 PM	Main Vac valve opened
12/9/2012	7:51:16 PM	Helium MFC set to  20.000000
12/9/2012	7:51:16 PM	H2 MFC set to  0.000000
12/9/2012	7:51:16 PM	BCl3 MFC set to  0.000000
12/9/2012	7:51:16 PM	PH3 MFC set to  0.000000
12/9/2012	7:51:16 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:51:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:51:16 PM	Tube furnace set to 150
12/9/2012	7:51:46 PM	Helium valve closed
12/9/2012	7:51:46 PM	H2 valve closed
12/9/2012	7:51:46 PM	BCl3 valve closed
12/9/2012	7:51:46 PM	PH3 valve closed
12/9/2012	7:51:46 PM	SiCl4 pre valve closed
12/9/2012	7:51:46 PM	SiCl4 post valve closed
12/9/2012	7:51:46 PM	Bypass valve closed
12/9/2012	7:51:46 PM	Bubbler valve closed
12/9/2012	7:51:46 PM	Main Vac valve opened
12/9/2012	7:51:46 PM	Helium MFC set to  0.000000
12/9/2012	7:51:46 PM	H2 MFC set to  0.000000
12/9/2012	7:51:46 PM	BCl3 MFC set to  0.000000
12/9/2012	7:51:46 PM	PH3 MFC set to  0.000000
12/9/2012	7:51:46 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:51:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:51:47 PM	Tube furnace set to 150
12/9/2012	7:52:17 PM	H2 valve closed
12/9/2012	7:52:17 PM	BCl3 valve closed
12/9/2012	7:52:17 PM	PH3 valve closed
12/9/2012	7:52:17 PM	SiCl4 pre valve closed
12/9/2012	7:52:17 PM	SiCl4 post valve closed
12/9/2012	7:52:17 PM	Bypass valve closed
12/9/2012	7:52:17 PM	Bubbler valve closed
12/9/2012	7:52:17 PM	Helium valve opened
12/9/2012	7:52:17 PM	Main Vac valve opened
12/9/2012	7:52:17 PM	Helium MFC set to  20.000000
12/9/2012	7:52:17 PM	H2 MFC set to  0.000000
12/9/2012	7:52:17 PM	BCl3 MFC set to  0.000000
12/9/2012	7:52:17 PM	PH3 MFC set to  0.000000
12/9/2012	7:52:17 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:52:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:52:17 PM	Tube furnace set to 150
12/9/2012	7:52:47 PM	Helium valve closed
12/9/2012	7:52:47 PM	H2 valve closed
12/9/2012	7:52:47 PM	BCl3 valve closed
12/9/2012	7:52:47 PM	PH3 valve closed
12/9/2012	7:52:47 PM	SiCl4 pre valve closed
12/9/2012	7:52:47 PM	SiCl4 post valve closed
12/9/2012	7:52:47 PM	Bypass valve closed
12/9/2012	7:52:47 PM	Bubbler valve closed
12/9/2012	7:52:47 PM	Main Vac valve opened
12/9/2012	7:52:47 PM	Helium MFC set to  0.000000
12/9/2012	7:52:47 PM	H2 MFC set to  0.000000
12/9/2012	7:52:47 PM	BCl3 MFC set to  0.000000
12/9/2012	7:52:47 PM	PH3 MFC set to  0.000000
12/9/2012	7:52:47 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:52:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:52:47 PM	Tube furnace set to 150
12/9/2012	7:53:17 PM	H2 valve closed
12/9/2012	7:53:17 PM	BCl3 valve closed
12/9/2012	7:53:17 PM	PH3 valve closed
12/9/2012	7:53:17 PM	SiCl4 pre valve closed
12/9/2012	7:53:17 PM	SiCl4 post valve closed
12/9/2012	7:53:17 PM	Bypass valve closed
12/9/2012	7:53:17 PM	Bubbler valve closed
12/9/2012	7:53:17 PM	Helium valve opened
12/9/2012	7:53:17 PM	Main Vac valve opened
12/9/2012	7:53:17 PM	Helium MFC set to  20.000000
12/9/2012	7:53:17 PM	H2 MFC set to  0.000000
12/9/2012	7:53:17 PM	BCl3 MFC set to  0.000000
12/9/2012	7:53:17 PM	PH3 MFC set to  0.000000
12/9/2012	7:53:17 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:53:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:53:17 PM	Tube furnace set to 150
12/9/2012	7:53:47 PM	Helium valve closed
12/9/2012	7:53:47 PM	H2 valve closed
12/9/2012	7:53:47 PM	BCl3 valve closed
12/9/2012	7:53:47 PM	PH3 valve closed
12/9/2012	7:53:47 PM	SiCl4 pre valve closed
12/9/2012	7:53:47 PM	SiCl4 post valve closed
12/9/2012	7:53:47 PM	Bypass valve closed
12/9/2012	7:53:47 PM	Bubbler valve closed
12/9/2012	7:53:47 PM	Main Vac valve opened
12/9/2012	7:53:47 PM	Helium MFC set to  0.000000
12/9/2012	7:53:47 PM	H2 MFC set to  0.000000
12/9/2012	7:53:47 PM	BCl3 MFC set to  0.000000
12/9/2012	7:53:47 PM	PH3 MFC set to  0.000000
12/9/2012	7:53:47 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:53:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:53:48 PM	Tube furnace set to 150
12/9/2012	7:54:18 PM	H2 valve closed
12/9/2012	7:54:18 PM	BCl3 valve closed
12/9/2012	7:54:18 PM	PH3 valve closed
12/9/2012	7:54:18 PM	SiCl4 pre valve closed
12/9/2012	7:54:18 PM	SiCl4 post valve closed
12/9/2012	7:54:18 PM	Bypass valve closed
12/9/2012	7:54:18 PM	Bubbler valve closed
12/9/2012	7:54:18 PM	Helium valve opened
12/9/2012	7:54:18 PM	Main Vac valve opened
12/9/2012	7:54:18 PM	Helium MFC set to  20.000000
12/9/2012	7:54:18 PM	H2 MFC set to  0.000000
12/9/2012	7:54:18 PM	BCl3 MFC set to  0.000000
12/9/2012	7:54:18 PM	PH3 MFC set to  0.000000
12/9/2012	7:54:18 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:54:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:54:18 PM	Tube furnace set to 150
12/9/2012	7:54:48 PM	Helium valve closed
12/9/2012	7:54:48 PM	H2 valve closed
12/9/2012	7:54:48 PM	BCl3 valve closed
12/9/2012	7:54:48 PM	PH3 valve closed
12/9/2012	7:54:48 PM	SiCl4 pre valve closed
12/9/2012	7:54:48 PM	SiCl4 post valve closed
12/9/2012	7:54:48 PM	Bypass valve closed
12/9/2012	7:54:48 PM	Bubbler valve closed
12/9/2012	7:54:48 PM	Main Vac valve opened
12/9/2012	7:54:48 PM	Helium MFC set to  0.000000
12/9/2012	7:54:48 PM	H2 MFC set to  0.000000
12/9/2012	7:54:48 PM	BCl3 MFC set to  0.000000
12/9/2012	7:54:48 PM	PH3 MFC set to  0.000000
12/9/2012	7:54:48 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:54:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:54:48 PM	Tube furnace set to 150
12/9/2012	7:55:18 PM	H2 valve closed
12/9/2012	7:55:18 PM	BCl3 valve closed
12/9/2012	7:55:18 PM	PH3 valve closed
12/9/2012	7:55:18 PM	SiCl4 pre valve closed
12/9/2012	7:55:18 PM	SiCl4 post valve closed
12/9/2012	7:55:18 PM	Bypass valve closed
12/9/2012	7:55:18 PM	Bubbler valve closed
12/9/2012	7:55:18 PM	Helium valve opened
12/9/2012	7:55:18 PM	Main Vac valve opened
12/9/2012	7:55:18 PM	Helium MFC set to  20.000000
12/9/2012	7:55:18 PM	H2 MFC set to  0.000000
12/9/2012	7:55:18 PM	BCl3 MFC set to  0.000000
12/9/2012	7:55:18 PM	PH3 MFC set to  0.000000
12/9/2012	7:55:18 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:55:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:55:18 PM	Tube furnace set to 150
12/9/2012	7:55:48 PM	Helium valve closed
12/9/2012	7:55:48 PM	H2 valve closed
12/9/2012	7:55:48 PM	BCl3 valve closed
12/9/2012	7:55:48 PM	PH3 valve closed
12/9/2012	7:55:48 PM	SiCl4 pre valve closed
12/9/2012	7:55:48 PM	SiCl4 post valve closed
12/9/2012	7:55:48 PM	Bypass valve closed
12/9/2012	7:55:48 PM	Bubbler valve closed
12/9/2012	7:55:48 PM	Main Vac valve opened
12/9/2012	7:55:48 PM	Helium MFC set to  0.000000
12/9/2012	7:55:48 PM	H2 MFC set to  0.000000
12/9/2012	7:55:48 PM	BCl3 MFC set to  0.000000
12/9/2012	7:55:48 PM	PH3 MFC set to  0.000000
12/9/2012	7:55:48 PM	SiCl4 MFC set to  0.000000
12/9/2012	7:55:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	7:55:49 PM	Tube furnace set to 150
12/9/2012	7:55:50 PM	Run finished at 7:55 PM
12/9/2012	7:59:44 PM	Main Vac valve closed
12/9/2012	7:59:51 PM	Main Vac valve opened
12/9/2012	8:00:00 PM	Recipe started at 7:59 PM
12/9/2012	8:00:00 PM	Helium valve closed
12/9/2012	8:00:00 PM	H2 valve closed
12/9/2012	8:00:00 PM	BCl3 valve closed
12/9/2012	8:00:00 PM	PH3 valve closed
12/9/2012	8:00:00 PM	SiCl4 pre valve closed
12/9/2012	8:00:00 PM	SiCl4 post valve closed
12/9/2012	8:00:00 PM	Bypass valve closed
12/9/2012	8:00:00 PM	Bubbler valve closed
12/9/2012	8:00:00 PM	Main Vac valve opened
12/9/2012	8:00:00 PM	Helium MFC set to  0.000000
12/9/2012	8:00:00 PM	H2 MFC set to  0.000000
12/9/2012	8:00:00 PM	BCl3 MFC set to  0.000000
12/9/2012	8:00:00 PM	PH3 MFC set to  0.000000
12/9/2012	8:00:00 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:00:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:00:01 PM	Tube furnace set to 150
12/9/2012	8:00:31 PM	H2 valve closed
12/9/2012	8:00:31 PM	BCl3 valve closed
12/9/2012	8:00:31 PM	PH3 valve closed
12/9/2012	8:00:31 PM	SiCl4 pre valve closed
12/9/2012	8:00:31 PM	SiCl4 post valve closed
12/9/2012	8:00:31 PM	Bypass valve closed
12/9/2012	8:00:31 PM	Bubbler valve closed
12/9/2012	8:00:31 PM	Helium valve opened
12/9/2012	8:00:31 PM	Main Vac valve opened
12/9/2012	8:00:31 PM	Helium MFC set to  20.000000
12/9/2012	8:00:31 PM	H2 MFC set to  0.000000
12/9/2012	8:00:31 PM	BCl3 MFC set to  0.000000
12/9/2012	8:00:31 PM	PH3 MFC set to  0.000000
12/9/2012	8:00:31 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:00:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:00:31 PM	Tube furnace set to 150
12/9/2012	8:01:01 PM	Helium valve closed
12/9/2012	8:01:01 PM	H2 valve closed
12/9/2012	8:01:01 PM	BCl3 valve closed
12/9/2012	8:01:01 PM	PH3 valve closed
12/9/2012	8:01:01 PM	SiCl4 pre valve closed
12/9/2012	8:01:01 PM	SiCl4 post valve closed
12/9/2012	8:01:01 PM	Bypass valve closed
12/9/2012	8:01:01 PM	Bubbler valve closed
12/9/2012	8:01:01 PM	Main Vac valve opened
12/9/2012	8:01:01 PM	Helium MFC set to  0.000000
12/9/2012	8:01:01 PM	H2 MFC set to  0.000000
12/9/2012	8:01:01 PM	BCl3 MFC set to  0.000000
12/9/2012	8:01:01 PM	PH3 MFC set to  0.000000
12/9/2012	8:01:01 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:01:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:01:01 PM	Tube furnace set to 150
12/9/2012	8:01:31 PM	H2 valve closed
12/9/2012	8:01:31 PM	BCl3 valve closed
12/9/2012	8:01:31 PM	PH3 valve closed
12/9/2012	8:01:31 PM	SiCl4 pre valve closed
12/9/2012	8:01:31 PM	SiCl4 post valve closed
12/9/2012	8:01:31 PM	Bypass valve closed
12/9/2012	8:01:31 PM	Bubbler valve closed
12/9/2012	8:01:31 PM	Helium valve opened
12/9/2012	8:01:31 PM	Main Vac valve opened
12/9/2012	8:01:31 PM	Helium MFC set to  20.000000
12/9/2012	8:01:31 PM	H2 MFC set to  0.000000
12/9/2012	8:01:31 PM	BCl3 MFC set to  0.000000
12/9/2012	8:01:31 PM	PH3 MFC set to  0.000000
12/9/2012	8:01:31 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:01:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:01:31 PM	Tube furnace set to 150
12/9/2012	8:02:01 PM	Helium valve closed
12/9/2012	8:02:01 PM	H2 valve closed
12/9/2012	8:02:01 PM	BCl3 valve closed
12/9/2012	8:02:01 PM	PH3 valve closed
12/9/2012	8:02:01 PM	SiCl4 pre valve closed
12/9/2012	8:02:01 PM	SiCl4 post valve closed
12/9/2012	8:02:01 PM	Bypass valve closed
12/9/2012	8:02:01 PM	Bubbler valve closed
12/9/2012	8:02:01 PM	Main Vac valve opened
12/9/2012	8:02:01 PM	Helium MFC set to  0.000000
12/9/2012	8:02:01 PM	H2 MFC set to  0.000000
12/9/2012	8:02:01 PM	BCl3 MFC set to  0.000000
12/9/2012	8:02:01 PM	PH3 MFC set to  0.000000
12/9/2012	8:02:01 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:02:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:02:02 PM	Tube furnace set to 150
12/9/2012	8:02:32 PM	H2 valve closed
12/9/2012	8:02:32 PM	BCl3 valve closed
12/9/2012	8:02:32 PM	PH3 valve closed
12/9/2012	8:02:32 PM	SiCl4 pre valve closed
12/9/2012	8:02:32 PM	SiCl4 post valve closed
12/9/2012	8:02:32 PM	Bypass valve closed
12/9/2012	8:02:32 PM	Bubbler valve closed
12/9/2012	8:02:32 PM	Helium valve opened
12/9/2012	8:02:32 PM	Main Vac valve opened
12/9/2012	8:02:32 PM	Helium MFC set to  20.000000
12/9/2012	8:02:32 PM	H2 MFC set to  0.000000
12/9/2012	8:02:32 PM	BCl3 MFC set to  0.000000
12/9/2012	8:02:32 PM	PH3 MFC set to  0.000000
12/9/2012	8:02:32 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:02:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:02:32 PM	Tube furnace set to 150
12/9/2012	8:03:02 PM	Helium valve closed
12/9/2012	8:03:02 PM	H2 valve closed
12/9/2012	8:03:02 PM	BCl3 valve closed
12/9/2012	8:03:02 PM	PH3 valve closed
12/9/2012	8:03:02 PM	SiCl4 pre valve closed
12/9/2012	8:03:02 PM	SiCl4 post valve closed
12/9/2012	8:03:02 PM	Bypass valve closed
12/9/2012	8:03:02 PM	Bubbler valve closed
12/9/2012	8:03:02 PM	Main Vac valve opened
12/9/2012	8:03:02 PM	Helium MFC set to  0.000000
12/9/2012	8:03:02 PM	H2 MFC set to  0.000000
12/9/2012	8:03:02 PM	BCl3 MFC set to  0.000000
12/9/2012	8:03:02 PM	PH3 MFC set to  0.000000
12/9/2012	8:03:02 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:03:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:03:02 PM	Tube furnace set to 150
12/9/2012	8:03:32 PM	H2 valve closed
12/9/2012	8:03:32 PM	BCl3 valve closed
12/9/2012	8:03:32 PM	PH3 valve closed
12/9/2012	8:03:32 PM	SiCl4 pre valve closed
12/9/2012	8:03:32 PM	SiCl4 post valve closed
12/9/2012	8:03:32 PM	Bypass valve closed
12/9/2012	8:03:32 PM	Bubbler valve closed
12/9/2012	8:03:32 PM	Helium valve opened
12/9/2012	8:03:32 PM	Main Vac valve opened
12/9/2012	8:03:32 PM	Helium MFC set to  20.000000
12/9/2012	8:03:32 PM	H2 MFC set to  0.000000
12/9/2012	8:03:32 PM	BCl3 MFC set to  0.000000
12/9/2012	8:03:32 PM	PH3 MFC set to  0.000000
12/9/2012	8:03:32 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:03:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:03:32 PM	Tube furnace set to 150
12/9/2012	8:04:02 PM	Helium valve closed
12/9/2012	8:04:02 PM	H2 valve closed
12/9/2012	8:04:02 PM	BCl3 valve closed
12/9/2012	8:04:02 PM	PH3 valve closed
12/9/2012	8:04:02 PM	SiCl4 pre valve closed
12/9/2012	8:04:02 PM	SiCl4 post valve closed
12/9/2012	8:04:02 PM	Bypass valve closed
12/9/2012	8:04:02 PM	Bubbler valve closed
12/9/2012	8:04:02 PM	Main Vac valve opened
12/9/2012	8:04:02 PM	Helium MFC set to  0.000000
12/9/2012	8:04:02 PM	H2 MFC set to  0.000000
12/9/2012	8:04:02 PM	BCl3 MFC set to  0.000000
12/9/2012	8:04:02 PM	PH3 MFC set to  0.000000
12/9/2012	8:04:02 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:04:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:04:03 PM	Tube furnace set to 150
12/9/2012	8:04:33 PM	H2 valve closed
12/9/2012	8:04:33 PM	BCl3 valve closed
12/9/2012	8:04:33 PM	PH3 valve closed
12/9/2012	8:04:33 PM	SiCl4 pre valve closed
12/9/2012	8:04:33 PM	SiCl4 post valve closed
12/9/2012	8:04:33 PM	Bypass valve closed
12/9/2012	8:04:33 PM	Bubbler valve closed
12/9/2012	8:04:33 PM	Helium valve opened
12/9/2012	8:04:33 PM	Main Vac valve opened
12/9/2012	8:04:33 PM	Helium MFC set to  20.000000
12/9/2012	8:04:33 PM	H2 MFC set to  0.000000
12/9/2012	8:04:33 PM	BCl3 MFC set to  0.000000
12/9/2012	8:04:33 PM	PH3 MFC set to  0.000000
12/9/2012	8:04:33 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:04:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:04:33 PM	Tube furnace set to 150
12/9/2012	8:05:03 PM	Helium valve closed
12/9/2012	8:05:03 PM	H2 valve closed
12/9/2012	8:05:03 PM	BCl3 valve closed
12/9/2012	8:05:03 PM	PH3 valve closed
12/9/2012	8:05:03 PM	SiCl4 pre valve closed
12/9/2012	8:05:03 PM	SiCl4 post valve closed
12/9/2012	8:05:03 PM	Bypass valve closed
12/9/2012	8:05:03 PM	Bubbler valve closed
12/9/2012	8:05:03 PM	Main Vac valve opened
12/9/2012	8:05:03 PM	Helium MFC set to  0.000000
12/9/2012	8:05:03 PM	H2 MFC set to  0.000000
12/9/2012	8:05:03 PM	BCl3 MFC set to  0.000000
12/9/2012	8:05:03 PM	PH3 MFC set to  0.000000
12/9/2012	8:05:03 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:05:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:05:03 PM	Tube furnace set to 150
12/9/2012	8:05:33 PM	H2 valve closed
12/9/2012	8:05:33 PM	BCl3 valve closed
12/9/2012	8:05:33 PM	PH3 valve closed
12/9/2012	8:05:33 PM	SiCl4 pre valve closed
12/9/2012	8:05:33 PM	SiCl4 post valve closed
12/9/2012	8:05:33 PM	Bypass valve closed
12/9/2012	8:05:33 PM	Bubbler valve closed
12/9/2012	8:05:33 PM	Helium valve opened
12/9/2012	8:05:33 PM	Main Vac valve opened
12/9/2012	8:05:33 PM	Helium MFC set to  20.000000
12/9/2012	8:05:33 PM	H2 MFC set to  0.000000
12/9/2012	8:05:33 PM	BCl3 MFC set to  0.000000
12/9/2012	8:05:33 PM	PH3 MFC set to  0.000000
12/9/2012	8:05:33 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:05:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:05:33 PM	Tube furnace set to 150
12/9/2012	8:06:03 PM	Helium valve closed
12/9/2012	8:06:03 PM	H2 valve closed
12/9/2012	8:06:03 PM	BCl3 valve closed
12/9/2012	8:06:03 PM	PH3 valve closed
12/9/2012	8:06:03 PM	SiCl4 pre valve closed
12/9/2012	8:06:03 PM	SiCl4 post valve closed
12/9/2012	8:06:03 PM	Bypass valve closed
12/9/2012	8:06:03 PM	Bubbler valve closed
12/9/2012	8:06:03 PM	Main Vac valve opened
12/9/2012	8:06:03 PM	Helium MFC set to  0.000000
12/9/2012	8:06:03 PM	H2 MFC set to  0.000000
12/9/2012	8:06:03 PM	BCl3 MFC set to  0.000000
12/9/2012	8:06:03 PM	PH3 MFC set to  0.000000
12/9/2012	8:06:03 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:06:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:06:03 PM	Tube furnace set to 150
12/9/2012	8:06:34 PM	H2 valve closed
12/9/2012	8:06:34 PM	BCl3 valve closed
12/9/2012	8:06:34 PM	PH3 valve closed
12/9/2012	8:06:34 PM	SiCl4 pre valve closed
12/9/2012	8:06:34 PM	SiCl4 post valve closed
12/9/2012	8:06:34 PM	Bypass valve closed
12/9/2012	8:06:34 PM	Bubbler valve closed
12/9/2012	8:06:34 PM	Helium valve opened
12/9/2012	8:06:34 PM	Main Vac valve opened
12/9/2012	8:06:34 PM	Helium MFC set to  20.000000
12/9/2012	8:06:34 PM	H2 MFC set to  0.000000
12/9/2012	8:06:34 PM	BCl3 MFC set to  0.000000
12/9/2012	8:06:34 PM	PH3 MFC set to  0.000000
12/9/2012	8:06:34 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:06:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:06:34 PM	Tube furnace set to 150
12/9/2012	8:07:04 PM	Helium valve closed
12/9/2012	8:07:04 PM	H2 valve closed
12/9/2012	8:07:04 PM	BCl3 valve closed
12/9/2012	8:07:04 PM	PH3 valve closed
12/9/2012	8:07:04 PM	SiCl4 pre valve closed
12/9/2012	8:07:04 PM	SiCl4 post valve closed
12/9/2012	8:07:04 PM	Bypass valve closed
12/9/2012	8:07:04 PM	Bubbler valve closed
12/9/2012	8:07:04 PM	Main Vac valve opened
12/9/2012	8:07:04 PM	Helium MFC set to  0.000000
12/9/2012	8:07:04 PM	H2 MFC set to  0.000000
12/9/2012	8:07:04 PM	BCl3 MFC set to  0.000000
12/9/2012	8:07:04 PM	PH3 MFC set to  0.000000
12/9/2012	8:07:04 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:07:04 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:07:04 PM	Tube furnace set to 150
12/9/2012	8:07:34 PM	H2 valve closed
12/9/2012	8:07:34 PM	BCl3 valve closed
12/9/2012	8:07:34 PM	PH3 valve closed
12/9/2012	8:07:34 PM	SiCl4 pre valve closed
12/9/2012	8:07:34 PM	SiCl4 post valve closed
12/9/2012	8:07:34 PM	Bypass valve closed
12/9/2012	8:07:34 PM	Bubbler valve closed
12/9/2012	8:07:34 PM	Helium valve opened
12/9/2012	8:07:34 PM	Main Vac valve opened
12/9/2012	8:07:34 PM	Helium MFC set to  20.000000
12/9/2012	8:07:34 PM	H2 MFC set to  0.000000
12/9/2012	8:07:34 PM	BCl3 MFC set to  0.000000
12/9/2012	8:07:34 PM	PH3 MFC set to  0.000000
12/9/2012	8:07:34 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:07:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:07:34 PM	Tube furnace set to 150
12/9/2012	8:08:04 PM	Helium valve closed
12/9/2012	8:08:04 PM	H2 valve closed
12/9/2012	8:08:04 PM	BCl3 valve closed
12/9/2012	8:08:04 PM	PH3 valve closed
12/9/2012	8:08:04 PM	SiCl4 pre valve closed
12/9/2012	8:08:04 PM	SiCl4 post valve closed
12/9/2012	8:08:04 PM	Bypass valve closed
12/9/2012	8:08:04 PM	Bubbler valve closed
12/9/2012	8:08:04 PM	Main Vac valve opened
12/9/2012	8:08:04 PM	Helium MFC set to  0.000000
12/9/2012	8:08:04 PM	H2 MFC set to  0.000000
12/9/2012	8:08:04 PM	BCl3 MFC set to  0.000000
12/9/2012	8:08:04 PM	PH3 MFC set to  0.000000
12/9/2012	8:08:04 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:08:04 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:08:04 PM	Tube furnace set to 150
12/9/2012	8:08:34 PM	H2 valve closed
12/9/2012	8:08:34 PM	BCl3 valve closed
12/9/2012	8:08:35 PM	PH3 valve closed
12/9/2012	8:08:35 PM	SiCl4 pre valve closed
12/9/2012	8:08:35 PM	SiCl4 post valve closed
12/9/2012	8:08:35 PM	Bypass valve closed
12/9/2012	8:08:35 PM	Bubbler valve closed
12/9/2012	8:08:35 PM	Helium valve opened
12/9/2012	8:08:35 PM	Main Vac valve opened
12/9/2012	8:08:35 PM	Helium MFC set to  20.000000
12/9/2012	8:08:35 PM	H2 MFC set to  0.000000
12/9/2012	8:08:35 PM	BCl3 MFC set to  0.000000
12/9/2012	8:08:35 PM	PH3 MFC set to  0.000000
12/9/2012	8:08:35 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:08:35 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:08:35 PM	Tube furnace set to 150
12/9/2012	8:09:05 PM	Helium valve closed
12/9/2012	8:09:05 PM	H2 valve closed
12/9/2012	8:09:05 PM	BCl3 valve closed
12/9/2012	8:09:05 PM	PH3 valve closed
12/9/2012	8:09:05 PM	SiCl4 pre valve closed
12/9/2012	8:09:05 PM	SiCl4 post valve closed
12/9/2012	8:09:05 PM	Bypass valve closed
12/9/2012	8:09:05 PM	Bubbler valve closed
12/9/2012	8:09:05 PM	Main Vac valve opened
12/9/2012	8:09:05 PM	Helium MFC set to  0.000000
12/9/2012	8:09:05 PM	H2 MFC set to  0.000000
12/9/2012	8:09:05 PM	BCl3 MFC set to  0.000000
12/9/2012	8:09:05 PM	PH3 MFC set to  0.000000
12/9/2012	8:09:05 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:09:05 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:09:05 PM	Tube furnace set to 150
12/9/2012	8:09:35 PM	H2 valve closed
12/9/2012	8:09:35 PM	BCl3 valve closed
12/9/2012	8:09:35 PM	PH3 valve closed
12/9/2012	8:09:35 PM	SiCl4 pre valve closed
12/9/2012	8:09:35 PM	SiCl4 post valve closed
12/9/2012	8:09:35 PM	Bypass valve closed
12/9/2012	8:09:35 PM	Bubbler valve closed
12/9/2012	8:09:35 PM	Helium valve opened
12/9/2012	8:09:35 PM	Main Vac valve opened
12/9/2012	8:09:35 PM	Helium MFC set to  20.000000
12/9/2012	8:09:35 PM	H2 MFC set to  0.000000
12/9/2012	8:09:35 PM	BCl3 MFC set to  0.000000
12/9/2012	8:09:35 PM	PH3 MFC set to  0.000000
12/9/2012	8:09:35 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:09:35 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:09:35 PM	Tube furnace set to 150
12/9/2012	8:10:05 PM	Helium valve closed
12/9/2012	8:10:05 PM	H2 valve closed
12/9/2012	8:10:05 PM	BCl3 valve closed
12/9/2012	8:10:05 PM	PH3 valve closed
12/9/2012	8:10:05 PM	SiCl4 pre valve closed
12/9/2012	8:10:05 PM	SiCl4 post valve closed
12/9/2012	8:10:05 PM	Bypass valve closed
12/9/2012	8:10:05 PM	Bubbler valve closed
12/9/2012	8:10:05 PM	Main Vac valve opened
12/9/2012	8:10:05 PM	Helium MFC set to  0.000000
12/9/2012	8:10:05 PM	H2 MFC set to  0.000000
12/9/2012	8:10:05 PM	BCl3 MFC set to  0.000000
12/9/2012	8:10:05 PM	PH3 MFC set to  0.000000
12/9/2012	8:10:05 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:10:05 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:10:05 PM	Tube furnace set to 150
12/9/2012	8:10:06 PM	Run finished at 8:10 PM
12/9/2012	8:13:18 PM	Main Vac valve closed
12/9/2012	8:13:24 PM	Main Vac valve opened
12/9/2012	8:13:33 PM	Recipe started at 8:13 PM
12/9/2012	8:13:33 PM	Helium valve closed
12/9/2012	8:13:33 PM	H2 valve closed
12/9/2012	8:13:33 PM	BCl3 valve closed
12/9/2012	8:13:33 PM	PH3 valve closed
12/9/2012	8:13:33 PM	SiCl4 pre valve closed
12/9/2012	8:13:33 PM	SiCl4 post valve closed
12/9/2012	8:13:33 PM	Bypass valve closed
12/9/2012	8:13:33 PM	Bubbler valve closed
12/9/2012	8:13:33 PM	Main Vac valve opened
12/9/2012	8:13:33 PM	Helium MFC set to  0.000000
12/9/2012	8:13:33 PM	H2 MFC set to  0.000000
12/9/2012	8:13:33 PM	BCl3 MFC set to  0.000000
12/9/2012	8:13:33 PM	PH3 MFC set to  0.000000
12/9/2012	8:13:33 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:13:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:13:33 PM	Tube furnace set to 150
12/9/2012	8:14:03 PM	H2 valve closed
12/9/2012	8:14:03 PM	BCl3 valve closed
12/9/2012	8:14:03 PM	PH3 valve closed
12/9/2012	8:14:03 PM	SiCl4 pre valve closed
12/9/2012	8:14:03 PM	SiCl4 post valve closed
12/9/2012	8:14:03 PM	Bypass valve closed
12/9/2012	8:14:03 PM	Bubbler valve closed
12/9/2012	8:14:03 PM	Helium valve opened
12/9/2012	8:14:03 PM	Main Vac valve opened
12/9/2012	8:14:03 PM	Helium MFC set to  20.000000
12/9/2012	8:14:03 PM	H2 MFC set to  0.000000
12/9/2012	8:14:03 PM	BCl3 MFC set to  0.000000
12/9/2012	8:14:03 PM	PH3 MFC set to  0.000000
12/9/2012	8:14:03 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:14:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:14:04 PM	Tube furnace set to 150
12/9/2012	8:14:34 PM	Helium valve closed
12/9/2012	8:14:34 PM	H2 valve closed
12/9/2012	8:14:34 PM	BCl3 valve closed
12/9/2012	8:14:34 PM	PH3 valve closed
12/9/2012	8:14:34 PM	SiCl4 pre valve closed
12/9/2012	8:14:34 PM	SiCl4 post valve closed
12/9/2012	8:14:34 PM	Bypass valve closed
12/9/2012	8:14:34 PM	Bubbler valve closed
12/9/2012	8:14:34 PM	Main Vac valve opened
12/9/2012	8:14:34 PM	Helium MFC set to  0.000000
12/9/2012	8:14:34 PM	H2 MFC set to  0.000000
12/9/2012	8:14:34 PM	BCl3 MFC set to  0.000000
12/9/2012	8:14:34 PM	PH3 MFC set to  0.000000
12/9/2012	8:14:34 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:14:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:14:34 PM	Tube furnace set to 150
12/9/2012	8:15:04 PM	H2 valve closed
12/9/2012	8:15:04 PM	BCl3 valve closed
12/9/2012	8:15:04 PM	PH3 valve closed
12/9/2012	8:15:04 PM	SiCl4 pre valve closed
12/9/2012	8:15:04 PM	SiCl4 post valve closed
12/9/2012	8:15:04 PM	Bypass valve closed
12/9/2012	8:15:04 PM	Bubbler valve closed
12/9/2012	8:15:04 PM	Helium valve opened
12/9/2012	8:15:04 PM	Main Vac valve opened
12/9/2012	8:15:04 PM	Helium MFC set to  20.000000
12/9/2012	8:15:04 PM	H2 MFC set to  0.000000
12/9/2012	8:15:04 PM	BCl3 MFC set to  0.000000
12/9/2012	8:15:04 PM	PH3 MFC set to  0.000000
12/9/2012	8:15:04 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:15:04 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:15:04 PM	Tube furnace set to 150
12/9/2012	8:15:34 PM	Helium valve closed
12/9/2012	8:15:34 PM	H2 valve closed
12/9/2012	8:15:34 PM	BCl3 valve closed
12/9/2012	8:15:34 PM	PH3 valve closed
12/9/2012	8:15:34 PM	SiCl4 pre valve closed
12/9/2012	8:15:34 PM	SiCl4 post valve closed
12/9/2012	8:15:34 PM	Bypass valve closed
12/9/2012	8:15:34 PM	Bubbler valve closed
12/9/2012	8:15:34 PM	Main Vac valve opened
12/9/2012	8:15:34 PM	Helium MFC set to  0.000000
12/9/2012	8:15:34 PM	H2 MFC set to  0.000000
12/9/2012	8:15:34 PM	BCl3 MFC set to  0.000000
12/9/2012	8:15:34 PM	PH3 MFC set to  0.000000
12/9/2012	8:15:34 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:15:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:15:34 PM	Tube furnace set to 150
12/9/2012	8:16:04 PM	H2 valve closed
12/9/2012	8:16:04 PM	BCl3 valve closed
12/9/2012	8:16:04 PM	PH3 valve closed
12/9/2012	8:16:04 PM	SiCl4 pre valve closed
12/9/2012	8:16:04 PM	SiCl4 post valve closed
12/9/2012	8:16:04 PM	Bypass valve closed
12/9/2012	8:16:04 PM	Bubbler valve closed
12/9/2012	8:16:04 PM	Helium valve opened
12/9/2012	8:16:04 PM	Main Vac valve opened
12/9/2012	8:16:04 PM	Helium MFC set to  20.000000
12/9/2012	8:16:04 PM	H2 MFC set to  0.000000
12/9/2012	8:16:04 PM	BCl3 MFC set to  0.000000
12/9/2012	8:16:04 PM	PH3 MFC set to  0.000000
12/9/2012	8:16:04 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:16:04 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:16:05 PM	Tube furnace set to 150
12/9/2012	8:16:35 PM	Helium valve closed
12/9/2012	8:16:35 PM	H2 valve closed
12/9/2012	8:16:35 PM	BCl3 valve closed
12/9/2012	8:16:35 PM	PH3 valve closed
12/9/2012	8:16:35 PM	SiCl4 pre valve closed
12/9/2012	8:16:35 PM	SiCl4 post valve closed
12/9/2012	8:16:35 PM	Bypass valve closed
12/9/2012	8:16:35 PM	Bubbler valve closed
12/9/2012	8:16:35 PM	Main Vac valve opened
12/9/2012	8:16:35 PM	Helium MFC set to  0.000000
12/9/2012	8:16:35 PM	H2 MFC set to  0.000000
12/9/2012	8:16:35 PM	BCl3 MFC set to  0.000000
12/9/2012	8:16:35 PM	PH3 MFC set to  0.000000
12/9/2012	8:16:35 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:16:35 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:16:35 PM	Tube furnace set to 150
12/9/2012	8:17:05 PM	H2 valve closed
12/9/2012	8:17:05 PM	BCl3 valve closed
12/9/2012	8:17:05 PM	PH3 valve closed
12/9/2012	8:17:05 PM	SiCl4 pre valve closed
12/9/2012	8:17:05 PM	SiCl4 post valve closed
12/9/2012	8:17:05 PM	Bypass valve closed
12/9/2012	8:17:05 PM	Bubbler valve closed
12/9/2012	8:17:05 PM	Helium valve opened
12/9/2012	8:17:05 PM	Main Vac valve opened
12/9/2012	8:17:05 PM	Helium MFC set to  20.000000
12/9/2012	8:17:05 PM	H2 MFC set to  0.000000
12/9/2012	8:17:05 PM	BCl3 MFC set to  0.000000
12/9/2012	8:17:05 PM	PH3 MFC set to  0.000000
12/9/2012	8:17:05 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:17:05 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:17:05 PM	Tube furnace set to 150
12/9/2012	8:17:35 PM	Helium valve closed
12/9/2012	8:17:35 PM	H2 valve closed
12/9/2012	8:17:35 PM	BCl3 valve closed
12/9/2012	8:17:35 PM	PH3 valve closed
12/9/2012	8:17:35 PM	SiCl4 pre valve closed
12/9/2012	8:17:35 PM	SiCl4 post valve closed
12/9/2012	8:17:35 PM	Bypass valve closed
12/9/2012	8:17:35 PM	Bubbler valve closed
12/9/2012	8:17:35 PM	Main Vac valve opened
12/9/2012	8:17:35 PM	Helium MFC set to  0.000000
12/9/2012	8:17:35 PM	H2 MFC set to  0.000000
12/9/2012	8:17:35 PM	BCl3 MFC set to  0.000000
12/9/2012	8:17:35 PM	PH3 MFC set to  0.000000
12/9/2012	8:17:35 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:17:35 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:17:35 PM	Tube furnace set to 150
12/9/2012	8:18:05 PM	H2 valve closed
12/9/2012	8:18:05 PM	BCl3 valve closed
12/9/2012	8:18:05 PM	PH3 valve closed
12/9/2012	8:18:05 PM	SiCl4 pre valve closed
12/9/2012	8:18:05 PM	SiCl4 post valve closed
12/9/2012	8:18:05 PM	Bypass valve closed
12/9/2012	8:18:05 PM	Bubbler valve closed
12/9/2012	8:18:05 PM	Helium valve opened
12/9/2012	8:18:05 PM	Main Vac valve opened
12/9/2012	8:18:05 PM	Helium MFC set to  20.000000
12/9/2012	8:18:05 PM	H2 MFC set to  0.000000
12/9/2012	8:18:05 PM	BCl3 MFC set to  0.000000
12/9/2012	8:18:05 PM	PH3 MFC set to  0.000000
12/9/2012	8:18:05 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:18:05 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:18:06 PM	Tube furnace set to 150
12/9/2012	8:18:36 PM	Helium valve closed
12/9/2012	8:18:36 PM	H2 valve closed
12/9/2012	8:18:36 PM	BCl3 valve closed
12/9/2012	8:18:36 PM	PH3 valve closed
12/9/2012	8:18:36 PM	SiCl4 pre valve closed
12/9/2012	8:18:36 PM	SiCl4 post valve closed
12/9/2012	8:18:36 PM	Bypass valve closed
12/9/2012	8:18:36 PM	Bubbler valve closed
12/9/2012	8:18:36 PM	Main Vac valve opened
12/9/2012	8:18:36 PM	Helium MFC set to  0.000000
12/9/2012	8:18:36 PM	H2 MFC set to  0.000000
12/9/2012	8:18:36 PM	BCl3 MFC set to  0.000000
12/9/2012	8:18:36 PM	PH3 MFC set to  0.000000
12/9/2012	8:18:36 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:18:36 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:18:36 PM	Tube furnace set to 150
12/9/2012	8:19:06 PM	H2 valve closed
12/9/2012	8:19:06 PM	BCl3 valve closed
12/9/2012	8:19:06 PM	PH3 valve closed
12/9/2012	8:19:06 PM	SiCl4 pre valve closed
12/9/2012	8:19:06 PM	SiCl4 post valve closed
12/9/2012	8:19:06 PM	Bypass valve closed
12/9/2012	8:19:06 PM	Bubbler valve closed
12/9/2012	8:19:06 PM	Helium valve opened
12/9/2012	8:19:06 PM	Main Vac valve opened
12/9/2012	8:19:06 PM	Helium MFC set to  20.000000
12/9/2012	8:19:06 PM	H2 MFC set to  0.000000
12/9/2012	8:19:06 PM	BCl3 MFC set to  0.000000
12/9/2012	8:19:06 PM	PH3 MFC set to  0.000000
12/9/2012	8:19:06 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:19:06 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:19:06 PM	Tube furnace set to 150
12/9/2012	8:19:36 PM	Helium valve closed
12/9/2012	8:19:36 PM	H2 valve closed
12/9/2012	8:19:36 PM	BCl3 valve closed
12/9/2012	8:19:36 PM	PH3 valve closed
12/9/2012	8:19:36 PM	SiCl4 pre valve closed
12/9/2012	8:19:36 PM	SiCl4 post valve closed
12/9/2012	8:19:36 PM	Bypass valve closed
12/9/2012	8:19:36 PM	Bubbler valve closed
12/9/2012	8:19:36 PM	Main Vac valve opened
12/9/2012	8:19:36 PM	Helium MFC set to  0.000000
12/9/2012	8:19:36 PM	H2 MFC set to  0.000000
12/9/2012	8:19:36 PM	BCl3 MFC set to  0.000000
12/9/2012	8:19:36 PM	PH3 MFC set to  0.000000
12/9/2012	8:19:36 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:19:36 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:19:36 PM	Tube furnace set to 150
12/9/2012	8:20:06 PM	H2 valve closed
12/9/2012	8:20:06 PM	BCl3 valve closed
12/9/2012	8:20:06 PM	PH3 valve closed
12/9/2012	8:20:06 PM	SiCl4 pre valve closed
12/9/2012	8:20:06 PM	SiCl4 post valve closed
12/9/2012	8:20:06 PM	Bypass valve closed
12/9/2012	8:20:06 PM	Bubbler valve closed
12/9/2012	8:20:06 PM	Helium valve opened
12/9/2012	8:20:06 PM	Main Vac valve opened
12/9/2012	8:20:06 PM	Helium MFC set to  20.000000
12/9/2012	8:20:06 PM	H2 MFC set to  0.000000
12/9/2012	8:20:06 PM	BCl3 MFC set to  0.000000
12/9/2012	8:20:06 PM	PH3 MFC set to  0.000000
12/9/2012	8:20:06 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:20:06 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:20:07 PM	Tube furnace set to 150
12/9/2012	8:20:37 PM	Helium valve closed
12/9/2012	8:20:37 PM	H2 valve closed
12/9/2012	8:20:37 PM	BCl3 valve closed
12/9/2012	8:20:37 PM	PH3 valve closed
12/9/2012	8:20:37 PM	SiCl4 pre valve closed
12/9/2012	8:20:37 PM	SiCl4 post valve closed
12/9/2012	8:20:37 PM	Bypass valve closed
12/9/2012	8:20:37 PM	Bubbler valve closed
12/9/2012	8:20:37 PM	Main Vac valve opened
12/9/2012	8:20:37 PM	Helium MFC set to  0.000000
12/9/2012	8:20:37 PM	H2 MFC set to  0.000000
12/9/2012	8:20:37 PM	BCl3 MFC set to  0.000000
12/9/2012	8:20:37 PM	PH3 MFC set to  0.000000
12/9/2012	8:20:37 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:20:37 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:20:37 PM	Tube furnace set to 150
12/9/2012	8:21:07 PM	H2 valve closed
12/9/2012	8:21:07 PM	BCl3 valve closed
12/9/2012	8:21:07 PM	PH3 valve closed
12/9/2012	8:21:07 PM	SiCl4 pre valve closed
12/9/2012	8:21:07 PM	SiCl4 post valve closed
12/9/2012	8:21:07 PM	Bypass valve closed
12/9/2012	8:21:07 PM	Bubbler valve closed
12/9/2012	8:21:07 PM	Helium valve opened
12/9/2012	8:21:07 PM	Main Vac valve opened
12/9/2012	8:21:07 PM	Helium MFC set to  20.000000
12/9/2012	8:21:07 PM	H2 MFC set to  0.000000
12/9/2012	8:21:07 PM	BCl3 MFC set to  0.000000
12/9/2012	8:21:07 PM	PH3 MFC set to  0.000000
12/9/2012	8:21:07 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:21:07 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:21:07 PM	Tube furnace set to 150
12/9/2012	8:21:37 PM	Helium valve closed
12/9/2012	8:21:37 PM	H2 valve closed
12/9/2012	8:21:37 PM	BCl3 valve closed
12/9/2012	8:21:37 PM	PH3 valve closed
12/9/2012	8:21:37 PM	SiCl4 pre valve closed
12/9/2012	8:21:37 PM	SiCl4 post valve closed
12/9/2012	8:21:37 PM	Bypass valve closed
12/9/2012	8:21:37 PM	Bubbler valve closed
12/9/2012	8:21:37 PM	Main Vac valve opened
12/9/2012	8:21:37 PM	Helium MFC set to  0.000000
12/9/2012	8:21:37 PM	H2 MFC set to  0.000000
12/9/2012	8:21:37 PM	BCl3 MFC set to  0.000000
12/9/2012	8:21:37 PM	PH3 MFC set to  0.000000
12/9/2012	8:21:37 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:21:37 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:21:37 PM	Tube furnace set to 150
12/9/2012	8:22:07 PM	H2 valve closed
12/9/2012	8:22:07 PM	BCl3 valve closed
12/9/2012	8:22:07 PM	PH3 valve closed
12/9/2012	8:22:07 PM	SiCl4 pre valve closed
12/9/2012	8:22:07 PM	SiCl4 post valve closed
12/9/2012	8:22:07 PM	Bypass valve closed
12/9/2012	8:22:07 PM	Bubbler valve closed
12/9/2012	8:22:07 PM	Helium valve opened
12/9/2012	8:22:07 PM	Main Vac valve opened
12/9/2012	8:22:07 PM	Helium MFC set to  20.000000
12/9/2012	8:22:07 PM	H2 MFC set to  0.000000
12/9/2012	8:22:07 PM	BCl3 MFC set to  0.000000
12/9/2012	8:22:07 PM	PH3 MFC set to  0.000000
12/9/2012	8:22:07 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:22:07 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:22:08 PM	Tube furnace set to 150
12/9/2012	8:22:38 PM	Helium valve closed
12/9/2012	8:22:38 PM	H2 valve closed
12/9/2012	8:22:38 PM	BCl3 valve closed
12/9/2012	8:22:38 PM	PH3 valve closed
12/9/2012	8:22:38 PM	SiCl4 pre valve closed
12/9/2012	8:22:38 PM	SiCl4 post valve closed
12/9/2012	8:22:38 PM	Bypass valve closed
12/9/2012	8:22:38 PM	Bubbler valve closed
12/9/2012	8:22:38 PM	Main Vac valve opened
12/9/2012	8:22:38 PM	Helium MFC set to  0.000000
12/9/2012	8:22:38 PM	H2 MFC set to  0.000000
12/9/2012	8:22:38 PM	BCl3 MFC set to  0.000000
12/9/2012	8:22:38 PM	PH3 MFC set to  0.000000
12/9/2012	8:22:38 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:22:38 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:22:38 PM	Tube furnace set to 150
12/9/2012	8:23:08 PM	H2 valve closed
12/9/2012	8:23:08 PM	BCl3 valve closed
12/9/2012	8:23:08 PM	PH3 valve closed
12/9/2012	8:23:08 PM	SiCl4 pre valve closed
12/9/2012	8:23:08 PM	SiCl4 post valve closed
12/9/2012	8:23:08 PM	Bypass valve closed
12/9/2012	8:23:08 PM	Bubbler valve closed
12/9/2012	8:23:08 PM	Helium valve opened
12/9/2012	8:23:08 PM	Main Vac valve opened
12/9/2012	8:23:08 PM	Helium MFC set to  20.000000
12/9/2012	8:23:08 PM	H2 MFC set to  0.000000
12/9/2012	8:23:08 PM	BCl3 MFC set to  0.000000
12/9/2012	8:23:08 PM	PH3 MFC set to  0.000000
12/9/2012	8:23:08 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:23:08 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:23:08 PM	Tube furnace set to 150
12/9/2012	8:23:38 PM	Helium valve closed
12/9/2012	8:23:38 PM	H2 valve closed
12/9/2012	8:23:38 PM	BCl3 valve closed
12/9/2012	8:23:38 PM	PH3 valve closed
12/9/2012	8:23:38 PM	SiCl4 pre valve closed
12/9/2012	8:23:38 PM	SiCl4 post valve closed
12/9/2012	8:23:38 PM	Bypass valve closed
12/9/2012	8:23:38 PM	Bubbler valve closed
12/9/2012	8:23:38 PM	Main Vac valve opened
12/9/2012	8:23:38 PM	Helium MFC set to  0.000000
12/9/2012	8:23:38 PM	H2 MFC set to  0.000000
12/9/2012	8:23:38 PM	BCl3 MFC set to  0.000000
12/9/2012	8:23:38 PM	PH3 MFC set to  0.000000
12/9/2012	8:23:38 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:23:38 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:23:38 PM	Tube furnace set to 150
12/9/2012	8:23:39 PM	Run finished at 8:23 PM
12/9/2012	8:24:02 PM	Main Vac valve closed
12/9/2012	8:24:13 PM	Main Vac valve opened
12/9/2012	8:24:23 PM	Recipe started at 8:24 PM
12/9/2012	8:24:23 PM	Helium valve closed
12/9/2012	8:24:23 PM	H2 valve closed
12/9/2012	8:24:23 PM	BCl3 valve closed
12/9/2012	8:24:23 PM	PH3 valve closed
12/9/2012	8:24:23 PM	SiCl4 pre valve closed
12/9/2012	8:24:23 PM	SiCl4 post valve closed
12/9/2012	8:24:23 PM	Bypass valve closed
12/9/2012	8:24:23 PM	Bubbler valve closed
12/9/2012	8:24:23 PM	Main Vac valve opened
12/9/2012	8:24:23 PM	Helium MFC set to  0.000000
12/9/2012	8:24:23 PM	H2 MFC set to  0.000000
12/9/2012	8:24:23 PM	BCl3 MFC set to  0.000000
12/9/2012	8:24:23 PM	PH3 MFC set to  0.000000
12/9/2012	8:24:23 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:24:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:24:23 PM	Tube furnace set to 150
12/9/2012	8:24:53 PM	H2 valve closed
12/9/2012	8:24:53 PM	BCl3 valve closed
12/9/2012	8:24:53 PM	PH3 valve closed
12/9/2012	8:24:53 PM	SiCl4 pre valve closed
12/9/2012	8:24:53 PM	SiCl4 post valve closed
12/9/2012	8:24:53 PM	Bypass valve closed
12/9/2012	8:24:53 PM	Bubbler valve closed
12/9/2012	8:24:53 PM	Helium valve opened
12/9/2012	8:24:53 PM	Main Vac valve opened
12/9/2012	8:24:53 PM	Helium MFC set to  20.000000
12/9/2012	8:24:53 PM	H2 MFC set to  0.000000
12/9/2012	8:24:53 PM	BCl3 MFC set to  0.000000
12/9/2012	8:24:53 PM	PH3 MFC set to  0.000000
12/9/2012	8:24:53 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:24:53 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:24:54 PM	Tube furnace set to 150
12/9/2012	8:25:24 PM	Helium valve closed
12/9/2012	8:25:24 PM	H2 valve closed
12/9/2012	8:25:24 PM	BCl3 valve closed
12/9/2012	8:25:24 PM	PH3 valve closed
12/9/2012	8:25:24 PM	SiCl4 pre valve closed
12/9/2012	8:25:24 PM	SiCl4 post valve closed
12/9/2012	8:25:24 PM	Bypass valve closed
12/9/2012	8:25:24 PM	Bubbler valve closed
12/9/2012	8:25:24 PM	Main Vac valve opened
12/9/2012	8:25:24 PM	Helium MFC set to  0.000000
12/9/2012	8:25:24 PM	H2 MFC set to  0.000000
12/9/2012	8:25:24 PM	BCl3 MFC set to  0.000000
12/9/2012	8:25:24 PM	PH3 MFC set to  0.000000
12/9/2012	8:25:24 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:25:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:25:24 PM	Tube furnace set to 150
12/9/2012	8:25:54 PM	H2 valve closed
12/9/2012	8:25:54 PM	BCl3 valve closed
12/9/2012	8:25:54 PM	PH3 valve closed
12/9/2012	8:25:54 PM	SiCl4 pre valve closed
12/9/2012	8:25:54 PM	SiCl4 post valve closed
12/9/2012	8:25:54 PM	Bypass valve closed
12/9/2012	8:25:54 PM	Bubbler valve closed
12/9/2012	8:25:54 PM	Helium valve opened
12/9/2012	8:25:54 PM	Main Vac valve opened
12/9/2012	8:25:54 PM	Helium MFC set to  20.000000
12/9/2012	8:25:54 PM	H2 MFC set to  0.000000
12/9/2012	8:25:54 PM	BCl3 MFC set to  0.000000
12/9/2012	8:25:54 PM	PH3 MFC set to  0.000000
12/9/2012	8:25:54 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:25:54 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:25:54 PM	Tube furnace set to 150
12/9/2012	8:26:24 PM	Helium valve closed
12/9/2012	8:26:24 PM	H2 valve closed
12/9/2012	8:26:24 PM	BCl3 valve closed
12/9/2012	8:26:24 PM	PH3 valve closed
12/9/2012	8:26:24 PM	SiCl4 pre valve closed
12/9/2012	8:26:24 PM	SiCl4 post valve closed
12/9/2012	8:26:24 PM	Bypass valve closed
12/9/2012	8:26:24 PM	Bubbler valve closed
12/9/2012	8:26:24 PM	Main Vac valve opened
12/9/2012	8:26:24 PM	Helium MFC set to  0.000000
12/9/2012	8:26:24 PM	H2 MFC set to  0.000000
12/9/2012	8:26:24 PM	BCl3 MFC set to  0.000000
12/9/2012	8:26:24 PM	PH3 MFC set to  0.000000
12/9/2012	8:26:24 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:26:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:26:24 PM	Tube furnace set to 150
12/9/2012	8:26:54 PM	H2 valve closed
12/9/2012	8:26:54 PM	BCl3 valve closed
12/9/2012	8:26:54 PM	PH3 valve closed
12/9/2012	8:26:54 PM	SiCl4 pre valve closed
12/9/2012	8:26:54 PM	SiCl4 post valve closed
12/9/2012	8:26:54 PM	Bypass valve closed
12/9/2012	8:26:54 PM	Bubbler valve closed
12/9/2012	8:26:54 PM	Helium valve opened
12/9/2012	8:26:54 PM	Main Vac valve opened
12/9/2012	8:26:54 PM	Helium MFC set to  20.000000
12/9/2012	8:26:54 PM	H2 MFC set to  0.000000
12/9/2012	8:26:54 PM	BCl3 MFC set to  0.000000
12/9/2012	8:26:54 PM	PH3 MFC set to  0.000000
12/9/2012	8:26:54 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:26:54 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:26:55 PM	Tube furnace set to 150
12/9/2012	8:27:25 PM	Helium valve closed
12/9/2012	8:27:25 PM	H2 valve closed
12/9/2012	8:27:25 PM	BCl3 valve closed
12/9/2012	8:27:25 PM	PH3 valve closed
12/9/2012	8:27:25 PM	SiCl4 pre valve closed
12/9/2012	8:27:25 PM	SiCl4 post valve closed
12/9/2012	8:27:25 PM	Bypass valve closed
12/9/2012	8:27:25 PM	Bubbler valve closed
12/9/2012	8:27:25 PM	Main Vac valve opened
12/9/2012	8:27:25 PM	Helium MFC set to  0.000000
12/9/2012	8:27:25 PM	H2 MFC set to  0.000000
12/9/2012	8:27:25 PM	BCl3 MFC set to  0.000000
12/9/2012	8:27:25 PM	PH3 MFC set to  0.000000
12/9/2012	8:27:25 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:27:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:27:25 PM	Tube furnace set to 150
12/9/2012	8:27:55 PM	H2 valve closed
12/9/2012	8:27:55 PM	BCl3 valve closed
12/9/2012	8:27:55 PM	PH3 valve closed
12/9/2012	8:27:55 PM	SiCl4 pre valve closed
12/9/2012	8:27:55 PM	SiCl4 post valve closed
12/9/2012	8:27:55 PM	Bypass valve closed
12/9/2012	8:27:55 PM	Bubbler valve closed
12/9/2012	8:27:55 PM	Helium valve opened
12/9/2012	8:27:55 PM	Main Vac valve opened
12/9/2012	8:27:55 PM	Helium MFC set to  20.000000
12/9/2012	8:27:55 PM	H2 MFC set to  0.000000
12/9/2012	8:27:55 PM	BCl3 MFC set to  0.000000
12/9/2012	8:27:55 PM	PH3 MFC set to  0.000000
12/9/2012	8:27:55 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:27:55 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:27:55 PM	Tube furnace set to 150
12/9/2012	8:28:25 PM	Helium valve closed
12/9/2012	8:28:25 PM	H2 valve closed
12/9/2012	8:28:25 PM	BCl3 valve closed
12/9/2012	8:28:25 PM	PH3 valve closed
12/9/2012	8:28:25 PM	SiCl4 pre valve closed
12/9/2012	8:28:25 PM	SiCl4 post valve closed
12/9/2012	8:28:25 PM	Bypass valve closed
12/9/2012	8:28:25 PM	Bubbler valve closed
12/9/2012	8:28:25 PM	Main Vac valve opened
12/9/2012	8:28:25 PM	Helium MFC set to  0.000000
12/9/2012	8:28:25 PM	H2 MFC set to  0.000000
12/9/2012	8:28:25 PM	BCl3 MFC set to  0.000000
12/9/2012	8:28:25 PM	PH3 MFC set to  0.000000
12/9/2012	8:28:25 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:28:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:28:25 PM	Tube furnace set to 150
12/9/2012	8:28:53 PM	H2 valve closed
12/9/2012	8:28:53 PM	BCl3 valve closed
12/9/2012	8:28:53 PM	PH3 valve closed
12/9/2012	8:28:53 PM	SiCl4 pre valve closed
12/9/2012	8:28:53 PM	SiCl4 post valve closed
12/9/2012	8:28:53 PM	Bypass valve closed
12/9/2012	8:28:53 PM	Bubbler valve closed
12/9/2012	8:28:53 PM	Helium valve opened
12/9/2012	8:28:53 PM	Main Vac valve opened
12/9/2012	8:28:53 PM	Helium MFC set to  20.000000
12/9/2012	8:28:53 PM	H2 MFC set to  0.000000
12/9/2012	8:28:53 PM	BCl3 MFC set to  0.000000
12/9/2012	8:28:53 PM	PH3 MFC set to  0.000000
12/9/2012	8:28:53 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:28:53 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:28:54 PM	Tube furnace set to 150
12/9/2012	8:29:24 PM	Helium valve closed
12/9/2012	8:29:24 PM	H2 valve closed
12/9/2012	8:29:24 PM	BCl3 valve closed
12/9/2012	8:29:24 PM	PH3 valve closed
12/9/2012	8:29:24 PM	SiCl4 pre valve closed
12/9/2012	8:29:24 PM	SiCl4 post valve closed
12/9/2012	8:29:24 PM	Bypass valve closed
12/9/2012	8:29:24 PM	Bubbler valve closed
12/9/2012	8:29:24 PM	Main Vac valve opened
12/9/2012	8:29:24 PM	Helium MFC set to  0.000000
12/9/2012	8:29:24 PM	H2 MFC set to  0.000000
12/9/2012	8:29:24 PM	BCl3 MFC set to  0.000000
12/9/2012	8:29:24 PM	PH3 MFC set to  0.000000
12/9/2012	8:29:24 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:29:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:29:24 PM	Tube furnace set to 150
12/9/2012	8:29:54 PM	H2 valve closed
12/9/2012	8:29:54 PM	BCl3 valve closed
12/9/2012	8:29:54 PM	PH3 valve closed
12/9/2012	8:29:54 PM	SiCl4 pre valve closed
12/9/2012	8:29:54 PM	SiCl4 post valve closed
12/9/2012	8:29:54 PM	Bypass valve closed
12/9/2012	8:29:54 PM	Bubbler valve closed
12/9/2012	8:29:54 PM	Helium valve opened
12/9/2012	8:29:54 PM	Main Vac valve opened
12/9/2012	8:29:54 PM	Helium MFC set to  20.000000
12/9/2012	8:29:54 PM	H2 MFC set to  0.000000
12/9/2012	8:29:54 PM	BCl3 MFC set to  0.000000
12/9/2012	8:29:54 PM	PH3 MFC set to  0.000000
12/9/2012	8:29:54 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:29:54 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:29:54 PM	Tube furnace set to 150
12/9/2012	8:30:24 PM	Helium valve closed
12/9/2012	8:30:24 PM	H2 valve closed
12/9/2012	8:30:24 PM	BCl3 valve closed
12/9/2012	8:30:24 PM	PH3 valve closed
12/9/2012	8:30:24 PM	SiCl4 pre valve closed
12/9/2012	8:30:24 PM	SiCl4 post valve closed
12/9/2012	8:30:24 PM	Bypass valve closed
12/9/2012	8:30:24 PM	Bubbler valve closed
12/9/2012	8:30:24 PM	Main Vac valve opened
12/9/2012	8:30:24 PM	Helium MFC set to  0.000000
12/9/2012	8:30:24 PM	H2 MFC set to  0.000000
12/9/2012	8:30:24 PM	BCl3 MFC set to  0.000000
12/9/2012	8:30:24 PM	PH3 MFC set to  0.000000
12/9/2012	8:30:24 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:30:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:30:24 PM	Tube furnace set to 150
12/9/2012	8:30:54 PM	H2 valve closed
12/9/2012	8:30:54 PM	BCl3 valve closed
12/9/2012	8:30:54 PM	PH3 valve closed
12/9/2012	8:30:54 PM	SiCl4 pre valve closed
12/9/2012	8:30:54 PM	SiCl4 post valve closed
12/9/2012	8:30:54 PM	Bypass valve closed
12/9/2012	8:30:54 PM	Bubbler valve closed
12/9/2012	8:30:54 PM	Helium valve opened
12/9/2012	8:30:54 PM	Main Vac valve opened
12/9/2012	8:30:54 PM	Helium MFC set to  20.000000
12/9/2012	8:30:54 PM	H2 MFC set to  0.000000
12/9/2012	8:30:54 PM	BCl3 MFC set to  0.000000
12/9/2012	8:30:54 PM	PH3 MFC set to  0.000000
12/9/2012	8:30:54 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:30:54 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:30:55 PM	Tube furnace set to 150
12/9/2012	8:31:25 PM	Helium valve closed
12/9/2012	8:31:25 PM	H2 valve closed
12/9/2012	8:31:25 PM	BCl3 valve closed
12/9/2012	8:31:25 PM	PH3 valve closed
12/9/2012	8:31:25 PM	SiCl4 pre valve closed
12/9/2012	8:31:25 PM	SiCl4 post valve closed
12/9/2012	8:31:25 PM	Bypass valve closed
12/9/2012	8:31:25 PM	Bubbler valve closed
12/9/2012	8:31:25 PM	Main Vac valve opened
12/9/2012	8:31:25 PM	Helium MFC set to  0.000000
12/9/2012	8:31:25 PM	H2 MFC set to  0.000000
12/9/2012	8:31:25 PM	BCl3 MFC set to  0.000000
12/9/2012	8:31:25 PM	PH3 MFC set to  0.000000
12/9/2012	8:31:25 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:31:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:31:25 PM	Tube furnace set to 150
12/9/2012	8:31:55 PM	H2 valve closed
12/9/2012	8:31:55 PM	BCl3 valve closed
12/9/2012	8:31:55 PM	PH3 valve closed
12/9/2012	8:31:55 PM	SiCl4 pre valve closed
12/9/2012	8:31:55 PM	SiCl4 post valve closed
12/9/2012	8:31:55 PM	Bypass valve closed
12/9/2012	8:31:55 PM	Bubbler valve closed
12/9/2012	8:31:55 PM	Helium valve opened
12/9/2012	8:31:55 PM	Main Vac valve opened
12/9/2012	8:31:55 PM	Helium MFC set to  20.000000
12/9/2012	8:31:55 PM	H2 MFC set to  0.000000
12/9/2012	8:31:55 PM	BCl3 MFC set to  0.000000
12/9/2012	8:31:55 PM	PH3 MFC set to  0.000000
12/9/2012	8:31:55 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:31:55 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:31:55 PM	Tube furnace set to 150
12/9/2012	8:32:25 PM	Helium valve closed
12/9/2012	8:32:25 PM	H2 valve closed
12/9/2012	8:32:25 PM	BCl3 valve closed
12/9/2012	8:32:25 PM	PH3 valve closed
12/9/2012	8:32:25 PM	SiCl4 pre valve closed
12/9/2012	8:32:25 PM	SiCl4 post valve closed
12/9/2012	8:32:25 PM	Bypass valve closed
12/9/2012	8:32:25 PM	Bubbler valve closed
12/9/2012	8:32:25 PM	Main Vac valve opened
12/9/2012	8:32:25 PM	Helium MFC set to  0.000000
12/9/2012	8:32:25 PM	H2 MFC set to  0.000000
12/9/2012	8:32:25 PM	BCl3 MFC set to  0.000000
12/9/2012	8:32:25 PM	PH3 MFC set to  0.000000
12/9/2012	8:32:25 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:32:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:32:25 PM	Tube furnace set to 150
12/9/2012	8:32:52 PM	H2 valve closed
12/9/2012	8:32:52 PM	BCl3 valve closed
12/9/2012	8:32:52 PM	PH3 valve closed
12/9/2012	8:32:52 PM	SiCl4 pre valve closed
12/9/2012	8:32:52 PM	SiCl4 post valve closed
12/9/2012	8:32:52 PM	Bypass valve closed
12/9/2012	8:32:52 PM	Bubbler valve closed
12/9/2012	8:32:52 PM	Helium valve opened
12/9/2012	8:32:52 PM	Main Vac valve opened
12/9/2012	8:32:52 PM	Helium MFC set to  20.000000
12/9/2012	8:32:52 PM	H2 MFC set to  0.000000
12/9/2012	8:32:52 PM	BCl3 MFC set to  0.000000
12/9/2012	8:32:52 PM	PH3 MFC set to  0.000000
12/9/2012	8:32:52 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:32:52 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:32:53 PM	Tube furnace set to 150
12/9/2012	8:33:23 PM	Helium valve closed
12/9/2012	8:33:23 PM	H2 valve closed
12/9/2012	8:33:23 PM	BCl3 valve closed
12/9/2012	8:33:23 PM	PH3 valve closed
12/9/2012	8:33:23 PM	SiCl4 pre valve closed
12/9/2012	8:33:23 PM	SiCl4 post valve closed
12/9/2012	8:33:23 PM	Bypass valve closed
12/9/2012	8:33:23 PM	Bubbler valve closed
12/9/2012	8:33:23 PM	Main Vac valve opened
12/9/2012	8:33:23 PM	Helium MFC set to  0.000000
12/9/2012	8:33:23 PM	H2 MFC set to  0.000000
12/9/2012	8:33:23 PM	BCl3 MFC set to  0.000000
12/9/2012	8:33:23 PM	PH3 MFC set to  0.000000
12/9/2012	8:33:23 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:33:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:33:23 PM	Tube furnace set to 150
12/9/2012	8:33:53 PM	H2 valve closed
12/9/2012	8:33:53 PM	BCl3 valve closed
12/9/2012	8:33:53 PM	PH3 valve closed
12/9/2012	8:33:53 PM	SiCl4 pre valve closed
12/9/2012	8:33:53 PM	SiCl4 post valve closed
12/9/2012	8:33:53 PM	Bypass valve closed
12/9/2012	8:33:53 PM	Bubbler valve closed
12/9/2012	8:33:53 PM	Helium valve opened
12/9/2012	8:33:53 PM	Main Vac valve opened
12/9/2012	8:33:53 PM	Helium MFC set to  20.000000
12/9/2012	8:33:53 PM	H2 MFC set to  0.000000
12/9/2012	8:33:53 PM	BCl3 MFC set to  0.000000
12/9/2012	8:33:53 PM	PH3 MFC set to  0.000000
12/9/2012	8:33:53 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:33:53 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:33:53 PM	Tube furnace set to 150
12/9/2012	8:34:23 PM	Helium valve closed
12/9/2012	8:34:23 PM	H2 valve closed
12/9/2012	8:34:23 PM	BCl3 valve closed
12/9/2012	8:34:23 PM	PH3 valve closed
12/9/2012	8:34:23 PM	SiCl4 pre valve closed
12/9/2012	8:34:23 PM	SiCl4 post valve closed
12/9/2012	8:34:23 PM	Bypass valve closed
12/9/2012	8:34:23 PM	Bubbler valve closed
12/9/2012	8:34:23 PM	Main Vac valve opened
12/9/2012	8:34:23 PM	Helium MFC set to  0.000000
12/9/2012	8:34:23 PM	H2 MFC set to  0.000000
12/9/2012	8:34:23 PM	BCl3 MFC set to  0.000000
12/9/2012	8:34:23 PM	PH3 MFC set to  0.000000
12/9/2012	8:34:23 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:34:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:34:23 PM	Tube furnace set to 150
12/9/2012	8:34:24 PM	Run finished at 8:34 PM
12/9/2012	8:34:47 PM	Main Vac valve closed
12/9/2012	8:34:58 PM	Main Vac valve opened
12/9/2012	8:35:56 PM	Recipe started at 8:35 PM
12/9/2012	8:35:56 PM	Helium valve closed
12/9/2012	8:35:56 PM	H2 valve closed
12/9/2012	8:35:56 PM	BCl3 valve closed
12/9/2012	8:35:56 PM	PH3 valve closed
12/9/2012	8:35:56 PM	SiCl4 pre valve closed
12/9/2012	8:35:56 PM	SiCl4 post valve closed
12/9/2012	8:35:56 PM	Main Vac valve closed
12/9/2012	8:35:56 PM	Bypass valve closed
12/9/2012	8:35:56 PM	Bubbler valve closed
12/9/2012	8:35:56 PM	Helium MFC set to  0.000000
12/9/2012	8:35:56 PM	H2 MFC set to  0.000000
12/9/2012	8:35:56 PM	BCl3 MFC set to  0.000000
12/9/2012	8:35:57 PM	PH3 MFC set to  0.000000
12/9/2012	8:35:57 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:35:57 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:35:57 PM	Tube furnace set to 0
12/9/2012	8:36:00 PM	Helium valve closed
12/9/2012	8:36:00 PM	BCl3 valve closed
12/9/2012	8:36:00 PM	PH3 valve closed
12/9/2012	8:36:00 PM	SiCl4 pre valve closed
12/9/2012	8:36:00 PM	SiCl4 post valve closed
12/9/2012	8:36:00 PM	Main Vac valve closed
12/9/2012	8:36:00 PM	Bypass valve closed
12/9/2012	8:36:00 PM	Bubbler valve closed
12/9/2012	8:36:00 PM	H2 valve opened
12/9/2012	8:36:00 PM	Helium MFC set to  0.000000
12/9/2012	8:36:00 PM	H2 MFC set to  500.000000
12/9/2012	8:36:00 PM	BCl3 MFC set to  0.000000
12/9/2012	8:36:00 PM	PH3 MFC set to  0.000000
12/9/2012	8:36:00 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:36:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:36:00 PM	Tube furnace set to 0
12/9/2012	8:37:12 PM	Helium valve closed
12/9/2012	8:37:12 PM	BCl3 valve closed
12/9/2012	8:37:12 PM	PH3 valve closed
12/9/2012	8:37:12 PM	SiCl4 pre valve closed
12/9/2012	8:37:12 PM	SiCl4 post valve closed
12/9/2012	8:37:12 PM	Main Vac valve closed
12/9/2012	8:37:12 PM	Bypass valve closed
12/9/2012	8:37:12 PM	H2 valve opened
12/9/2012	8:37:12 PM	Bubbler valve opened
12/9/2012	8:37:12 PM	Helium MFC set to  0.000000
12/9/2012	8:37:12 PM	H2 MFC set to  500.000000
12/9/2012	8:37:12 PM	BCl3 MFC set to  0.000000
12/9/2012	8:37:12 PM	PH3 MFC set to  0.000000
12/9/2012	8:37:12 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:37:12 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:37:12 PM	Tube furnace set to 0
12/9/2012	8:37:13 PM	Helium valve closed
12/9/2012	8:37:13 PM	BCl3 valve closed
12/9/2012	8:37:13 PM	PH3 valve closed
12/9/2012	8:37:13 PM	SiCl4 pre valve closed
12/9/2012	8:37:13 PM	SiCl4 post valve closed
12/9/2012	8:37:13 PM	Main Vac valve closed
12/9/2012	8:37:13 PM	Bypass valve closed
12/9/2012	8:37:13 PM	H2 valve opened
12/9/2012	8:37:13 PM	Bubbler valve opened
12/9/2012	8:37:13 PM	Helium MFC set to  0.000000
12/9/2012	8:37:13 PM	H2 MFC set to  450.000000
12/9/2012	8:37:13 PM	BCl3 MFC set to  0.000000
12/9/2012	8:37:13 PM	PH3 MFC set to  0.000000
12/9/2012	8:37:13 PM	SiCl4 MFC set to  0.000000
12/9/2012	8:37:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	8:37:13 PM	Tube furnace set to 1000
12/9/2012	9:02:13 PM	Helium valve closed
12/9/2012	9:02:13 PM	PH3 valve closed
12/9/2012	9:02:13 PM	Main Vac valve closed
12/9/2012	9:02:13 PM	Bypass valve closed
12/9/2012	9:02:13 PM	H2 valve opened
12/9/2012	9:02:13 PM	BCl3 valve opened
12/9/2012	9:02:13 PM	SiCl4 pre valve opened
12/9/2012	9:02:13 PM	SiCl4 post valve opened
12/9/2012	9:02:13 PM	Bubbler valve opened
12/9/2012	9:02:13 PM	Helium MFC set to  0.000000
12/9/2012	9:02:13 PM	H2 MFC set to  450.000000
12/9/2012	9:02:13 PM	BCl3 MFC set to  1.500000
12/9/2012	9:02:13 PM	PH3 MFC set to  0.000000
12/9/2012	9:02:13 PM	SiCl4 MFC set to  50.000000
12/9/2012	9:02:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:02:14 PM	Tube furnace set to 1000
12/9/2012	9:07:14 PM	Helium valve closed
12/9/2012	9:07:14 PM	BCl3 valve closed
12/9/2012	9:07:14 PM	PH3 valve closed
12/9/2012	9:07:14 PM	SiCl4 pre valve closed
12/9/2012	9:07:14 PM	SiCl4 post valve closed
12/9/2012	9:07:14 PM	Main Vac valve closed
12/9/2012	9:07:14 PM	Bypass valve closed
12/9/2012	9:07:14 PM	H2 valve opened
12/9/2012	9:07:14 PM	Bubbler valve opened
12/9/2012	9:07:14 PM	Helium MFC set to  0.000000
12/9/2012	9:07:14 PM	H2 MFC set to  500.000000
12/9/2012	9:07:14 PM	BCl3 MFC set to  0.000000
12/9/2012	9:07:14 PM	PH3 MFC set to  0.000000
12/9/2012	9:07:14 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:07:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:07:14 PM	Tube furnace set to 750
12/9/2012	9:12:14 PM	H2 valve closed
12/9/2012	9:12:14 PM	BCl3 valve closed
12/9/2012	9:12:14 PM	PH3 valve closed
12/9/2012	9:12:14 PM	SiCl4 pre valve closed
12/9/2012	9:12:14 PM	SiCl4 post valve closed
12/9/2012	9:12:14 PM	Main Vac valve closed
12/9/2012	9:12:14 PM	Bypass valve closed
12/9/2012	9:12:14 PM	Helium valve opened
12/9/2012	9:12:14 PM	Bubbler valve opened
12/9/2012	9:12:14 PM	Helium MFC set to  500.000000
12/9/2012	9:12:14 PM	H2 MFC set to  0.000000
12/9/2012	9:12:14 PM	BCl3 MFC set to  0.000000
12/9/2012	9:12:14 PM	PH3 MFC set to  0.000000
12/9/2012	9:12:14 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:12:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:12:14 PM	Tube furnace set to 0
12/9/2012	9:21:49 PM	Helium valve closed
12/9/2012	9:21:49 PM	H2 valve closed
12/9/2012	9:21:49 PM	BCl3 valve closed
12/9/2012	9:21:49 PM	PH3 valve closed
12/9/2012	9:21:49 PM	SiCl4 pre valve closed
12/9/2012	9:21:49 PM	SiCl4 post valve closed
12/9/2012	9:21:49 PM	Main Vac valve closed
12/9/2012	9:21:49 PM	Bypass valve closed
12/9/2012	9:21:49 PM	Bubbler valve closed
12/9/2012	9:21:49 PM	Helium MFC set to  0.000000
12/9/2012	9:21:49 PM	H2 MFC set to  0.000000
12/9/2012	9:21:49 PM	BCl3 MFC set to  0.000000
12/9/2012	9:21:49 PM	PH3 MFC set to  0.000000
12/9/2012	9:21:49 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:21:49 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:21:49 PM	Tube furnace set to 0
12/9/2012	9:21:50 PM	Run finished at 9:21 PM
12/9/2012	9:22:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	9:22:13 PM	Recipe started at 9:22 PM
12/9/2012	9:22:13 PM	Helium valve closed
12/9/2012	9:22:13 PM	H2 valve closed
12/9/2012	9:22:13 PM	BCl3 valve closed
12/9/2012	9:22:13 PM	PH3 valve closed
12/9/2012	9:22:13 PM	SiCl4 pre valve closed
12/9/2012	9:22:13 PM	SiCl4 post valve closed
12/9/2012	9:22:13 PM	Main Vac valve closed
12/9/2012	9:22:13 PM	Bypass valve closed
12/9/2012	9:22:13 PM	Bubbler valve closed
12/9/2012	9:22:13 PM	Helium MFC set to  0.000000
12/9/2012	9:22:13 PM	H2 MFC set to  0.000000
12/9/2012	9:22:13 PM	BCl3 MFC set to  0.000000
12/9/2012	9:22:13 PM	PH3 MFC set to  0.000000
12/9/2012	9:22:13 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:22:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:22:13 PM	Tube furnace set to 0
12/9/2012	9:22:16 PM	H2 valve closed
12/9/2012	9:22:16 PM	BCl3 valve closed
12/9/2012	9:22:16 PM	PH3 valve closed
12/9/2012	9:22:16 PM	SiCl4 pre valve closed
12/9/2012	9:22:16 PM	SiCl4 post valve closed
12/9/2012	9:22:16 PM	Main Vac valve closed
12/9/2012	9:22:16 PM	Bypass valve closed
12/9/2012	9:22:16 PM	Bubbler valve closed
12/9/2012	9:22:16 PM	Helium valve opened
12/9/2012	9:22:16 PM	Helium MFC set to  500.000000
12/9/2012	9:22:16 PM	H2 MFC set to  0.000000
12/9/2012	9:22:16 PM	BCl3 MFC set to  0.000000
12/9/2012	9:22:16 PM	PH3 MFC set to  0.000000
12/9/2012	9:22:16 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:22:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:22:16 PM	Tube furnace set to 0
12/9/2012	9:22:17 PM	Helium valve closed
12/9/2012	9:22:17 PM	H2 valve closed
12/9/2012	9:22:17 PM	BCl3 valve closed
12/9/2012	9:22:17 PM	PH3 valve closed
12/9/2012	9:22:17 PM	SiCl4 pre valve closed
12/9/2012	9:22:17 PM	SiCl4 post valve closed
12/9/2012	9:22:17 PM	Main Vac valve closed
12/9/2012	9:22:17 PM	Bypass valve closed
12/9/2012	9:22:17 PM	Bubbler valve closed
12/9/2012	9:22:17 PM	Helium MFC set to  0.000000
12/9/2012	9:22:17 PM	H2 MFC set to  0.000000
12/9/2012	9:22:17 PM	BCl3 MFC set to  0.000000
12/9/2012	9:22:17 PM	PH3 MFC set to  0.000000
12/9/2012	9:22:17 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:22:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:22:17 PM	Tube furnace set to 0
12/9/2012	9:22:18 PM	Run finished at 9:22 PM
12/9/2012	9:22:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2012	9:32:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2012	9:32:04 PM	Recipe started at 9:32 PM
12/9/2012	9:32:04 PM	Helium valve closed
12/9/2012	9:32:04 PM	H2 valve closed
12/9/2012	9:32:04 PM	BCl3 valve closed
12/9/2012	9:32:04 PM	PH3 valve closed
12/9/2012	9:32:04 PM	SiCl4 pre valve closed
12/9/2012	9:32:04 PM	SiCl4 post valve closed
12/9/2012	9:32:04 PM	Main Vac valve closed
12/9/2012	9:32:04 PM	Bubbler valve closed
12/9/2012	9:32:04 PM	Bypass valve opened
12/9/2012	9:32:04 PM	Helium MFC set to  0.000000
12/9/2012	9:32:04 PM	H2 MFC set to  0.000000
12/9/2012	9:32:04 PM	BCl3 MFC set to  0.000000
12/9/2012	9:32:04 PM	PH3 MFC set to  0.000000
12/9/2012	9:32:04 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:32:04 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:32:05 PM	Tube furnace set to 0
12/9/2012	9:33:34 PM	Helium valve closed
12/9/2012	9:33:34 PM	H2 valve closed
12/9/2012	9:33:34 PM	BCl3 valve closed
12/9/2012	9:33:34 PM	PH3 valve closed
12/9/2012	9:33:34 PM	SiCl4 pre valve closed
12/9/2012	9:33:34 PM	SiCl4 post valve closed
12/9/2012	9:33:34 PM	Main Vac valve closed
12/9/2012	9:33:34 PM	Bubbler valve closed
12/9/2012	9:33:34 PM	Bypass valve opened
12/9/2012	9:33:34 PM	Helium MFC set to  0.000000
12/9/2012	9:33:34 PM	H2 MFC set to  0.000000
12/9/2012	9:33:34 PM	BCl3 MFC set to  0.000000
12/9/2012	9:33:34 PM	PH3 MFC set to  0.000000
12/9/2012	9:33:34 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:33:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:33:34 PM	Tube furnace set to 0
12/9/2012	9:33:48 PM	Helium valve closed
12/9/2012	9:33:48 PM	H2 valve closed
12/9/2012	9:33:48 PM	BCl3 valve closed
12/9/2012	9:33:48 PM	PH3 valve closed
12/9/2012	9:33:48 PM	SiCl4 pre valve closed
12/9/2012	9:33:48 PM	SiCl4 post valve closed
12/9/2012	9:33:48 PM	Bypass valve closed
12/9/2012	9:33:48 PM	Bubbler valve closed
12/9/2012	9:33:48 PM	Main Vac valve opened
12/9/2012	9:33:48 PM	Helium MFC set to  0.000000
12/9/2012	9:33:48 PM	H2 MFC set to  0.000000
12/9/2012	9:33:48 PM	BCl3 MFC set to  0.000000
12/9/2012	9:33:48 PM	PH3 MFC set to  0.000000
12/9/2012	9:33:48 PM	SiCl4 MFC set to  0.000000
12/9/2012	9:33:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2012	9:33:48 PM	Tube furnace set to 0
12/9/2012	9:33:49 PM	Run finished at 9:33 PM
12/9/2012	9:33:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
